202117 ⎘
Contacts; Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
Rapid micro electro mechanical system switching apparatus
#2Zero power sensors
#3Contactor
#4Method to create a reduced stiffness microstructure
#5RF mems crosspoint switch and crosspoint switch matrix comprising RF mems crosspoint switches
#6Reduced stiffness micro-mechanical structure
#7MEMS switching array having a substrate arranged to conduct switching current
#8Sensing modules and methods of using
#9Semiconductor integrated circuit including circuit for driving electrostatic actuator, micro-electro-mechanical systems, and driving method of electrostatic actuator
#10IMPLANTABLE SENSING MODULES AND METHODS OF USING
#11Semiconductor integrated circuit including circuit for driving electrostatic actuator, micro-electro-mechanical systems, and driving method of electrostatic actuator
#12RF MEMS switch with a flexible and free switch membrane
#13MEM switching device and method for making same
#14Micro-electro-mechanical module
#15Low consumption and low actuation voltage microswitch
#16Semiconductor integrated circuit including circuit for driving electrostatic actuator, micro-electro-mechanical systems, and driving method of electrostatic actuator
#17Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch
#18SWITCH USING MICRO ELECTRO MECHANICAL SYSTEM
#19Micro-electromechanical display backplane and improvements thereof
#20Semiconductor device formed by using MEMS technique
#21Switch device
#22Method for making an impact detector
#23Cantilevered micro-electromechanical switch array
#24Low-voltage and low-power toggle type-SPDT RF MEMS switch actuated by combination of electromagnetic and electrostatic forces
#25Semiconductor device using MEMS switch
#26MEM switching device