203398 ⎘
Electrostatic relays; Electro-adhesion relays making use of micromechanics Movable electrode connected to ground in the open position, for improving isolation
MEMS SWITCH WITH BEAM CONTACT PORTION CONTINUOUSLY EXTENDING BETWEEN INPUT AND OUTPUT TERMINAL ELECTRODES
#2Radio frequency micro-electro-mechanical switch and radio frequency device
#3MEMS switch with multiple pull-down electrodes between terminal electrodes
#4MEMS SWITCH WITH BEAM CONTACT PORTION CONTINUOUSLY EXTENDING BETWEEN INPUT AND OUTPUT TERMINAL ELECTRODES
#5MEMS element and electrical circuit
#6Mems switch with multiple pull-down electrodes between terminal electrodes
#7MEMS membrane with integrated transmission line
#8Thermal management in high power RF MEMS switches
#9Microelectromechanical switch with metamaterial contacts
#10Active opening MEMS switch device
#11MEMS switches and fabrication methods
#12MICRO ELECTROMECHANICAL SYSTEM (MEMS) SWITCH
#13Micro-electromechanical device and module and method of manufacturing same
#14Micro-relay and method of fabricating the same
#15Switch
#16Relay
#17Relay