SCANNED BEAM DOSE RATE MEASUREMENT FOR ION BEAM OPTIMIZATION

COLLATION SYSTEM

CHARGED-PARTICLE IRRADIATION UNIT FOR A CHARGED-PARTICLE DIFFRACTOMETER

Atmospheric Plasma Activation for Hybrid Bonding

BEAM TUNING FOR NON-UNIFORM ION IMPLANTATION

Stage Device and Charged Particle Beam Device Using Same

Observation Instrument and Control Method for Sample Stage

SYSTEM AND METHOD FOR PLASMA TREATMENT WITH INDEPENDENT CONTROL OF NEUTRAL PARTICLE AND ION FLUXES

SUBSTRATE STRESS MANAGEMENT USING DIRECT SELECTIVE AREA PROCESSING

CONCURRENT OR CYCLICAL ETCH AND DIRECTIONAL DEPOSITION

AUTOFOCUS METHOD FOR SINGLE BEAM AND MULTI-BEAM SYSTEMS

METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM IMAGING DEVICE

METHOD OF PROCESSING A SAMPLE, AND CHARGED PARTICLE ASSESSMENT SYSTEM

SAMPLE HOLDER FOR TRANSMISSION ELECTRON MICROSCOPE, SAMPLE ANALYSIS SYSTEM INCLUDING THE SAME, AND METHOD FOR ANALYZING SAMPLE USING THE SAME

Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions

ION IMPLANTER AND ION IMPLANTATION METHOD

METHOD OF IMAGING A SAMPLE WITH A CHARGED PARTICLE BEAM DEVICE, METHOD OF CALIBRATING A CHARGED PARTICLE BEAM DEVICE, AND CHARGED PARTICLE BEAM DEVICE

Real time photoresist outgassing control system and method

Wafer scanning apparatus and method for focused beam processing

UNIFORM PLASMA LINEAR ION SOURCE

Pattern enhancement using a gas cluster ion beam

PROCESS MODULE, SUBSTRATE PROCESSING SYSTEM, AND PROCESSING METHOD

Scanning ion beam deposition and etch

Scanning ion beam etch

Atomic layer deposition using a substrate scanning system

Method and apparatus for poling polymer thin films

Fill pattern to enhance ebeam process margin

Wafer scanning apparatus and method for focused beam processing

Pattern enhancement using a gas cluster ion beam

In situ angle measurement using channeling

Charged particle beam writing apparatus and charged particle beam writing method

Multi-beam blanking device and multi-charged-particle-beam writing apparatus

Substrate positioning device with remote temperature sensor

Charged particle beam writing apparatus, charged particle beam writing method, and a non-transitory computer-readable storage medium

Ion implanter and beam profiler

Device for depositing nanometric sized particles onto a substrate

Focused ion beam apparatus

A Device for Extracting and Placing a Lamella

PLASMA ETCHING APPARATUS

Ion implanter and ion implantation method

Multi-beam writing method and multi-beam writing apparatus

Substrate positioning device and electron beam inspection tool

Method and apparatus for poling polymer thin films

OPTICAL SYSTEM ADJUSTMENT METHOD OF IMAGE ACQUISITION APPARATUS

Electron beam inspection apparatus stage positioning

Charged particle beam device, interchangeable multi-aperture arrangement for a charged particle beam device, and method for operating a charged particle beam device

Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions

Portion of layer removal at substrate edge

Multi-electron-beam imaging apparatus with improved performance

Methods for controlling an end-to-end distance in semiconductor device

Semiconductor apparatus and charged particle ray exposure apparatus

Compensated location specific processing apparatus and method

Film-forming apparatus, film-forming system, and film-forming method

Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatus

Sample carrier and electron microscope

Sputtering device

Charged particle beam image acquisition apparatus

Method and apparatus for the planarization of surfaces

Charged particle beam device

Scanning ion beam etch

Sample stage

Methods for controlling an end-to-end distance in semiconductor device

Multiple charged particle beam writing apparatus, and multiple charged particle beam writing method

Methods for controlling an end-to-end distance in semiconductor device

Fill pattern to enhance e-beam process margin

Cross section processing observation method and charged particle beam apparatus

Multi-charged-particle beam writing apparatus

Optical system adjustment method of image acquisition apparatus

Techniques and structure for forming thin silicon-on-insulator materials

Imaging system and imaging method

Electron beam irradiation apparatus and electron beam dynamic focus adjustment method

Electron beam inspection apparatus and electron beam inspection method

Compensated location specific processing apparatus and method

Charged particle beam device and control method of charged particle beam device

Sample Stage

Scanning an object using multiple mechanical stages

Gas injection system for ion beam device

Inspection of regions of interest using an electron beam system

Device, manufacturing method, and exposure apparatus

Imaging apparatus having a plurality of movable beam columns, and method of inspecting a plurality of regions of a substrate intended to be substantially identical

Wafer stage for symmetric wafer processing

Driving apparatus, lithography apparatus, and method of manufacturing an article

Methods for Discretized Processing and Process Sequence Integration of Regions of a Substrate

Ion beam dimension control for ion implantation process and apparatus, and advanced process control

