202121 ⎘
Contacts; Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
Encapsulated MEMS Switching Element, Device and Production Method
#2MEMS SWITCH
#3TWO-STAGE ACTUATION IN MEMS OHMIC RELAYS
#4Arrangement of MEMS switches
#5Actuator with buckling member stability
#6MEMS RF-switch with near-zero impact landing
#7Method of manufacturing semiconductor device
#8Integrated cantilever switch
#9Thermal management in high power RF MEMS switches
#10MEMS DUAL SUBSTRATE SWITCH WITH MAGNETIC ACTUATION
#11ESD protection of MEMS for RF applications
#12Current handling in legs and anchors of RF-switch
#13Contact in RF-switch
#14Microelectromechanical switch with metamaterial contacts
#15Integrated cantilever switch
#16MEMS SWITCH
#17DVC utilizing MIMS in the anchor
#18Zero power sensors
#19Integrated cantilever switch
#20Dual substrate electrostatic MEMS switch with multiple hinges and method of manufacture
#21Electromechanical system substrate attachment for reduced thermal deformation
#22RF MEMS electrodes with limited grain growth
#23Microelectronic switch and active matrix organic light emitting display device
#24MEMS swtich with internal conductive path
#25MEMS switch
#26Contact structure for electromechanical switch
#27Method for fabricating MEMS switch with reduced dielectric charging effect
#28MEMS device and manufacturing method thereof
#29Hybrid radio frequency component
#30Mechanical switch
#31Magnetic relay device made using MEMS or NEMS technology
#32RF mems crosspoint switch and crosspoint switch matrix comprising RF mems crosspoint switches
#33Electronic device
#34Nano/micro electro-mechanical relay
#35Contact structure for electromechanical switch
#36Frequency addressable microactuators
#37Switching apparatus and test apparatus
#38PREVENTING CONTACT STICTION IN MICRO RELAYS
#39RF MEMS switch and fabricating method thereof
#40MEMS switch with reduced dielectric charging effect
#41Pull up electrode and waffle type microstructure
#42MEMS switching array having a substrate arranged to conduct switching current
#43Electromechanical actuator with interdigitated electrodes
#44Method of forming a micro-electromechanical system device
#45Switch structures
#46Switch structure and method
#47THERMALLY ACTUATED RF MICROELECTROMECHANICAL SYSTEMS SWITCH
#48Switch structures
#49MEMS element and method of manufacturing the same
#50Micro-electromechanical system switch
#51Reduction of air damping in MEMS device
#52RF MEMS Switch
#53MEMS microswitch having a dual actuator and shared gate
#54Pressure switch employing silicon on insulator (SOI) technology
#55MEMS switches with deforming membranes
#56High isolation tunable MEMS capacitive switch
#57Method of fabricating a radio frequency (RF) microelectromechanical system (MEMS) asymmetrical switch
#58Semiconductor die micro electro-mechanical switch management method
#59MEM switching device and method for making same
#60Electro-mechanical switch
#61Method of fabricating a microelectromechanical system (MEMS) switch
#62Microswitch with a first actuated portion and a second contact portion
#63Low consumption and low actuation voltage microswitch
#64Micro electromechanical switch and method of manufacturing the same
#65Structure and method of fabricating a hinge type MEMS switch
#66Method and apparatus for an improved micro electro-mechanical display backplane
#67Micro-relay and method of fabricating the same
#68Bump style MEMS switch
#69High isolation tunable MEMS capacitive switch
#70Micro-electromechanical switch array
#71Micro-switching device and method of manufacturing micro-switching device
#72High cycle MEMS device
#73MEM switching device