Device for spot size measurement at wafer level using a knife edge and a method for manufacturing such a device

Electron beam-induced etching

Apparatus and method for producing specimens for electron microscopy

Charged particle beam irradiation apparatus

Drawing apparatus, and method of manufacturing article

Rotary flex union

Wafer platen thermosyphon cooling system

Plasma processing apparatus and method

Etching apparatus and method

In-vacuum high speed pre-chill and post-heat stations

Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support

Electron microscope sample holder and sample observation method

Inert atmospheric pressure pre-chill and post-heat

Method and apparatus for clamping and cooling a substrate for ion implantation

Ion milling device and ion milling processing method

Non-contact substrate processing

Holder assembly for cooperating with an environmental cell and an electron microscope

Charged particle beam device

Methods and apparatus for rapidly responsive heat control in plasma processing devices

SCANNING ELECTRON MICROSCOPE

CAPACITIVE CVD REACTOR AND METHODS FOR PLASMA CVD PROCESS

Method of studying a sample in an ETEM

Devices and methods for cryo lift-out with in situ probe

Cryogenic specimen holder

Transmission electron microscope micro-grid

APPARATUS FOR THERMAL AND PLASMA ENHANCED VAPOR DEPOSITION AND METHOD OF OPERATING

Methods of using temperature control devices in electron microscopy

Support assembly

Method for removing oxides

HEAT LIP SEAL FOR CRYOGENIC PROCESSING

Microfluidic blotless cryo TEM device and method

PLASMA DOPING METHOD AND APPARATUS

Apparatus for cooling samples during ion beam preparation

Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow

Method of measuring the temperature of a sample carrier in a charged particle-optical apparatus

Charged particle beam device

Sample holder, method for use of the sample holder, and charged particle device

Environmental cell for charged particle beam system

Power loading substrates to reduce particle contamination

Apparatus and method of temperature control during cleaving processes of thick materials

PROCESS CHAMBER FOR DIELECTRIC GAPFILL

Apparatus and methods for vacuum-compatible substrate thermal management

MOUNTING TABLE STRUCTURE AND PROCESSING APPARATUS

Cryogenic specimen holder

Semiconductor fabrication apparatus and temperature adjustment method

Plasma etching apparatus and plasma etching method

HEATING AND COOLING OF SUBSTRATE SUPPORT

METHOD FOR FORMING SILICON OXIDE FILM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Substrate processing apparatus

Thermal Control of a Proximity Mask and Wafer During Ion Implantation

Exposure apparatus and article manufacturing method

Effective algorithm for warming a twist axis for cold ion implantations

ACTIVE DEW POINT SENSING AND LOAD LOCK VENTING TO PREVENT CONDENSATION ON WORKPIECES

Heated rotary seal and bearing for chilled ion implantation system

Post Implant Wafer Heating Using Light

Plasma processing apparatus and method

Substrate support having dynamic temperature control

Specimen holder and specimen holder movement device

Method and system for automating sample preparation for microfluidic cryo TEM

Substrate cleaning chamber and components

Method for low temperature ion implantation

METHOD FOR REMOVING OXIDES

TEMPERATURE CONTROL SYSTEM, TEMPERATURE CONTROL METHOD, PLASMA PROCESSING APPARATUS AND COMPUTER STORAGE MEDIUM

Device and method for producing dielectric layers in microwave plasma

Plasma processing apparatus and plasma processing method

TABLE FOR PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APPARATUS

ARRANGEMENT FOR COATING TAPE-SHAPED FILM SUBSTRATES

Gas charge container, atom probe apparatus, and method for analyzing hydrogen position in material

Hot edge ring with sloped upper surface

Microscopy support structures

LOWER CHAMBER HEATERS FOR IMPROVED ETCH PROCESSES

Ion implantation apparatus

Optical heater for cryogenic ion implanter surface regeneration

Ion implantation apparatus

Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal control

Method of processing a workpiece in a plasma reactor using feed forward thermal control

