G05B2219/49085 - CPC Classification Index

ClassID:

187597 ⎘

G05B2219/49085 - CPC Classification

Classification description:

Program-control systems; Nc systems; Nc machine tool, till multiple CMP end point analysis, measure parameters on points to detect end of polishing process

Recent Application in this class:

20230286105

2023-09-14

Filtering during in-situ monitoring of polishing

20220388113

2022-12-08

Filtering during in-situ monitoring of polishing

20190275633

2019-09-12

Filtering during in-situ monitoring of polishing

20130146224

2013-06-13

Adaptive endpoint method for pad life effect on chemical mechanical polishing

20120231555

2012-09-13

Adaptive endpoint method for pad life effect on chemical mechanical polishing

20060246820

2006-11-02

EXTENDED KALMAN FILTER INCORPORATING OFFLINE METROLOGY

20060237330

2006-10-26

Algorithm for real-time process control of electro-polishing

20060191870

2006-08-31

EXTENDED KALMAN FILTER INCORPORATING OFFLINE METROLOGY

20060163074

2006-07-27

Algorithm for real-time process control of electro-polishing

#10

20050284569

2005-12-29

Extended Kalman filter incorporating offline metrology