203399 ⎘
Electrostatic relays; Electro-adhesion relays making use of micromechanics Movable armature with higher resonant frequency for faster switching
MEMS SWITCH WITH BEAM CONTACT PORTION CONTINUOUSLY EXTENDING BETWEEN INPUT AND OUTPUT TERMINAL ELECTRODES
#2MEMS SWITCH WITH BEAM CONTACT PORTION CONTINUOUSLY EXTENDING BETWEEN INPUT AND OUTPUT TERMINAL ELECTRODES
#3Contact structure for electromechanical switch
#4Frequency addressable microactuators
#5Moving a free-standing structure between high and low adhesion states
#6MEMS element and method of manufacturing the same
#7Nanoelectromechanical components
#8Vibration type MEMS switch and fabricating method thereof
#9Micro-electromechanical switch array
#10Electro-mechanical micro-switch device
#11Microelectromechanical (MEMS) switching apparatus