H01J2237/2025 - CPC Classification Index

ClassID:

206459 ⎘

H01J2237/2025 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated; Movement Sensing velocity of translation or rotation

Recent Application in this class:

20180151328

2018-05-31

Charged particle beam device and control method of charged particle beam device

20160314934

2016-10-27

Exposure apparatus and exposure method

20130068734

2013-03-21

Roller mold manufacturing device and manufacturing method

20100140473

2010-06-10

NANOROBOT MODULE, AUTOMATION AND EXCHANGE

20080315112

2008-12-25

Charged particle beam deflection method with separate stage tracking and stage positional error signals

20080277598

2008-11-13

Electron beam exposure apparatus involving the position and velocity calculation

20070152169

2007-07-05

Move mechanism for moving target object and charged particle beam writing apparatus

20060076492

2006-04-13

Transmission electron microscope and image observation method using it

20050285053

2005-12-29

Method and apparatus for electron beam processing of substrates

#10

20050211681

2005-09-29

Charged-particle beam system