186668 ⎘
Program-control systems; Nc systems; Servomotor, servo controller till figures Disturbance observer, inject disturbance, adapt controller to resulting effect
Method and device for detaching an adhering charge from the inner side of a grinding pipe of a tube mill
#2Position control apparatus, position control method, optical apparatus, and imaging apparatus
#3Method of control device and control device
#4Drive control method for moving body, exposure method, robot control method, drive control apparatus, exposure apparatus and robot apparatus
#5Movable body position control device and stage device using the movable body position control device