186646 ⎘
Program-control systems; Nc systems; Servomotor, servo controller till figures Piezo, electrostrictive linear drive
Method for determining a torsion angle of a mirror body of an MEMS apparatus
#2Microscopic geometry cutting device and microscopic geometry cutting method
#3Compact versatile stick-slip piezoelectric motor
#4Microscopic geometry cutting device and microscopic geometry cutting method
#5Microscopic geometry cutting device including an arrival time calculator
#6Five axis compensated rotating stage
#7Method for using a cutting tool having variable movement in a z-direction laterally along a work piece for making microstructures
#8Method for using a cutting tool having variable movement at two simultaneously independent speeds in an x-direction into a work piece for making microstructures
#9Method for using a cutting tool having variable and independent movement in an x-direction and z-direction into and laterally along a work piece for making microstructures
#10Method for using a cutting tool having variable rotation about a y-direction transversely across a work piece for making microstructures
#11Cutting tool using one or more machined tool tips in a continuous or interrupted cut fast tool servo
#12Cutting tool using interrupted cut fast tool servo
#13Cutting tool having variable and independent movement in an x-direction and a z-direction into and laterally along a work piece for making microstructures
#14Cutting tool having variable movement in a z-direction laterally along a work piece for making microstructures
#15Cutting tool having variable rotation about a y-direction transversely across a work piece for making microstructures
#16Cutting tool having variable movement at two simultaneously independent speeds in an x-direction into a work piece for making microstructures
#17Method for producing microstructures
#18Device for producing microstructures
#19Method and circuit arrangement for the precise dynamic digital control of especially piezoelectric actuators for micropositioning systems
#20Method and apparatus for electrically controlling the stroke of a mechanical member
#21Machine tool control methods and designs for fabricating mesoscopic surface structures on substrates
#22Rotary actuator and method of controlling an actuator