202114 ⎘
Contacts; Switches making use of microelectromechanical systems [MEMS]; Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet operable only by mechanical latching
MEMS switch with latch mechanism
#2MEMS ACTUATORS AND SWITCHES
#3MICROMECHANICAL ACTUATOR
#4Moving a free-standing structure between high and low adhesion states
#5MEMS device with bi-directional element
#6Method of manufacturing a hysteretic MEMS two-dimensional thermal device
#7Swtich, Method and System For Switching The State of a Signal Path
#8Switch for use in microelectromechanical systems (MEMS) and MEMS devices incorporating same
#9Method for fabricating lateral-moving micromachined thermal bimorph
#10Hysteretic MEMS thermal device and method of manufacture
#11MEMS thermal actuator and method of manufacture
#12MEMS device with bi-directional element
#13MEMS ACTUATORS AND SWITCHES
#14MEMS thermal actuator and method of manufacture
#15Micro-actuator and locking switch
#16MEMS device using NiMn alloy and method of manufacture
#17Hysteretic MEMS thermal device and method of manufacture
#18Hysteretic MEMS two-dimensional thermal device and method of manufacture
#19Compact MEMS thermal device and method of manufacture
#20Spherical bistable mechanism
#21Electrostatically driven latchable actuator system
#22MEMS actuators and switches
#23Versatile system for a locking electro-thermal actuated MEMS switch
#24Resettable latching MEMS shock sensor apparatus and method
#25Microengineered broadband electrical switches
#26Microengineered self-releasing switch
#27Dual position linear displacement micromechanism
#28Storage device having a probe and a storage cell with moveable parts