206460 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated; Movement Magnetic coupling
Stage Device and Charged Particle Beam Device Equipped with the Same
#2MAGNETIC ROTATION DEVICE FOR HIGH VACUUM APPLICATIONS SUCH AS ION AND ISOTOPE PRODUCTION
#3Sample Holder and Sample Processing Apparatus
#4STAGE DEVICE, CHARGED PARTICLE BEAM APPARATUS, AND VACUUM APPARATUS
#5Ion milling device
#6Magnetic bearing, a rotary stage, and a reflective electron beam lithography apparatus
#7Moving module of a wafer ion-implanting machine