Ion sources, systems and methods

Inspection of regions of interest using an electron beam system

LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE

Method for electron tomography

Inspection system and inspection image data generation method

Scan head and scan arm using the same

Low contamination scanner for GCIB system

Inspection system by charged particle beam and method of manufacturing devices using the system

Ion sources, systems and methods

Multi-platen ion implanter and method for implanting multiple substrates simultaneously

Workpiece support structure with four degree of freedom air bearing for high vacuum systems

Ion beam dimension control for ion implantation process and apparatus, and advanced process control

Ion implantation method and ion implantation apparatus

Ion implanter and ion implant method thereof

Methods for discretized processing and process sequence integration of regions of a substrate

Ion implantation apparatus and ion implantation method

Linear motor, movable stage and electron microscope

Scanner for GCIB system

Stage device

Ion sources, systems and methods

Methods for discretized processing and process sequence integration of regions of a substrate

Methods for discretized processing and process sequence integration of regions of a substrate

Method and apparatus for charged particle beam inspection

Methods for discretized processing and process sequence integration of regions of a substrate

Inspection system by charged particle beam and method of manufacturing devices using the system

Methods for discretized processing and process sequence integration of regions of a substrate

Masked ion implant with fast-slow scan

Scan device for microscope measurement instrument

Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for implementing the method

ION DOPING APPARATUS AND DOPING METHOD THEREOF

Scanning method and system using 2-D ion implanter

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

ION IMPLANTER AND ION IMPLANT METHOD THEREOF

Masked ion implant with fast-slow scan

Method and apparatus for uniformly implanting a wafer with an ion beam

Use of beam scanning to improve uniformity and productivity of a 2D mechanical scan implantation system

Method and system for moving wafer during scanning the wafer

ION IMPLANTING DEVICE AND METHOD

Ion implanter having combined hybrid and double mechanical scan architecture

Sample stage apparatus and method of controlling the same

Method and apparatus for charged particle beam inspection

Specimen stage

FOCUSSING MASK

Ion implantation method and apparatus

Ion implantation method and apparatus

Ion sources, systems and methods

Installation and method of nanofabrication

Implant beam utilization in an ion implanter

Method and system for multi-pass correction of substrate defects

Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope

Compound sliding seal unit suitable for atmosphere to vacuum applications

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

Ion implanter having combined hybrid and double mechanical scan architecture

APPARATUS AND METHODS FOR TREATING A WORKPIECE USING A GAS CLUSTER ION BEAM

Inspection system by charged particle beam and method of manufacturing devices using the system

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

Sheet beam-type testing apparatus

Electron beam apparatus and device production method using the electron beam apparatus

Ion beam monitoring arrangement

Mechanical scanner

Multi-directional mechanical scanning in an ion implanter

Substrate scanner apparatus

Methods for discretized processing and process sequence integration of regions of a substrate

Methods for discretized processing and process sequence integration of regions of a substrate

Method for inspecting substrate, substrate inspecting system and electron

Method and device for ion beam processing of surfaces

Technique for improving ion implantation throughput and dose uniformity

Semiconductor wafer defect inspection method and apparatus

Dose uniformity correction technique

Inspection system by charged particle beam and method of manufacturing devices using the system

Electron beam irradiating method, magnetic recording medium manufactured by using the method and method for manufacturing the medium

Beam processing system and beam processing method

Electron beam apparatus and device production method using the electron beam apparatus

Method and apparatus for scanning a workpiece through an ion beam

Method of implanting a substrate and an ion implanter for performing the method

Method for writing a large-area closed curvilinear pattern with a cartesian electron beam writing system

Inspection system by charged particle beam and method of manufacturing devices using the system

Method and apparatus for patterning micro and nano structures using a mask-less process

Technique for isocentric ion beam scanning

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for implementing the method

Ion sources, systems and methods

Ion sources, systems and methods

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion implanter and ion implantation control method thereof

Method of implanting a substrate and an ion implanter for performing the method

Methods for discretized processing and process sequence integration of regions of a substrate

Inspection system by charged particle beam and method of manufacturing devices using the system

Method for inspecting substrate, substrate inspecting system and electron beam apparatus

Nonuniform ion implantation apparatus and method using a wide beam

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

Method and apparatus for scanning a workpiece in a vacuum chamber of an ion beam implanter

Optimization of a utilization of an ion beam in a two-dimensional mechanical scan ion implantation system

Semiconductor device tester

Method of implanting a substrate and an ion implanter for performing the method

Sheet beam-type testing apparatus

Optimization of beam utilization

Patterned wafer inspection method and apparatus therefor

Scanning mechanism of an ion implanter

Method of implanting a substrate and an ion implanter for performing the method

Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights

Ion implanting apparatus

Mechanical oscillator for wafer scan with spot beam

Method for reciprocating a workpiece through an ion beam

Reciprocating drive for scanning a workpiece

Reciprocating drive for scanning a workpiece through an ion beam

Ion implantation method and apparatus

Wafer 2D scan mechanism

Ion implantation

Radial scan arm and collimator for serial processing of semiconductor wafers with ribbon beams

Multi directional mechanical scanning in an ion implanter

Pattern drawing method, method of manufacturing a master disk for manufacturing information recording media, and method of manufacturing an information recording medium

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

Sheet beam-type inspection apparatus