203394 ⎘
Electrostrictive relays; Piezo-electric relays Micromechanical piezoelectric relay
HYBRID RELAY
#2Hybrid relay
#3Switch unit, display panel, manufacturing method thereof, and display apparatus
#4Hybrid relay
#5Planar cavity MEMS and related structures, methods of manufacture and design structures
#6Planar cavity MEMS and related structures, methods of manufacture and design structures
#7Planar cavity mems and related structures, methods of manufacture and design structures
#8Nanocomposite force sensing material
#9Planar cavity MEMS and related structures, methods of manufacture and design structures
#10Planar cavity MEMS and related structures, methods of manufacture and design structures
#11Planar cavity MEMS and related structures, methods of manufacture and design structures
#12Planar cavity MEMS and related structures, methods of manufacture and design structures
#13Planar cavity MEMS and related structures, methods of manufacture and design structures
#14Package integrated security features
#15Hybrid relay
#16Planar cavity MEMS and related structures, methods of manufacture and design structures
#17Planar cavity MEMS and related structures, methods of manufacture and design structures
#18Planar cavity MEMS and related structures, methods of manufacture and design structures
#19Planar cavity MEMS and related structures, methods of manufacture and design structures
#20Piezoelectric micro-electro-mechanical actuator device, movable in the plane
#21Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas
#22Planar cavity MEMS and related structures, methods of manufacture and design structures
#23Planar cavity MEMS and related structures, methods of manufacture and design structures
#24Planar cavity MEMS and related structures, methods of manufacture and design structures
#25Planar cavity MEMS and related structures, methods of manufacture and design structures
#26Planar cavity MEMS and related structures, methods of manufacture and design structures
#27Nanocomposite sensing material
#28Planar cavity MEMS and related structures, methods of manufacture and design structures
#29Capacitive RF MEMS intended for high-power applications
#30Stacked film, electronic device substrate, electronic device, and method of fabricating stacked film
#31Stacked film, electronic device substrate, electronic device, and method of fabricating stacked film
#32Tunable radio frequency systems using piezoelectric package-integrated switching devices
#33Method for producing piezoelectric actuator and method for producing liquid transport apparatus
#34Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas
#35Radio frequency die package with inverted ground plane and method of making same
#36Very low power microelectromechanical devices for the internet of everything
#37Planar cavity MEMS and related structures, methods of manufacture and design structures
#38Piezoelectric nanoelectromechanical relays
#39Piezoelectronic switch device for RF applications
#40Radio frequency micro-electromechanical systems having inverted microstrip transmission lines and method of making the same
#41Localized key-click feedback
#42Planar cavity MEMS and related structures, methods of manufacture and design structures
#43Micro-electro-mechanical system and method for producing the same
#44Planar cavity MEMS and related structures, methods of manufacture and design structures
#45Planar cavity MEMS and related structures, methods of manufacture and design structures
#46Planar cavity MEMS and related structures, methods of manufacture and design structures
#47Ferroelectric mechanical memory based on remanent displacement and method
#48Piezoelectronic switch device for RF applications
#49Planar cavity MEMS and related structures, methods of manufacture and design structures
#50Reconfigurable device for terahertz (THz) and infrared (IR) filtering and modulation
#51MEMS-based switching system
#52Piezoelectric multiplexer
#53Planar cavity MEMS and related structures, methods of manufacture and design structures
#54Planar cavity MEMS and related structures, methods of manufacture and design structures
#55Planar cavity MEMS and related structures, methods of manufacture and design structures
#56Planar cavity MEMS and related structures, methods of manufacture and design structures
#57Planar cavity MEMS and related structures, methods of manufacture and design structures
#58Planar cavity MEMS and related structures, methods of manufacture and design structures
#59BAW component, lamination for a BAW component, and method for manufacturing a BAW component
#60Method for producing piezoelectric actuator and method for producing liquid transport apparatus
#61Piezoelectric multiplexer
#62Hybrid relay
#63Planar cavity MEMS and related structures, methods of manufacture and design structures
#64Micro-electro-mechanical system (MEMS) structure and design structures
#65Piezoelectric actuator device and method for manufacturing same
#66Electric device and method of manufacturing the same
#67MEMS switch
#68Hybrid radio frequency component
#69Planar cavity MEMS and related structures, methods of manufacture and design structures
#70Magnetic switching system
#71Actuator apparatus, test apparatus, and test method
#72Planar cavity MEMS and related structures, methods of manufacture and design structures
#73Planar cavity MEMS and related structures, methods of manufacture and design structures
#74Micro-electro-mechanical system (MEMS) structures and design structures
#75Micro-electro-mechanical system (MEMS) structures and design structures
#76Electric device and method of manufacturing the same
#77Switching apparatus and test apparatus
#78Switching apparatus and test apparatus
#79Switching apparatus, switching apparatus manufacturing method, transmission line switching apparatus, and test apparatus
#80Method for manufacturing bimorph actuator
#81Electro-Mechanical Device Having a Piezoelectric Actuator
#82Nano/micro electro-mechanical relay
#83Manufacturing method, switching apparatus, transmission line switching apparatus, and test apparatus
#84Switching apparatus and test apparatus
#85Micro-electro-mechanical device with a piezoelectric actuator
