203401 ⎘
Electrostatic relays; Electro-adhesion relays making use of micromechanics Rocking contacts or actuating members
MEMS SWITCH FOR RF APPLICATIONS
#2Electromechanical relay with deformable conductive beam and drain electrode
#3Electrically controllable integrated switch
#4Active opening MEMS switch device
#5Electrically controllable integrated switch
#6Micro-electro-mechanical system (MEMS) structure and design structures
#7Electrically controllable integrated switch
#8MEMS switch
#9Structure of spring and actuator using the spring
#10Moving a free-standing structure between high and low adhesion states
#11Micro movable device
#12Tuneable electronic devices and electronic arrangements comprising such tuneable devices
#13Mems switch and method of fabricating the same
#14Switch
#15MEMS switch and manufacturing method thereof
#16Switch pad and micro-switch having the same
#17Spring structure and micro-structure employing the same
#18Galvanically isolated signal conditioning system
#19MEMS switch and method of fabricating the same
#20Switch device
#21MEMS switch and method of fabricating the same
#22Electrostatic actuator
#23Sealed integral MEMS switch
#24Low-voltage micro-switch actuation technique
#25Seesaw-type MEMS switch and method for manufacturing the same
#26Electrostatic actuator, microswitch, micro optical switch, electronic device, and method of manufacturing electrostatic actuator