H01J2237/20271 - CPC Classification Index

ClassID:

206462 ⎘

H01J2237/20271 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated; Movement Temperature responsive devices

Recent Application in this class:

20250357074

2025-11-20

Stage Device and Charged Particle Beam Device Equipped with the Same

20230187167

2023-06-15

MEMS PLATFORM FOR THIN FILM NANOMECHANICS CHARACTERIZATION

20200203117

2020-06-25

Electron beam inspection tool and method of controlling heat load

20190310209

2019-10-10

Specimen holder

20160365219

2016-12-15

Stage device and charged particle beam device using the same

20160126057

2016-05-05

Ion milling device

20130068734

2013-03-21

Roller mold manufacturing device and manufacturing method

20110107472

2011-05-05

Sensor for quantitative measurement of electromechanical properties and microstructure of nano-materials and method for making the same