203410 ⎘
Electrothermal relays; Micromechanical thermal relay Micromechanical actuator with a cold and a hot arm, coupled together at one end
PACKAGE-INTEGRATED BISTABLE SWITCH FOR ELECTROSTATIC DISCHARGE (ESD) PROTECTION
#2Package-integrated bistable switch for electrostatic discharge (ESD) protection
#3Integrated electrical-switching mechanical device having a blocked state
#4MEMS actuators with stress releasing design
#5MEMS ACTUATORS AND SWITCHES
#6MICROMECHANICAL ACTUATOR
#7MEMS device with bi-directional element
#8Electro-mechanical actuator device and apparatus incorporating such device
#9Thermal bend actuator material selection
#10Method of manufacturing a hysteretic MEMS two-dimensional thermal device
#11MICRO--ELECTROMECHANICAL ACTUATOR WITH SPACER SEPARATED LAYERS
#12Hysteretic MEMS thermal device and method of manufacture
#13MEMS thermal actuator and method of manufacture
#14MEMS actuator
#15Thermal actuator for a MEMS-based relay switch
#16MEMS actuators with even stress distribution
#17MEMS actuators with stress releasing design
#18MEMS device with bi-directional element
#19Micromechanical device with gold alloy contacts and method of manufacture
#20MEMS actuators and switches
#21MEMS ACTUATORS AND SWITCHES
#22MEMS thermal actuator and method of manufacture
#23Contact electrode for microdevices and etch method of manufacture
#24Singly attached MEMS thermal device and method of manufacture
#25Micro-actuator and locking switch
#26Thermoelastic device with preselected resistivity, inertness and deposition characteristics
#27MEMS thermal device with slideably engaged tether and method of manufacture
#28Method and apparatus for curing epoxy-based photoresist using a continuously varying temperature profile
#29Hysteretic MEMS thermal device and method of manufacture
#30Hysteretic MEMS two-dimensional thermal device and method of manufacture
#31Compact MEMS thermal device and method of manufacture
#32Thermoelastic device comprising an expansive element formed from a preselected material
#33Thermoelastically actuated microresonator
#34MEMS actuators and switches
#35Micro-electromechanical actuator
#36Microengineered self-releasing switch
#37Thermoelastic device comprising an expansive element formed from a preselected material