186525 ⎘
Program-control systems; Nc systems; Servomotor, servo controller till figures Lookup table with compensation as function of reference and feedback value
Backlash compensation in motion control systems
#2Motor control apparatus for compensating reverse delay of motor
#3Transmission element having a segmented characteristics map
#4Method for obtaining improved feedforward data, a lithographic apparatus for carrying out the method and a device manufacturing method
#5Numerical controller
#6Linear motor force ripple identification and compensation with iterative learning control