Sample Processing Apparatus and Sample Processing Method

DARK CORRECTION FOR LONG TERM ACQUISITION

POSITIONER FOR ANALYTIC INSTRUMENTS WITHIN VACUUM CHAMBER

CONTROLLING INCIDENCE ANGLE OF ION BEAM BY SAMPLE BIASING

Ion Milling Device and Processing Method Using Same

Observation Instrument and Control Method for Sample Stage

MULTI-BEAM CHARGED PARTICLE MICROSCOPE DESIGN WITH ADAPTIVE DETECTION SYSTEM

METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING

ION IMPLANTER AND ION IMPLANTATION METHOD

CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CONTROLLING CHARGED PARTICLE BEAM DEVICE

METHOD FOR DEPOSITING TARGET MATERIAL IN DEPOSITION CHAMBER WITH TILTABLE WORKPIECE HOLDER

ION IMPLANTATION SYSTEM AND METHOD OF OPERATION

Shield for an Ion Implanter

Ion Milling Device, and Inspection System

Ion Milling Device

Charged Particle Beam Device

SAMPLE CARRIER AND USES THEREOF

CONOSCOPIC WAFER ORIENTATION FOR ION IMPLANTATION

CONOSCOPIC WAFER ORIENTATION APPARATUS AND ION IMPLANTER INCLUDING SAME

IN-SITU MECHANICAL MICRO-ELECTRO-MECHANICAL DEVICE AND SYSTEM, AS WELL AS DOUBLE-TILT SAMPLE HOLDER

CONCURRENT OR CYCLICAL ETCH AND DIRECTIONAL DEPOSITION

SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATION IN CHARGED PARTICLE BEAM SYSTEM

SURFACE PROCESSING EQUIPMENT

Sample Milling System and Apparatus and Method for Image Generation

CHARGED PARTICLE BEAM DEVICE

PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD

Sample Holder and Sample Processing Apparatus

CHARGED PARTICLE BEAM DEVICE, AND SAMPLE OBSERVATION METHOD EMPLOYING SAME

TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS

SYSTEM AND METHODS FOR DEPOSITING MATERIAL ON A SUBSTRATE

MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER

METHOD OF SAMPLE PREPARATON AND ANALYSIS

TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS

BACKSIDE DEPOSITION FOR WAFER BOW MANAGEMENT

Electron Microscope and Specimen Orientation Alignment Method

METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING

PROCESS CHAMBER AND SEMICONDUCTOR PROCESS DEVICE

Tilting Element Of Manipulation Stage

Measurement and correction of optical aberrations in charged particle beam microscopy

Sample Cartridge Holding Apparatus

METHOD OF GENERATING A CRYSTALLINE ORIENTATION MAP OF A SURFACE PORTION OF A SAMPLE AND COMPUTER PROGRAM PRODUCT

Charged Particle Gun, Charged Particle Beam System, and Lock Nut

Charged particle beam system and control method therefor

APPARATUS AND METHOD FOR AUTOMATED GRID VALIDATION

Semiconductor manufacturing apparatus, semiconductor device and manufacturing method of semiconductor device

Automated Sample Alignment For Microscopy

Charged Particle Beam Apparatus and Cleaning Method

Specimen machining device and information provision method

Specimen Machining Device and Specimen Machining Method

WAFER HOLDER FOR FILM DEPOSITION CHAMBER

Self-differential confocal tilt sensor for measuring level variation in charged particle beam system

Beam trajectory via combination of image shift and hardware alpha tilt

Ion milling device and milling processing method using same

CONTROLLING ETCH ANGLES BY SUBSTRATE ROTATION IN ANGLED ETCH TOOLS

DIFFRACTOMETER FOR CHARGED-PARTICLE CRYSTALLOGRAPHY

APPARATUS AND METHOD FOR DETECTING ONE OR MORE SCANNING CHARGED PARTICLE BEAMS

Sample holder and charged particle beam system

Charged particle beam apparatus

Surface processing equipment and surface processing method

Scanning ion beam deposition and etch

Ion implanter and particle detection method

Scanning ion beam etch

System and technique for profile modulation using high tilt angles

Charged particle beam device and control method thereof

Charged particle beam apparatus and setting assisting method

Device with at least one adjustable sample holder and method of changing holder tilt angle and method of preparing a lamella

