203402 ⎘
Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation
Electronic Module and Apparatus
#2Electrostatic drive switch
#3Switch arrangements for microelectromechanical systems
#4Stiction reduction for MEMS devices
#5Moving a free-standing structure between high and low adhesion states
#6Micro-electro mechanical tunneling switch
#7Spring structure for MEMS device
#8Mems switch and method of fabricating the same
#9Micro-electromechanical system (MEMS) switch
#10Micro-Electromechanical Switch Performance Enhancement
#11Ultra-low voltage capable zipper switch
#12Collapsing zipper varactor with inter-digit actuation electrodes for tunable filters
#13Method for designing a micro electromechanical device with reduced self-actuation
#14Electrostatic micro-switch for components with low operating voltages
#15Switching matrix with two control inputs and a hold input at each switching element
#16MEMS switch and method of fabricating the same
#17Electrostatic relay
#18Vibration type MEMS switch and fabricating method thereof
#19Electro-mechanical micro-switch device
#20Micro-electromechanical switch performance enhancement