DIAMOND-LIKE CARBON FILM FORMING APPARATUS AND METHOD OF FORMING DIAMOND-LIKE CARBON FILM

COLD IMPLANT FOR OPTIMIZED SILICIDE FORMATION

Vacuum processing chambers incorporating a moveable flow equalizer

WORKPIECE HANDLING SYSTEM

Ion implantation apparatus and a method

Ion implantation apparatus and a method for fluid cooling

Ion implantation apparatus

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Plasma processing apparatus and maintenance method therefor

Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes

Substrate processing apparatus and manufacturing method of semiconductor device using plasma generation

SPUTTER-COATING APPARATUS HAVING HEATING UNIT

Plasma reactor with a multiple zone thermal control feed forward control apparatus

Shorten Temperature Recovery Time of Low Temperature Ion Implantation

Rapid thermal processing systems and methods for treating microelectronic substrates

Charged particle beam apparatus

BIASABLE COOLING PEDESTAL

PLASMA PROCESSING APPARATUS

DEPOSITION APPARATUS WITH HIGH TEMPERATURE ROTATABLE TARGET AND METHOD OF OPERATING THEREOF

Charged particle beam processing

ETCHING METHOD AND ETCHING APPARATUS

Plasma processing apparatus and temperature measuring method and apparatus used therein

Non-contact substrate processing

APPARATUS FOR SUB-ZERO DEGREE C ION IMPLANTATION

Transmission electron microscope micro-grid

Vapor compression refrigeration chuck for ion implanters

SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATMENT METHOD AND STORAGE MEDIUM

Substrate Processing Apparatus and Substrate Mount Table Used in the Apparatus

CONDENSIBLE GAS COOLING SYSTEM

Substrate processing method and substrate processing apparatus

ICE LAYERS IN CHARGED PARTICLE SYSTEMS AND METHODS

Capacitive CVD reactor and methods for plasma CVD process

PLASMA PROCESSING APPARATUS

SUBSTRATE MOUNTING TABLE AND SUBSTRATE PROCESSING APPARATUS HAVING SAME

THIN FILM SEMICONDUCTOR ALLOY MATERIAL PREPARED BY A VHF ENERGIZED PLASMA DEPOSITION PROCESS

Substrate temperature control by using liquid controlled multizone substrate support

VHF ENERGIZED PLASMA DEPOSITION PROCESS FOR THE PREPARATION OF THIN FILM MATERIALS

Charged-particle optical system with dual loading options

Plasma doping method and apparatus

Methods and apparatus for rapidly responsive heat control in plasma processing devices

Method for manufacturing semiconductor device

Low temperature device with low-vibration sample holding device

Fluid delivery mechanism for vacuum wafer processing system

Adjustable thermal contact between an electrostatic chuck and a hot edge ring by clocking a coupling ring

Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing system

Vacuum treatment method

SPUTTER-COATING APPARATUS

MOUNTING TABLE STRUCTURE AND PROCESSING APPARATUS USING THE SAME

Plasma processing apparatus

WORKPIECE SUPPORT FOR A PLASMA REACTOR WITH CONTROLLED APPORTIONMENT OF RF POWER TO A PROCESS KIT RING

METHOD AND DEVICE FOR ETCHING A SUBSTRATE BY MEANS OF PLASMA

METAL FILM PRODUCTION APPARATUS

Integrated Circuit Cooling Apparatus for Focused Beam Processes

Plasma Processing Apparatus and Plasma Processing Method

Platen ground pin for connecting substrate to ground

Substrate temperature regulation fixed apparatus

Techniques for changing temperature of a platen

Plasma processing apparatus and plasma processing method

Semiconductor producing device and semiconductor device producing method

Semiconductor device and method of manufacturing the semiconductor device

Apparatus and method for partial ion implantation using atom vibration

METHOD FOR MANUFACTURING CARBON FILM

Cryo-charging specimen holder for electron microscope

SYSTEMS AND METHODS FOR DEPOSITION

SUBSTRATE MOUNTING TABLE, SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE CONTROL METHOD

Plasma Doping Method and Apparatus

Cooled cleaving implant

Specimen stage-moving device for charged-particle beam system

Apparatus for detecting defect by examining electric characteristics of a semiconductor device

Specimen stage

Manufacturing method in plasma processing apparatus

Method for controlling spatial temperature distribution across a semiconductor wafer