Generating three dimensional information regarding structural elements of a specimen

Sample holder for electron microscopy

Charged-particle source

Controlling etch angles by substrate rotation in angled etch tools

In situ angle measurement using channeling

Method for changing the spatial orientation of a micro-sample in a microscope system, and computer program product

Multiple charged-particle beam apparatus with low crosstalk

Method for improving transmission Kikuchi diffraction pattern

Apparatus and method for nanoscale X-ray imaging

Composite charged particle beam apparatus

Movable wafer holder for film deposition chamber having six degrees of freedom

METHOD FOR LARGE-AREA 3D ANALYSIS OF SAMPLES USING GLANCING INCIDENCE FIB MILLING

Cryotransfer holder and workstation

Multi-source ion beam etch system

Sample chip worktable and retainer

Focused ion beam apparatus

Focused ion beam apparatus

Plasma processing apparatus

Electron microscope

A Device for Extracting and Placing a Lamella

CHARGED PARTICLE BEAM APPARATUS

Charged particle beam apparatus and cleaning method

Stage apparatus and charged particle beam apparatus

Method of imaging a sample using an electron microscope

Ion beam etching system

Cryotransfer system

Moveable detector

Tilting parameters calculating device, sample stage, charged particle beam device, and program

3D defect characterization of crystalline samples in a scanning type electron microscope

Scanning ion beam etch

Specimen holder

Charged particle beam device

Composite charged particle beam apparatus

Ion implantation apparatus and ion implantation method

Method for sample orientation for TEM lamella preparation

Ion beam irradiation device and ion beam irradiation method

Cryotransfer holder and workstation

Electron microscope and specimen tilt angle adjustment method

Specimen preparation and inspection in a dual-beam charged particle microscope

Stage device and charged particle beam device

Device with ion column and scanning electron microscope

Ion implantation apparatus and ion implantation method

Ion Implantation Apparatus and Method of Manufacturing Semiconductor Devices

Scanning electron microscope and image processing apparatus

PLASMA CVD APPARATUS, PLASMA CVD METHOD, AND AGITATING DEVICE

Method of etching object to be processed

Transmission scanning microscopy including electron energy loss spectroscopy and observation method thereof

Ion milling device

Charged particle beam apparatus

Charged particle beam apparatus

Charged particle beam apparatus

Method of image acquisition and electron microscope

Apparatus with two or more particle beams for processing a specimen

Double-tilt sample holder for transmission electron microscope

Focused ion beam apparatus

High throughput TEM preparation processes and hardware for backside thinning of cross-sectional view lamella

Electron microscope and sample observation method

Systems and methods for tilting a wafer for achieving deposition uniformity

Miniature serial sectioning microtome for block-face imaging

Ion implantation apparatus and method for processing plurality of wafers using the same

Method of performing electron diffraction pattern analysis upon a sample

Low specimen drift TEM holder and cooler for use in microscopy

Sample holding device for studying light-driven reactions and sample analysis method using the same

Specimen holder for a charged particle microscope

Ion milling device

Charged particle beam device enabling facilitated EBSD detector analysis of desired position and control method thereof

Method of specimen processing in an apparatus with two or more particle beams and apparatus for this processing

Specimen holder, specimen preparation device, and positioning method

Composite charged particle beam apparatus

Etching apparatus and etching method

Method of constructing 3D image, image processor, and electron microscope

Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus

TEM sample mounting geometry

Specimen cryo holder and dewar

Angular scanning using angular energy filter

Wafer stage for symmetric wafer processing

Specimen holder tip part, specimen holder having said specimen holder tip part, gonio stage, and electron microscope having said gonio stage

Method for electron tomography

Scan head and scan arm using the same

Method for imaging a sample in a charged particle apparatus

Transmission electron microscope sample fabrication

Workpiece support structure with four degree of freedom air bearing for high vacuum systems

Sapphire property modification through ion implantation

Method for manufacturing semiconductor device

Composite charged particle beam apparatus and thin sample processing method

Charged particle beam device

Sample observation method, sample preparation method, and charged particle beam apparatus

