186775 ⎘
Program-control systems; Nc systems; Servomotor, servo controller kind till VSS Disturbance decoupling, rejection, suppression
MECHATRONIC SYSTEM CONTROL METHOD, LITHOGRAPHIC APPARATUS CONTROL METHOD AND LITHOGRAPHIC APPARATUS
#2Positioning control device for actuator provided with strain wave gearing using full-closed control with state observer
#3Positioning control device of actuator provided with strain wave gearing using H-∞ control
#4Servo control apparatus