206414 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Means for deflecting or directing discharge Associated circuits
ULTRA FAST PULSER FOR LOW ENERGY ELECTRON BEAMS
#2CALIBRATION OF DIGITAL ANALOG CONVERTER TO CONTROL DEFLECTORS IN CHARGED PARTICLE BEAM SYSTEM
#3Charged Particle Beam System and Control Method Therefor
#4AN APPARATUS USING ENHANCED DEFLECTORS TO MANIPULATE CHARGED PARTICLE BEAMS
#5Multi-leaf collimator
#6Blanking aperture array unit
#7Multiple charged-particle beam apparatus with low crosstalk
#8Charged particle beam apparatus and control method
#9Multi-beam writing method and multi-beam writing apparatus
#10Multi-leaf collimator
#11Charged particle beam lithography apparatus and charged particle beam pattern writing method
#12Scanning efficiency by individual beam steering of multi-beam apparatus
#13Ion source device
#14Charged particle beam axial alignment device, charged particle beam irradiation device and charged particle beam axial alignment method
#15Charged particle beam lithography apparatus and charged particle beam pattern writing method
#16Charged particle beam apparatus
#17Charged particle beam writing apparatus, and charged particle beam writing method
#18Multicolumn charged particle beam exposure apparatus
#19Charged particle beam device
#20Studying dynamic specimen behavior in a charged-particle microscope
#21System and method for high power pulse generator
#22Charged particle beam device
#23Charged particle beam writing apparatus and charged particle beam writing method
#24Charged particle beam writing apparatus and charged particle beam writing method
#25CHARGED PARTICLE BEAM ADJUSTMENT ASSISTANCE DEVICE AND METHOD
#26Processing apparatus and method using a scanning electron microscope
#27Generation of charged particle vortex waves
#28Beamlet blanker arrangement
#29Pattern modification schemes for improved FIB patterning
#30Charged particle optical system comprising an electrostatic deflector
#31Charged particle beam writing apparatus and method for diagnosing DAC amplifier unit in charged particle beam writing apparatus
#32Charged-particle beam writing apparatus and charged-particle beam writing method
#33ELECTRON BEAM DRAWING APPARATUS
#34D/A conversion device and method and charged particle beam exposure apparatus and method
#35Charged beam drawing apparatus
#36Charged particle beam writing method and apparatus
#37Electrostatic deflection system with impedance matching for high positioning accuracy
#38Electron beam apparatus, and inspection instrument and inspection process thereof
#39Electron beam apparatus, and inspection instrument and inspection process thereof
#40Method and fine-control collimator for accurate collimation and precise parallel alignment of scanned ion beams
#41Electromagnetic regulator assembly for adjusting and controlling the current uniformity of continuous ion beams
#42Beam current density distribution adjustment device and ion implanter