Ion milling device and ion milling processing method

Method for preparing lamella

Electron beam apparatus for visualizing a displacement of an electric field

Cryogenic specimen holder

Particle beam device and method for use in a particle beam device

Ion Milling Device, Sample Processing Method, Processing Device, and Sample Drive Mechanism

Particle beam device and method for processing and/or analyzing a sample

Method and apparatus for angular high density plasma chemical vapor deposition

TEM-lamella, process for its manufacture, and apparatus for executing the process

Particle beam device having a sample holder

MECHANISM AND METHOD FOR ALIGNING A WORKPIECE TO A SHADOW MASK

Cryogenic specimen holder

Method of electron diffraction tomography

Methods for improving the bioactivity characteristics of a surface and objects with surfaces improved thereby

Charged particle beam device and method for correcting position with respect to charged particle beam

Method and system for 4D tomography and ultrafast scanning electron microscopy

SPECIMEN HOLDER ASSEMBLY

Composite charged particle beam apparatus and sample processing and observing method

Systems And Methods For Scanning A Beam Of Charged Particles

Apparatus and method for multi-directionally scanning a beam of charged particles

Systems and methods for scanning a beam of charged particles

Charged corpuscular ray apparatus

Method of forming asymmetric spacers and methods of fabricating semiconductor device using asymmetric spacers

Variable-tilt specimen holder and method and for monitoring milling in a charged-particle instrument

VARIABLE-TILT TEM SPECIMEN HOLDER FOR CHARGED-PARTICLE BEAM INSTRUMENTS

Plasma CVD apparatus, plasma CVD method, and agitating device

Method and system for moving wafer during scanning the wafer

Method for modifying the wettability and/or other biocompatibility characteristics of a surface of a biological material by the application of gas cluster ion beam technology and biological materials made thereby

Method for modifying the wettability and/or other biocompatibility characteristics of a surface of a biological material by the application of gas cluster ion beam technology and biological materials made thereby

Method of Smoothing Solid Surface with Gas Cluster Ion Beam and Solid Surface Smoothing Apparatus

Dual beam apparatus with tilting sample stage

Patterning device holding apparatus and application thereof

Method and apparatus for angular high density plasma chemical vapor deposition

GRID HOLDER FOR STEM ANALYSIS IN A CHARGED PARTICLE INSTRUMENT

Speciman holder and speciman holder movement device

Ion implantation method and apparatus

Ion implantation method and apparatus

Apparatus for Handling a Substrate and a Method Thereof

Motorized manipulator for positioning a TEM specimen

Electric charged particle beam microscope and microscopy

Method and apparatus for surface processing of a substrate using an energetic particle beam

Charged particle beam equipment

Ion implantation method and semiconductor device manufacturing method

Specimen holder for electron microscope

Particle beam device and method for use in a particle beam device

Method and apparatus for flattening solid surface

Movement Platform for Carrier With 5 Degrees of Freedom

Method of forming asymmetric spacers and methods of fabricating semiconductor device using asymmetric spacers

Method and apparatus for in-situ sample preparation

Mechanical scanner

Method and device for ion beam processing of surfaces

Sample preparation system

Technique for improving ion implantation throughput and dose uniformity

Implanting with improved uniformity and angle control on tilted wafers

Ion beam processing apparatus

Ultra precise polishing method and ultra precise polishing apparatus

Stage assembly, particle-optical apparatus comprising such a stage assembly, and method of treating a sample in such an apparatus

Method, system, and apparatus for improving doping uniformity in high-tilt ion implantation

Sample holder

Ion beam irradiation apparatus

TFT array inspecting apparatus

Scanning systems and methods for providing ions from an ion beam to a workpiece

Ion beam measurement systems and methods for ion implant dose and uniformity control

Ion implanter and method of manufacturing semiconductor device

Scanning mechanism of an ion implanter

Particle beam device

Ion beam irradiation device and operating method thereof

Focused charged particle beam apparatus

Separate plasma source coil and method of controlling the same

Controlling etch angles by substrate rotation in angled etch tools

Computer generated three-dimensional models of microstructural features based on stereomicroscopy