Patents-Review.com
ClassID:

206418 ⎘

H01J2237/1508 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Means for deflecting or directing discharge Combined electrostatic-electromagnetic means

Recent Application in this class:
#1
20260031302
2026-01-29

HIGH ENERGY IMPLANTER WITH SMALL FOOTPRINT

 #2
20250104965
2025-03-27

HIGH ENERGY IMPLANTER WITH SMALL FOOTPRINT

 #3
20240079200
2024-03-07

MULTI-ELECTRON BEAM IMAGE ACQUIRING APPARATUS AND MULTI-ELECTRON BEAM IMAGE ACQUIRING METHOD

 #4
20240055219
2024-02-15

ELECTRON OPTICAL COLUMN AND METHOD FOR DIRECTING A BEAM OF PRIMARY ELECTRONS ONTO A SAMPLE

 #5
20230343550
2023-10-26

Charged Particle Beam System and Control Method Therefor

 #6
20220319808
2022-10-06

Multi-beam inspection apparatus with improved detection performance of signal electrons

 #7
20220189726
2022-06-16

System and method for alignment of secondary beams in multi-beam inspection apparatus

 #8
20210151291
2021-05-20

Multi-beam inspection apparatus with improved detection performance of signal electrons

 #9
20190378677
2019-12-12

Beam bender

 #10
20190279844
2019-09-12

Multi-beam inspection apparatus with improved detection performance of signal electrons

 #11
20190259564
2019-08-22

Signal separator for a multi-beam charged particle inspection apparatus

 #12
20190206655
2019-07-04

Measuring spherical and chromatic aberrations in cathode lens electrode microscopes

 #13
20180337017
2018-11-22

Measuring spherical and chromatic aberrations in cathode lens electrode microscopes

 #14
20180269031
2018-09-20

Scanning transmission electron microscope

 #15
20180158644
2018-06-07

Method and system for aberration correction in an electron beam system

 #16
20170271121
2017-09-21

Charged particle beam device

 #17
20170018402
2017-01-19

Method of reducing coma and chromatic aberration in a charged particle beam device, and charged particle beam device

 #18
20160293377
2016-10-06

Apparatus for GHz rate high duty cycle pulsing and manipulation of low and medium energy DC electron beams

 #19
20160181058
2016-06-23

Method for processing and/or for observing an object, and particle beam device for carrying out the method

 #20
20160172150
2016-06-16

Swing objective lens

 #21
20160104597
2016-04-14

Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun

 #22
20120318978
2012-12-20

Monochromator for charged particle beam apparatus

 #23
20110291021
2011-12-01

Reflection electron beam projection lithography using an ExB separator

 #24
20110163229
2011-07-07

HIGH THROUGHPUT SEM TOOL

 #25
20110139978
2011-06-16

CHARGED PARTICLE BEAM DEVICE, METHOD OF OPERATING A CHARGED PARTICLE BEAM DEVICE

 #26
20110089322
2011-04-21

Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separator

 #27
20100320382
2010-12-23

Multi-beam scanning electron beam device and methods of using the same

 #28
20100084576
2010-04-08

Hybrid scanning for ion implantation

 #29
20090184255
2009-07-23

Inspection method and inspection system using charged particle beam

 #30
20080265161
2008-10-30

Electron Microscope And Electron Beam Inspection System

 #31
20070187619
2007-08-16

Electromagnet with active field containment

 #32
20070181808
2007-08-09

Electron microscope and electron bean inspection system.

 #33
20070023673
2007-02-01

Electric-magnetic field-generating element and assembling method for same

 #34
20060243906
2006-11-02

Inspection method and inspection system using charged particle beam

 #35
20060016989
2006-01-26

Electron beam apparatus and a device manufacturing method using the same apparatus

 #36
20060011835
2006-01-19

Electron microscope and electron beam inspection system

 #37
20050082498
2005-04-21

Method and fine-control collimator for accurate collimation and precise parallel alignment of scanned ion beams