206430 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Correcting image defects, e.g. stigmators Image distortions due to scanning
MONITORING OF IMAGING PARAMETERS OF SCANNING ELECTRON MICROSCOPY
#2CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRITING APPARATUS
#3MULTI-BEAM IMAGE ACQUISITION APPARATUS AND DRIFT CORRECTION METHOD FOR MULTIPLE SECONDARY ELECTRON BEAMS
#4CHARGED PARTICLE BEAM DISTORTION CORRECTION METHOD
#5CHARGED PARTICLE BEAM DISTORTION CORRECTION METHOD
#6APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
#7MULTIPLE CHARGED PARTICLE BEAM WRITING METHOD AND MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS
#8BEAM POSITION DISPLACEMENT CORRECTION IN CHARGED PARTICLE INSPECTION
#9MULTI-BEAM CHARGED PARTICLE BEAM SYSTEM WITH ANISOTROPIC FILTERING FOR IMPROVED IMAGE CONTRAST
#10Apparatus of plural charged-particle beams
#11DISTORTION OPTIMIZED MULTI-BEAM SCANNING SYSTEM
#12Method and system of image-forming multi-electron beams
#13Apparatus of plural charged-particle beams
#14Charged Particle Beam Device and Scan Waveform Generation Method
#15Sample display method
#16MULTI-BEAM DIGITAL SCAN AND IMAGE ACQUISITION
#17Charged particle beam device and inspection method
#18Inspection tool and method of determining a distortion of an inspection tool
#19System and method for learning-guided electron microscopy
#20Apparatus of plural charged-particle beams
#21Electron beam observation device, electron beam observation system, and control method of electron beam observation device
#22Inspection tool and method of determining a distortion of an inspection tool
#23System and method for learning-guided electron microscopy
#24Apparatus of plural charged-particle beams
#25Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus and multiple electron beam irradiation method
#26Charged particle beam system and method
#27Multiple charged particle beam writing apparatus, and multiple charged particle beam writing method
#28Charged particle beam device
#29Charged Particle Beam Device
#30Method and system for edge-of-wafer inspection and review
#31Distortion measurement method for electron microscope image, electron microscope, distortion measurement specimen, and method of manufacturing distortion measurement specimen
#32Aberration correction method, aberration correction system, and charged particle beam apparatus
#33Method for inspecting a specimen and charged particle multi-beam device
#34Field curvature correction for multi-beam inspection systems
#35Method and system for edge-of-wafer inspection and review
#36Apparatus of plural charged-particle beams
#37Method and system for aberration correction in an electron beam system
#38Charged-particle beam device
#39Charged particle beam apparatus
#40Processing apparatus and method using a scanning electron microscope
#41Scanning electron microscope and a method for imaging a specimen using the same
#42Method and apparatus for scanning a surface of an object using a particle beam
#43Charged particle beam device
#44COMBINE APPARATUS OF SCANNING ELECTRON MICROSCOPE AND ENERGY DISPERSIVE X-RAY SPECTROSCOPY
#45Scanning electron microscope
#46Charged particle instrument
#47Multiple-pole electrostatic deflector for improving throughput of focused electron beam instruments
#48Scanning electron microscope and a method for imaging a specimen using the same
#49Pattern measurement apparatus
#50Charged particle beam device and method for correcting position with respect to charged particle beam
#51Method for producing a representation of an object by means of a particle beam, as well as a particle beam device for carrying out the method
#52MULTIPOLE LENS FOR ELECTRON COLUMN
#53Image forming method and charged particle beam apparatus
#54Charged particle beam device
#55Methods for sample preparation and observation, charged particle apparatus
#56Charged particle beam writing apparatus and method thereof
#57Electric charged particle beam microscopy and electric charged particle beam microscope
#58Apparatus for generating a plurality of beamlets
#59CHARGED PARTICLE BEAM APPARATUS
#60Charged particle beam scanning method and charged particle beam apparatus
#61Scanning electron microscope and a method for imaging a specimen using the same
#62Image forming method and charged particle beam apparatus
#63Apparatus for generating a plurality of beamlets
#64Apparatus for generating a plurality of beamlets
#65Image forming method and charged particle beam apparatus
#66Methods for sample preparation and observation, charged particle apparatus
#67Apparatus for generating a plurality of beamlets
#68Calibration method for electron-beam system and electron-beam system
#69Irradiation system ion beam and method to enhance accuracy of irradiation
#70Irradiation system with ion beam
#71Method to increase low-energy beam current in irradiation system with ion beam
#72Apparatus and method for E-beam dark field imaging
#73Charged particle beam adjustment method and apparatus
#74Electron beam apparatus
#75Charged particle beam apparatus, charged particle beam control method, substrate inspection method and method of manufacturing semiconductor device
#76Charged-particle beam lithographic system
#77Charged particle deflecting system