202118 ⎘
Contacts; Switches making use of microelectromechanical systems [MEMS] with multi dimensional movement, i.e. the movable actuator performing movements in at least two different directions
Electrically controllable integrated switch
#2Microelectromechanical device, which can be used as non-volatile memory module or relay, and memory including a plurality of microelectromechanical devices
#3Microelectromechanical device, which can be used as non-volatile memory module or relay, and memory including a plurality of microelectromechanical devices
#4Electrically controllable integrated switch
#5Electrically controllable integrated switch
#6Integrated electrical-switching mechanical device having a blocked state
#7Shock sensor with bistable mechanism and method of shock detection
#8Method of manufacturing a hysteretic MEMS two-dimensional thermal device
#9Hysteretic MEMS thermal device and method of manufacture
#10Hysteretic MEMS thermal device and method of manufacture
#11Hysteretic MEMS two-dimensional thermal device and method of manufacture
#12MEMS actuators and switches
#13Electrostatic relay
#14Lateral microelectromechanical system switch