203403 ⎘
Electrostatic relays; Electro-adhesion relays making use of micromechanics with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position
MEMS switch with multiple pull-down electrodes between terminal electrodes
#2Mems switch with multiple pull-down electrodes between terminal electrodes
#3MEMS RF-switch with near-zero impact landing
#4Thermal management in high power RF MEMS switches
#5MEMS RF-switch with controlled contact landing
#6Liquid dielectric electrostatic MEMS switch and method of fabrication thereof
#7Robust microelectromechanical switch
#8Very low power microelectromechanical devices for the internet of everything
#9MEMS digital variable capacitor design with high linearity
#10Systems, devices, and methods for reducing surface dielectric charging in a RF MEMS actuator element
#11Electrostatic actuator, variable capacitance capacitor, electric switch, and method for driving electrostatic actuator
#12RF mems crosspoint switch and crosspoint switch matrix comprising RF mems crosspoint switches
#13RF micro-electro-mechanical system (MEMS) capacitive switch
#14MEMS device with integral packaging
#15MEMS switch and communication device using the same
#16MEMS switch and communication device using the same
#17Swtich, Method and System For Switching The State of a Signal Path
#18MEMS SWITCH PROVIDED WITH MOVABLE ELECTRODE MEMBER SUPPORTED THROUGH SPRINGS ON SUBSTRATE HAVING BUMP
#19Collapsible contact switch
#20Microelectromechanical device having a common ground plane and method for making aspects thereof
#21Electronic device
#22Capacitive RF-MEMS device with integrated decoupling capacitor
#23MEMS microswitch having a conductive mechanical stop
#24Device for Connecting Two Points in an Electric Circuit
#25Microfabricated cantilever slider with asymmetric spring constant
#26MEMS switch
#27MEMS device with integral packaging
#28MEMS device with low operation voltage, large contact pressure force, and large separation force, and portable communication terminal with the MEMS device
#29Micro-electro mechanical tunneling switch
#30Method for fabricating a micro-electromechanical system switch
#31Collapsible contact switch
#32Film Actuator Based Mems Device and Method
#33Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch
#34Micro-electromechanical system (MEMS) switch
#35Microelectromechanical switches having mechanically active components which are electrically isolated from components of the switch used for the transmission of signals
#36Ultra-low voltage capable zipper switch
#37Stress bimorph MEMS switches and methods of making same
#38Switch device
#39Microelectromechanical device having a common ground plane layer and a set of contact teeth and method for making aspects thereof
#40Electrostatic microswitch for low-voltage-actuation component
#41Electrostatic relay
#42Micro-electromechanical systems switch and method of fabricating the same
#43Variable capacitance element
#44Micro-relay and method of fabricating the same
#45Liquid metal contact microrelay
#46Collapsible contact switch
#47Method of fabricating semiconductor devices employing at least one modulation doped quantum well structure and one or more etch stop layers for accurate contact formation
#48Head electrode region for a reliable metal-to-metal contact micro-relay MEMS switch
#49MEMS device with integral packaging
#50Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
#51Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
#52MEMS switch stopper bumps with adjustable height
#53High cycle MEMS device
#54Variable capacitance element
#55Micro-electro-mechanical switch, and methods of making and using it