H01J15/02 - CPC Classification Index

ClassID:

204741 ⎘

H01J15/02 - CPC Classification

Classification description:

Gas-filled discharge tubes with gaseous cathodes, e.g. plasma cathode Details, e.g. electrode, gas filling, shape of vessel

Sub-classes:

ELECTRON BEAM WELDING SYSTEMS EMPLOYING A PLASMA CATHODE

Multiple-electrode plasma processing systems with confined process chambers and interior-bussed electrical connections with the electrodes

Apparatus and method for regulating the output of a plasma electron beam source

Multiple-electrode plasma processing systems with confined process chambers and interior-bussed electrical connections with the electrodes