203079 ⎘
Thermally-actuated switches Micromechanical switches operated thermally
Infrared sensor structure
#2Zero power plasmonic microelectromechanical device
#3Package integrated security features
#4Zero power plasmonic microelectromechanical device
#5Modules, systems, and methods for monitoring environmental conditions
#6Thermal Switch for Downhole Device
#7Integrated electrical-switching mechanical device having a blocked state
#8Device for monitoring the temperature of an element
#9Sensing modules and methods of using
#10THERMALLY ACTUATED RF MICROELECTROMECHANICAL SYSTEMS SWITCH
#11IMPLANTABLE SENSING MODULES AND METHODS OF USING
#12MEMS device with bi-directional element
#13Device for monitoring the temperature of an element
#14Method for fabricating lateral-moving micromachined thermal bimorph
#15Switch array
#16Miniaturized high conductivity thermal/electrical switch
#17MEMS device with bi-directional element
#18Microsystem and method for positioning a second element with respect to a first element in a microsystem
#19Mechanical switch with melting bridge
#20Beam switch structures and methods
#21Micro-electro-mechanical module
#22MEMS thermal device with slideably engaged tether and method of manufacture
#23MEMS switch with bistable element having straight beam components
#24Electrical contacts formed of carbon nanotubes
#25Miniature electro-optic device having a conductive element for modifying the state of passage of light between inlet/outlet points and corresponding uses thereof
#26Switch structures or the like based on a thermoresponsive polymer
#27MICRO ELECTROMECHANICAL SYSTEMS THERMAL SWITCH
#28Beam switch structures and methods
#29Miniaturized relay and corresponding uses
#30Magnetic levitation actuator
#31Microengineered broadband electrical switches
#32Process for manufacturing a microsystem