ClassID:

203397

H01H2059/0018 - CPC Classification

Classification description:

Electrostatic relays; Electro-adhesion relays making use of micromechanics Special provisions for avoiding charge trapping, e.g. insulation layer between actuating electrodes being permanently polarised by charge trapping so that actuating or release voltage is altered

Recent Application in this class:
#1
20200015784
2020-01-16

Systems and methods of operation of capacitive radio frequency micro-electromechanical switches

#2
20180315571
2018-11-01

MEMS RF-switch with controlled contact landing

#3
20180174788
2018-06-21

Liquid dielectric electrostatic MEMS switch and method of fabrication thereof

#4
20180093884
2018-04-05

Method of manufacturing MEMS switches with reduced switching voltage

#5
20180065847
2018-03-08

Method of manufacturing MEMS switches with reduced switching voltage

#6
20180033565
2018-02-01

MEMS SWITCH

#7
20180016138
2018-01-18

Methods of manufacturing for MEMS switches with reduced switching voltage

#8
20180016137
2018-01-18

Methods of manufacture for MEMS switches with reduced switching voltage

#9
20170294274
2017-10-12

Method of manufacturing a switch

#10
20160145097
2016-05-26

Method of manufacturing a switch

#11
20160035513
2016-02-04

Method of manufacture MEMS switches with reduced voltage

#12
20160035512
2016-02-04

Method of manufacturing MEMS switches with reduced voltage

#13
20160035511
2016-02-04

Method of manufacturing MEMS switches with reduced switching voltage

#14
20160035510
2016-02-04

Method of manufacturing MEMS switches with reduced switching volume

#15
20150311003
2015-10-29

MEMS switch

#16
20150279602
2015-10-01

Systems, devices, and methods for reducing surface dielectric charging in a RF MEMS actuator element

#17
20150200069
2015-07-16

MEMS switches with reduced switching voltage and methods of manufacture

#18
20140305777
2014-10-16

Integrated micro-electromechanical switches and a related method thereof

#19
20140159779
2014-06-12

Stiction reduction for MEMS devices

#20
20130284571
2013-10-31

RF micro-electro-mechanical system (MEMS) capacitive switch

#21
20120279837
2012-11-08

Method for reducing substrate charging

#22
20120193754
2012-08-02

MEMS device with integral packaging

#23
20120048709
2012-03-01

RF MEMS switch with a grating as middle electrode

#24
20110115546
2011-05-19

Semiconductor integrated circuit including circuit for driving electrostatic actuator, micro-electro-mechanical systems, and driving method of electrostatic actuator

#25
20110100793
2011-05-05

Capacitive micro-switch comprising a charge drain based on oriented nanotubes on the bottom electrode and method of fabrication

#26
20100246087
2010-09-30

Semiconductor integrated circuit including circuit for driving electrostatic actuator, micro-electro-mechanical systems, and driving method of electrostatic actuator

#27
20100238600
2010-09-23

Semiconductor device

#28
20100133077
2010-06-03

MEMS RF-switch using semiconductor

#29
20090266688
2009-10-29

Collapsible contact switch

#30
20090260961
2009-10-22

MEMS switches with reduced switching voltage and methods of manufacture

#31
20090107813
2009-04-30

System and method for avoiding contact stiction in micro-electromechanical system based switch

#32
20080272867
2008-11-06

MEMS device with integral packaging

#33
20080239611
2008-10-02

Apparatus and method for drive controlling micro machine device

#34
20070256918
2007-11-08

Collapsible contact switch

#35
20070181411
2007-08-09

Semiconductor integrated circuit including circuit for driving electrostatic actuator, micro-electro-mechanical systems, and driving method of electrostatic actuator

#36
20060276015
2006-12-07

Method and apparatus for reducing dielectric charging in MEMS structures

#37
20060226735
2006-10-12

Semiconductor device formed by using MEMS technique

#38
20060181379
2006-08-17

Stress bimorph MEMS switches and methods of making same

#39
20060091983
2006-05-04

Electrostatic microswitch for low-voltage-actuation component

#40
20060065942
2006-03-30

Mechanism to prevent actuation charging in microelectromechanical actuators

#41
20060012940
2006-01-19

MEMS RF-switch using semiconductor

#42
20050219016
2005-10-06

Collapsible contact switch

#43
20050168306
2005-08-04

MEMS device with integral packaging

#44
20050121298
2005-06-09

Microrelays and microrelay fabrication and operating methods

#45
20050012577
2005-01-20

Micro-electro-mechanical switch, and methods of making and using it