203397 ⎘
Electrostatic relays; Electro-adhesion relays making use of micromechanics Special provisions for avoiding charge trapping, e.g. insulation layer between actuating electrodes being permanently polarised by charge trapping so that actuating or release voltage is altered
Systems and methods of operation of capacitive radio frequency micro-electromechanical switches
#2MEMS RF-switch with controlled contact landing
#3Liquid dielectric electrostatic MEMS switch and method of fabrication thereof
#4Method of manufacturing MEMS switches with reduced switching voltage
#5Method of manufacturing MEMS switches with reduced switching voltage
#6MEMS SWITCH
#7Methods of manufacturing for MEMS switches with reduced switching voltage
#8Methods of manufacture for MEMS switches with reduced switching voltage
#9Method of manufacturing a switch
#10Method of manufacturing a switch
#11Method of manufacture MEMS switches with reduced voltage
#12Method of manufacturing MEMS switches with reduced voltage
#13Method of manufacturing MEMS switches with reduced switching voltage
#14Method of manufacturing MEMS switches with reduced switching volume
#15MEMS switch
#16Systems, devices, and methods for reducing surface dielectric charging in a RF MEMS actuator element
#17MEMS switches with reduced switching voltage and methods of manufacture
#18Integrated micro-electromechanical switches and a related method thereof
#19Stiction reduction for MEMS devices
#20RF micro-electro-mechanical system (MEMS) capacitive switch
#21Method for reducing substrate charging
#22MEMS device with integral packaging
#23RF MEMS switch with a grating as middle electrode
#24Semiconductor integrated circuit including circuit for driving electrostatic actuator, micro-electro-mechanical systems, and driving method of electrostatic actuator
#25Capacitive micro-switch comprising a charge drain based on oriented nanotubes on the bottom electrode and method of fabrication
#26Semiconductor integrated circuit including circuit for driving electrostatic actuator, micro-electro-mechanical systems, and driving method of electrostatic actuator
#27Semiconductor device
#28MEMS RF-switch using semiconductor
#29Collapsible contact switch
#30MEMS switches with reduced switching voltage and methods of manufacture
#31System and method for avoiding contact stiction in micro-electromechanical system based switch
#32MEMS device with integral packaging
#33Apparatus and method for drive controlling micro machine device
#34Collapsible contact switch
#35Semiconductor integrated circuit including circuit for driving electrostatic actuator, micro-electro-mechanical systems, and driving method of electrostatic actuator
#36Method and apparatus for reducing dielectric charging in MEMS structures
#37Semiconductor device formed by using MEMS technique
#38Stress bimorph MEMS switches and methods of making same
#39Electrostatic microswitch for low-voltage-actuation component
#40Mechanism to prevent actuation charging in microelectromechanical actuators
#41MEMS RF-switch using semiconductor
#42Collapsible contact switch
#43MEMS device with integral packaging
#44Microrelays and microrelay fabrication and operating methods
#45Micro-electro-mechanical switch, and methods of making and using it