202120 ⎘
Contacts; Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate
Method for manufacturing a MEMS switch having an embedded metal contact
#2Mechanical connection for a MEMS and NEMS device for measuring a variation in pressure, and device comprising such a mechanical connection
#3Electrically controllable integrated switch
#4Microelectromechanical device, which can be used as non-volatile memory module or relay, and memory including a plurality of microelectromechanical devices
#5Sensing devices, sensors, and methods for monitoring environmental conditions
#6RF-powered micromechanical clock generator
#7Electromechanical relay device
#8Naturally closed MEMs switch for ESD protection
#9Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas
#10Microelectromechanical device, which can be used as non-volatile memory module or relay, and memory including a plurality of microelectromechanical devices
#11Rapid micro electro mechanical system switching apparatus
#12Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas
#13Zero power sensors
#14Gateless switch with capacitively-coupled contacts
#15Micro-electromechanical resonators and methods of providing a reference frequency
#16Metallic device having mobile element in a cavity of the BEOL of an integrated circuit
#17Device to convert out-of-plane motion to in-plane motion and/or conversely
#18Switches for use in microelectromechanical and other systems, and processes for making same
#19Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas
#20Electrically controllable integrated switch
#21Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas
#22Electronic device and electronic apparatus having a fuse that is fractured by external forces
#23Electrostatic relay
#24Magnetic relay device made using MEMS or NEMS technology
#25Gateless switch with capacitively-coupled contacts
#26Switches for use in microelectromechanical and other systems, and processes for making same
#27Method for forming normally closed micromechanical device comprising a laterally movable element
#28Shock sensor with bistable mechanism and method of shock detection
#29Nanotube based nanoelectromechanical device
#30Structure for signal line, manufacturing method for signal line and switch using the signal line
#31Silicide micromechanical device and methods to fabricate same
#32Methods to fabricate silicide micromechanical device
#33MINIATURIZED SWITCH DEVICE
#34Acceleration switch
#35CMOS-MEMS switch structure
#36Method for fabricating a microswitch actuatable by a magnetic field
#37MEMS switch with latch mechanism
#38Electrostatically actuated micro-mechanical switching device
#39SWITCH, METHOD OF MANUFACTURING THE SAME, AND RELAY
#40ELECTROSTATIC RELAY
#41Miniaturized switch device
#42Nano-electro-mechanical systems switches
#43MEMS actuators with stress releasing design
#44MEMS ACTUATORS AND SWITCHES
#45MICROMECHANICAL ACTUATOR
#46Gateless switch with capacitively-coupled contacts
#47Multi-stable micro electromechanical switches and methods of fabricating same
#48Micro-electromechanical system switch
#49Very low voltage, ultrafast nanoelectromechanical switches and resonant switches
#50Multi-stage spring system
#51Switch for use in microelectromechanical systems (MEMS) and MEMS devices incorporating same
#52MEMS thermal actuator and method of manufacture
#53LATERAL SNAP ACTING MEMS MICRO SWITCH
#54MEMS actuator
#55MEMS actuators with stress releasing design
#56Micro-electromechanical voltage tunable capacitor and and filter devices
#57Micromechanical device with gold alloy contacts and method of manufacture
#58MEMS ACTUATORS AND SWITCHES
#59MEMS thermal actuator and method of manufacture
#60Electro-mechanical switch
#61Compact MEMS thermal device and method of manufacture
#62MEMS switch
#63Switch
#64Multi-stable micro electromechanical switches and methods of fabricating same
#65Miniaturized switch device
#66Switch
#67Micromechanical device and method of manufacture thereof
#68Micro-electro-mechanical RF switch
#69Dual position linear displacement micromechanism
#70Anchorless electrostatically activated micro electromechanical system switch
#71Lateral microelectromechanical system switch
#72Microelectromechanical (MEMS) switching apparatus