#86Method for manufacturing a switching element
#87Planar cavity MEMS and related structures, methods of manufacture and design structures
#88Planar cavity MEMS and related structures, methods of manufacture and design structures
#89Planar cavity MEMS and related structures, methods of manufacture and design structures
#90Planar cavity MEMS and related structures, methods of manufacture and design structures
#91Planar cavity MEMS and related structures, methods of manufacture and design structures
#92Methods of manufacture for micro-electro-mechanical system (MEMS)
#93Planar cavity MEMS and related structures, methods of manufacture and design structures
#94Planar cavity MEMS and related structures, methods of manufacture and design structures
#95Method of manufacturing a micro-electro-mechanical system (MEMS)
#96PLANAR VOLTAGE PROTECTION ASSEMBLY
#97Piezoelectric ALN RF MEM switches monolithically integrated with ALN contour-mode resonators
#98Actuator element, method of driving actuator element, method of manufacturing actuator element, device inspection method and MEMS switch
#99Piezoelectric MEMS switch and method of manufacturing piezoelectric MEMS switch
#100Systems and methods for operating piezoelectric switches
#101Nano-electro-mechanical systems switches
#102Piezoelectric MEMS element, voltage control oscillator, communication apparatus, and method of manufacturing piezoelectric drive type MEMS element
#103MEMs devices
#104Wake-up unit for waking up an electronic device and method of waking up an electronic device
#105MEMS switch and method of manufacturing the MEMS switch
#106Self-locking micro electro mechanical device
#107Piezoelectric-driven MEMS element
#108Micro-electro-mechanical device with a piezoelectric actuator
#109Method of manufacturing a piezoelectric transistor
#110MEMS variable capacitor having a piezoelectric actuation mechanism based on a piezoelectric thin film
#111Micro movable device and method of making the same using wet etching
#112Electronic device
#113Electronic apparatus with a micro-electromechanical switch made of a piezoeletric material
#114Actuator
#115Method for producing piezoelectric actuator and method for producing liquid transport apparatus
#116Actuator and electronic hardware using the same
#117Cantilever with pivoting actuation
#118MEMS microswitch having a dual actuator and shared gate
#119Electrical switch element, particularly a relay, with swivelling lever switch mechanism
#120Self-poling piezoelectric MEMs device
#121MEMS capacitor with conductively tethered moveable capacitor plate
#122Piezoelectric driven MEMS apparatus and portable terminal
#123Electromechanical switch, filter using the same, and communication apparatus
#124Tuneable electronic devices and electronic arrangements comprising such tuneable devices
#125MEMS piezoelectric switch
#126Assembly of a microswitch and of an acoustic resonator
#127MEMS device with low operation voltage, large contact pressure force, and large separation force, and portable communication terminal with the MEMS device
#128Switching element, method for manufacturing the same, and display device including switching element
#129Micro-switching device and method of manufacturing the same
#130Piezoelectric-driven MEMS device and method for manufacturing the same
#131Relay Device Using Conductive Fluid
#132Piezoelectric thin film device and method for manufacturing the same
#133Piezoelectric thin film device and method for manufacturing the same
#134HIGH FREQUENCY CIRCUIT APPARATUS
#135Electro-mechanical switch
#136MEMS SWITCH
#137Piezoelectric driven MEMS device
#138Control and testing of a micro electromechanical switch having a piezo element
#139MEMS switch
#140Thin film piezoelectric actuator
#141Piezoelectric MEMS switch and method of fabricating the same
#142Piezoelectric driven MEMS device
#143Method of manufacturing a MEMS device and MEMS device
#144Piezoelectric MEMS switches and methods of making
#145Downward type MEMS switch and method for fabricating the same
#146Piezolectric micro electro-mechanical system switch, array of the switches, and method of fabricating the same
#147RF MEMS switch and method for fabricating the same
#148RF MEMS switch and fabrication method thereof
#149Electronic device
#150Fabrication method of an RF MEMS switch
#151Device including piezoelectric thin film and a support having a vertical cross-section with a curvature
#152MEMS element having a dummy pattern
#153MEMS switch actuated by the electrostatic force and piezoelectric force
#154Micro-mechanical device, micro-switch, variable capacitor high frequency circuit and optical switch
#155Micro electromechanical system switch
#156Semiconductor device using MEMS technology
#157Semiconductor device formed by using MEMS technique
#158Actuator and micro-electromechanical system device
#159Actuator, switch using the actuator, and method of controlling the actuator
#160Micro movable device and method of making the same using wet etching
#161Microswitching element
#162Piezoelectric and electrostatic microelectromechanical system actuator
#163Microelectrical device
#164Piezoelectric driving type MEMS apparatus
#165Semiconductor device having actuator
#166Piezoelectric MEMS element and tunable filter equipped with the piezoelectric MEMS element
#167Piezoelectric actuator and micro-electromechanical device
#168Diaphragm activated micro-electromechanical switch
#169Inspecting method of elastic body, inspecting apparatus thereof, and dimension predicting program thereof
#170Piezoelectric-driven MEMS device and method for manufacturing the same
#171Microswitch and method for manufacturing the same
#172Microelectromechanical system able to switch between two stable positions
#173Thin film piezoelectric actuator
#174Piezoelectric thin film device and method for manufacturing the same
#175Electro-mechanical micro-switch device
#176Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
#177Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
#178RF MEMS switch and fabrication method thereof
#179Piezoelectric switch for tunable electronic components
#180Manufacturing methods of micro electromechanical switch
#181Electrostatic RF MEMS switches