H01H2001/0089 - CPC Classification Index

ClassID:

202122 ⎘

H01H2001/0089 - CPC Classification

Classification description:

Contacts; Switches making use of microelectromechanical systems [MEMS] Providing protection of elements to be released by etching of sacrificial element; Avoiding stiction problems, e.g. of movable element to substrate

Recent Application in this class:

20220199333

2022-06-23

Method for manufacturing variable radio frequency micro-electromechanical switch

20200321166

2020-10-08

VARIABLE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCH

20190066937

2019-02-28

MEMS DUAL SUBSTRATE SWITCH WITH MAGNETIC ACTUATION

20180261415

2018-09-13

Microelectromechanical switch with metamaterial contacts

20130032453

2013-02-07

Elimination of silicon residues from MEMS cavity floor

20100252403

2010-10-07

High voltage switch and method of making

20090009030

2009-01-08

MEMS piezoelectric switch

20080093691

2008-04-24

MEM switching device and method for making same

20080014663

2008-01-17

Method of fabricating a microelectromechanical system (MEMS) switch

#10

20070158775

2007-07-12

Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch

#11

20060208837

2006-09-21

Micro electromechanical switch and method of manufacturing the same

#12

20060145792

2006-07-06

Structure and method of fabricating a hinge type MEMS switch

#13

20050178646

2005-08-18

High-reliability micro-electro-mechanical system (MEMS) switch apparatus and method

#14

20050040484

2005-02-24

MEM switching device