TECHNIQUES FOR COLD IMPLANTATION OF CARBON-CONTAINING SPECIES

Systems and Methods of Identifying Biomarkers for Subsequent Screening and Monitoring of Diseases

Systems and Methods of Identifying Biomarkers for Subsequent Screening and Monitoring of Diseases

Deposition apparatus and deposition method

TECHNIQUES FOR LOW-TEMPERATURE ION IMPLANTATION

Method and apparatus for producing photocatalyst

APPARATUS FOR PLASMA TREATMENT

METHOD FOR REMOVING OXIDES

Table for plasma processing apparatus and plasma processing apparatus

SUPPORT ASSEMBLY

Showerhead assembly

SINGLE WAFER IMPLANTER FOR SILICON-ON-INSULATOR WAFER FABRICATION

Plasma Processing Apparatus And Method Capable of Adjusting Temperature Within Sample Table

Apparatus and Methods for Growing Nanofibres and Nanotips

PLASMA TREATMENT APPARATUS, AND SUBSTRATE HEATING MECHANISM TO BE USED IN THE APPARATUS

Plasma Processing Apparatus And Method Capable Of Adjusting Temperature Within Sample Table

TECHNIQUES FOR TERMINAL INSULATION IN AN ION IMPLANTER

Insulated conducting device with multiple insulation segments

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD THEREOF

HIGH TEMPERATURE CATHODE FOR PLASMA ETCHING

Method of manufacturing semiconductor device

Vacuum prcessing apparatus and vacuum processing method of sample

Method for attaching a sample to a manipulator by melting and then freezing part of said sample

Charged particle beam apparatus and specimen holder

Plasma processing apparatus

Substrate cleaning chamber and components

SOLID SAMPLE, SOLID SAMPLE FABRICATING METHOD, AND SOLID SAMPLE FABRICATING APPARATUS

Heating stage for a micro-sample

Plasma processing apparatus

Electron microscope

Plasma processing method and plasma processing apparatus

Temperature Controlling Method for Substrate Processing System and Substrate Processing System

Method for front end of line fabrication

Power supply apparatus and deposition method using the power supply apparatus

SUBSTRATE PROCESSING APPARATUS

Thermally conductive sheet and substrate mounting device including same

METHOD AND APPARATUS FOR PLASMA PROCESSING

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS

Ashing method and apparatus therefor

Semiconductor producing device and semiconductor device producing method

Plasma processing apparatus

Plasma processing apparatus with filter circuit

APPARATUS FOR PLASMA CHEMICAL VAPOR DEPOSITION AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE BY USING THE SAME

APPARATUS AND METHOD OF TEMPERATURE CONROL DURING CLEAVING PROCESSES OF THICK FILM MATERIALS

Multi-zone gas distribution system for a treatment system

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Plasma Processing Apparatus And Method Of Producing Semiconductor Thin Film Using The Same

Temperature control method for photolithographic substrate

Probe-holding apparatus, sample-obtaining apparatus, sample-processing apparatus, sample-processing method and sample-evaluating method

Techniques for low-temperature ion implantation

TECHNIQUES FOR LOW-TEMPERATURE ION IMPLANTATION

PLASMA PROCESSING APPARATUS

Processing apparatus and processing method

Techniques for forming shallow junctions

PLASMA PROCESSING METHOD AND APPARATUS, AND STORAGE MEDIUM

Low Temperature Cryostat

Charged particle beam system and its specimen holder

Technique for Improved Damage Control in a Plasma Doping (PLAD) Ion Implantation

Wafer holder and semiconductor manufacturing apparatus equipped with wafer holder

Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing system

Techniques for temperature controlled ion implantation

Deposition reduction system for an ion implanter

Plasma processing method and apparatus

Processing apparatus and processing method

Substrate supporting mechanism and substrate processing apparatus

PLASMA PROCESSING APPARATUS

Techniques for temperature-controlled ion implantation

Techniques for temperature-controlled ion implantation

SUBSTRATE TREATMENT APPARATUS AND CLEANING METHOD

HEATING AND COOLING OF SUBSTRATE SUPPORT

Chuck assembly and method for controlling a temperature of a chuck

METHOD OF REDUCING TRANSIENT WAFER TEMPERATURE DURING IMPLANTATION

Plasma processing apparatus capable of adjusting temperature of sample stand

Plasma processing apparatus

Plasma processing apparatus and plasma processing method

Plasma processing apparatus

Electro-Static Chucking Mechanism and Surface Processing Apparatus

Plasma reactor with inductively coupled source power applicator and a high temperature heated workpiece support

