201959 ⎘
Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode due to rotation of flat or substantially flat electrodes becoming active in succession
Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods
#2Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods
#3Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods