Patents-Review.com
ClassID:

206422 ⎘

H01J2237/1516 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Means for deflecting or directing discharge; Electrostatic means Multipoles

Recent Application in this class:
#1
20260148929
2026-05-28

COLLATION SYSTEM

 #2
20260135059
2026-05-14

MODULAR OPTICAL BENCH ASSEMBLY

 #3
20250232945
2025-07-17

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #4
20250191874
2025-06-12

OPTICAL SYSTEM FOR A PLURALITY OF PRIMARY BEAMLETS, CHARGED PARTICLE MULTI-BEAM APPARATUS AND METHOD OF FOCUSING A PLURALITY OF PRIMARY BEAMLETS

 #5
20250132119
2025-04-24

MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, MULTI-ELECTRON BEAM IMAGE ACQUISITION METHOD, ELECTRON BEAM IMAGE ACQUISITION APPARATUS, AND ELECTRON BEAM IMAGE ACQUISITION METHOD

 #6
20250112023
2025-04-03

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #7
20250112019
2025-04-03

MULTIPOLE ELEMENTS AND CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME

 #8
20250112018
2025-04-03

ABERRATION CORRECTION SYSTEMS AND CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME

 #9
20240371600
2024-11-07

METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM IMAGING DEVICE

 #10
20240355576
2024-10-24

ABERRATION CORRECTOR, A CHARGED PARTICLE BEAM APPARATUS, A METHOD OF ALIGNING AN ABERRATION CORRECTOR AND A METHOD OF CORRECTING ABERRATION OF A CHARGED PARTICLE BEAM

 #11
20240304415
2024-09-12

Method for Determining Focal Properties in a Target Beam Field of a Multi-Beam Charged-Particle Processing Apparatus

 #12
20240274396
2024-08-15

METHOD OF FORMING A MULTIPOLE DEVICE, METHOD OF INFLUENCING AN ELECTRON BEAM, AND MULTIPOLE DEVICE

 #13
20240170252
2024-05-23

MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER

 #14
20240145211
2024-05-02

Method of Adjusting Charged Particle Optical System and Charged Particle Beam Apparatus

 #15
20240128044
2024-04-18

Apparatus of plural charged-particle beams

 #16
20240079200
2024-03-07

MULTI-ELECTRON BEAM IMAGE ACQUIRING APPARATUS AND MULTI-ELECTRON BEAM IMAGE ACQUIRING METHOD

 #17
20240047171
2024-02-08

Charged particle optics components and their fabrication

 #18
20240047170
2024-02-08

Simple Spherical Aberration Corrector for SEM

 #19
20240038485
2024-02-01

ELECTRON-OPTICAL DEVICE

 #20
20240029993
2024-01-25

Method, device and system for reducing off-axial aberration in electron microscopy

 #21
20230360878
2023-11-09

Adjustable Permanent Magnetic Lens Having Shunting Device

 #22
20230282441
2023-09-07

Apparatus of plural charged-particle beams

 #23
20230223231
2023-07-13

Method, device and system for reducing off-axial aberration in electron microscopy

 #24
20230215682
2023-07-06

ELECTROSTATIC MIRROR CHROMATIC ABERRATION CORRECTORS

 #25
20230170177
2023-06-01

ELECTRODE STRUCTURE FOR GUIDING A CHARGED PARTICLE BEAM

 #26
20230005704
2023-01-05

Scanning electron microscope device and electron beam inspection apparatus

 #27
20220392736
2022-12-08

Reduction of thermal magnetic field noise in TEM corrector systems

 #28
20220392734
2022-12-08

CERTAIN IMPROVEMENTS OF MULTI-BEAM GENERATING AND MULTI-BEAM DEFLECTING UNITS

 #29
20220336186
2022-10-20

Charged particle beam apparatus, multi-beamlet assembly, and method of inspecting a specimen

 #30
20220277921
2022-09-01

Method of influencing a charged particle beam, multipole device, and charged particle beam apparatus

 #31
20220230836
2022-07-21

Charged particle beam manipulation device and method for manipulating charged particle beamlets

 #32
20220208507
2022-06-30

Reduction of thermal magnetic field noise in TEM corrector systems

 #33
20220172920
2022-06-02

Beam deflection device, aberration corrector, monochromator, and charged particle beam device

 #34
20220157556
2022-05-19

Wien filter and charged particle beam imaging apparatus

 #35
20220148851
2022-05-12

Apparatus of plural charged-particle beams

 #36
20210319974
2021-10-14

Multi-charged particle beam irradiation apparatus and multi-charged particle beam inspection apparatus

 #37
20210272767
2021-09-02

Method, device and system for reducing off-axial aberration in electron microscopy

 #38
20210233736
2021-07-29

Apparatus of plural charged-particle beams

 #39
20210066022
2021-03-04

Wien filter and charged particle beam imaging apparatus

 #40
20200388464
2020-12-10

Apparatus of plural charged-particle beams

 #41
20200234914
2020-07-23

Low voltage scanning electron microscope and method for specimen observation

 #42
20200152412
2020-05-14

Apparatus of plural charged-particle beams

 #43
20200126751
2020-04-23

Charged particle beam device, field curvature corrector, and methods of operating a charged particle beam device

 #44
20200027689
2020-01-23

Aberration-corrected multibeam source, charged particle beam device and method of imaging or illuminating a specimen with an array of primary charged particle beamlets

 #45
20190304739
2019-10-03

Aberration corrector and charged particle beam device

 #46
20190259573
2019-08-22

Apparatus of plural charged-particle beams

 #47
20190228944
2019-07-25

Method of eliminating thermally induced beam drift in an electron beam separator

 #48
20190057837
2019-02-21

Apparatus of plural charged-particle beams

 #49
20170309449
2017-10-26

Apparatus of plural charged-particle beams

 #50
20170263413
2017-09-14

Multi-beam lens device, charged particle beam device, and method of operating a multi-beam lens device

 #51
20170125206
2017-05-04

Apparatus of plural charged-particle beams

 #52
20170025243
2017-01-26

Apparatus of plural charged-particle beams

 #53
20160268096
2016-09-15

Apparatus of plural charged-particle beams

 #54
20160247659
2016-08-25

Electrostatic quadrupole deflector for microcolumn

 #55
20160056011
2016-02-25

Aberration correction apparatus, device having the same, and method for correcting aberration of charged particles

 #56
20150371811
2015-12-24

Monochromator and charged particle apparatus including the same

 #57
20150228452
2015-08-13

SECONDARY ELECTRON OPTICS AND DETECTION DEVICE

 #58
20150144785
2015-05-28

Asymmetric electrostatic quadrupole deflector for improved field uniformity

 #59
20140239190
2014-08-28

Micro-column with double aligner

 #60
20130015348
2013-01-17

Curved heated ion transfer optics

 #61
20110297841
2011-12-08

Generalized Focusing And Deflection Utilizing Deformed Conducting Electrodes

 #62
20110268252
2011-11-03

X-ray apparatus, method of using the same and X-ray irradiation method

 #63
20110147605
2011-06-23

Electrostatic corrector

 #64
20100084567
2010-04-08

Chromatic aberration corrector for charged-particle beam system and correction method therefor

 #65
20090289196
2009-11-26

Deflection signal compensation for charged particle beam

 #66
20090121150
2009-05-14

Electrostatic deflection control circuit and method of electronic beam measuring apparatus

 #67
20070075258
2007-04-05

Electrostatic deflector

 #68
20070063146
2007-03-22

Electrostatic deflection control circuit and method of electronic beam measuring apparatus

 #69
20060255284
2006-11-16

Deflection signal compensation for charged particle beam

 #70
20050139773
2005-06-30

Scanning electron microscope

 #71
14947609
2017-04-11

Electrostatic multipole device, electrostatic multipole arrangement, charged particle beam device, and method of manufacturing an electrostatic multipole device

 #72
14947568
2017-04-11

Electrostatic multipole device, electrostatic multipole arrangement, charged particle beam device, and method of operating an electrostatic multipole device