Heat-transfer structure and substrate processing apparatus

Power loading substrates to reduce particle contamination

Plasma etching method, plasma processing apparatus, control program and computer readable storage medium

PROCESS CHAMBER FOR DIELECTRIC GAPFILL

Sample table and plasma processing apparatus provided with the same

Particle-optical apparatus with temperature switch

Method for depositing a barrier layer on a low dielectric constant material

Wafer processing apparatus capable of controlling wafer temperature

Plasma etching chamber and method for manufacturing photomask using the same

Low temperature CVD process with selected stress of the CVD layer on CMOS devices

Sample holding electrode and a plasma processing apparatus using the same

ANISOTROPIC ETCHING METHOD

Apparatus and method for plasma processing

Method of etching treatment

Electrode for generating plasma and plasma processing apparatus using same

Vacuum processing apparatus and vacuum processing method of sample

Equipment innovations for nano-technology aquipment, especially for plasma growth chambers of carbon nanotube and nanowire

Method of forming organosilicon oxide film and multilayer resist structure

Method for etching photolithographic substrates

Charged particle beam apparatus

Apparatus for thermal and plasma enhanced vapor deposition and method of operating

Method of processing a workpiece in a plasma reactor using feed forward thermal control

Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal control

Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes

Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loops

Method for agile workpiece temperature control in a plasma reactor using a thermal model

TEMPERATURE CONTROLLED SEMICONDUCTOR PROCESSING CHAMBER LINER

Plasma reactor with a multiple zone thermal control feed forward control apparatus

Processing apparatus

Plasma CVD apparatus and plasma surface treatment method

Vacuum processing system

Plasma rapid thermal process apparatus in which supply part of radical source is improved

Methods and systems for increasing substrate temperature in plasma reactors

Plasma processing apparatus

Substrate processing apparatus

VACUUM REACTION CHAMBER WITH X-LAMP HEATER

Plasma processing apparatus and method capable of adjusting temperature within sample table

Substrate processing device

Vacuum reaction chamber with x-lamp heater

Gas introduction system for temperature adjustment of object to be processed

Sample inspection apparatus

Vacuum processing apparatus and vacuum processing method of sample

Temperature control of pallet in sputtering system

Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method, and cross section working apparatus

Apparatus and method for processing wafer

Positioning board for positioning heater lines during plasma enhanced CVD (PECVD)

Ion implantation cooling system

Semiconductor producing device and semiconductor producing method

Appartus and method for forming pattern

Cooling device for vacuum treatment device

Scanning electron microscope

Lateral temperature equalizing system for large area surfaces during processing

Probe-holding apparatus, sample-obtaining apparatus, sample-processing apparatus, sample-processing method and sample-evaluating method

Metal film production apparatus

Apparatus for plasma chemical vapor deposition and method for fabricating semiconductor device by using the same

Capacitive coupling plasma processing apparatus

Heat transfer system for improved semiconductor processing uniformity

Systems and methods of identifying biomarkers for subsequent screening and monitoring of diseases

Plasma processing apparatus and method

APPARATUS AND METHOD FOR MANIPULATING SAMPLE TEMPERATURE FOR FOCUSED ION BEAM PROCESSING

Plasma processing method and apparatus, and storage medium

Apparatus and method for evaluating cross section of specimen

In-situ chamber clean process to remove by-product deposits from chemical vapor etch chamber

Wafer processing apparatus capable of controlling wafer temperature

Apparatus and method for forming pattern

High Vacuum Plasma-Assisted Chemical Vapor Deposition System

Substrate supporting structure for semiconductor processing, and plasma processing device

Plasma processing method

System and method for electron-beam lithography

Charged particle beam apparatus and specimen holder

In-situ dry clean chamber for front end of line fabrication

Substrate support for in-situ dry clean chamber for front end of line fabrication

Lid assembly for front end of line fabrication