203400 ⎘
Electrostatic relays; Electro-adhesion relays making use of micromechanics with s-shaped movable electrode, positioned and connected between two driving fixed electrodes, e.g. movable electrodes moving laterally when driving voltage being applied
ELECTROSTATIC ACTUATOR
#2Vertical electromechanical memory devices and methods of manufacturing the same
#3Film Actuator Based Mems Device and Method
#4Apparatus comprising an array of switches and display
#5Micro-electromechanical device and module and method of manufacturing same