186845 ⎘
Program-control systems; Nc systems; Servomotor, servo controller kind till VSS Position, speed and force feedback
CLOSED-LOOP CONTROLLER STRUCTURE FOR MIXED DIRECT/INDIRECT DRIVE OF A MACHINE ELEMENT
#2Parameter determination support device, and non-transitory computer-readable medium encoded with program
#3Method for controlling the position of a movable object, a control system for controlling a positioning device, and a lithographic apparatus
#4Velocity feedback compensation for force control systems
#5Velocity feedback compensation for force control systems
#6Controller for die cushion mechanism