SYSTEMS AND METHODS FOR FOCUSING CHARGED-PARTICLE BEAMS

BEAM ALIGNMENT AND SYNCHRONIZATION IN MICROSCOPY

CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CONTROLLING CHARGED PARTICLE BEAM DEVICE

CONTROLLING ETCH EDGE EFFECTS

3D FIDUCIAL FOR PRECISION 3D NAND CHANNEL TILT/SHIFT ANALYSIS

CHARGED PARTICLE BEAM DEVICE ADJUSTMENT METHOD AND CHARGED PARTICLE BEAM DEVICE

SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATION IN CHARGED PARTICLE BEAM SYSTEM

SENSOR SUBSTRATE, APPARATUS, AND METHOD

ORIENTATION TOOL FOR ELECTRON BACKSCATTER DIFFRACTION

STAGE DEVICE, CHARGED PARTICLE BEAM DEVICE, AND VACUUM DEVICE

LEVELING SENSOR IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION

APPARATUS AND METHOD FOR AUTOMATED GRID VALIDATION

Semiconductor Analysis System

A PROCESS AND APPARATUS FOR THE PREPARATION OF A BONDED SUBSTRATE

Sample analyzing method and sample preparing method

Self-differential confocal tilt sensor for measuring level variation in charged particle beam system

METHOD OF TEACHING TRANSFER DEVICE, AND TRANSFER SYSTEM

Load lock device having optical measuring device for acquiring distance

3D fiducial for precision 3D NAND channel tilt/shift analysis

DETECTION DEVICE, PROCESSING SYSTEM, AND TRANSFER METHOD

Optical system with compensation lens

System and method for bare wafer inspection

SYSTEMS AND METHODS FOR FOCUSING CHARGED -PARTICLE BEAMS

Charged particle beam device

Optical system with compensation lens

Interferometric stage positioning apparatus

Substrate support, substrate processing apparatus, substrate processing system, and method of detecting erosion of adhesive in substrate support

Stage apparatus and charged particle beam apparatus

Systems and methods for pedestal configuration

System and method for bare wafer inspection

Stage apparatus, and charged particle beam apparatus

Nondestructive sample imaging

Load lock system for charged particle beam imaging

System for dynamically compensating position errors of a sample

Cross section processing observation method and charged particle beam apparatus

Stage device and charged particle beam device

Electron-Beam Inspection Systems with optimized throughput

Position detecting system and processing apparatus

Charged particle beam apparatus, alignment method of charged particle beam apparatus, alignment program, and storage medium

Observation method and specimen observation apparatus

Probe landing detection

Multi-stage/multi-chamber electron-beam inspection system

Sample positioning method and charged particle beam apparatus

Multi charged particle beam writing apparatus and multi charged particle beam writing method

Workpiece transport and positioning apparatus

Laser SDE effect compensation by adaptive tuning

Tube-detector alignment using light projections

Lithography apparatus, and method of manufacturing an article

Charged particle beam drawing apparatus

Control unit for generating timing signal for imaging unit in inspection system and method for sending out timing signal to imaging unit

Positioning control device

Sample micromotion mechanism, method of using the same, and charged particle device

Stage device and charged particle beam apparatus using the stage device

Top opening-closing mechanism and inspection apparatus

Method for generating extreme ultraviolet light and device for generating extreme ultraviolet light

DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE

Method for controlling an interaction between droplet targets and a laser and apparatus for conducting said method

Ion beam irradiation device

Workpiece holder for workpiece transport apparatus

Scan head and scan arm using the same

Control for optically aligning an X-ray tube and X-ray detector

APPARATUS AND METHOD FOR PLASMA TREATMENT OF SURFACES

Drawing apparatus and method of manufacturing article

Charged particle beam lithography system and target positioning device

Stage device and control method for stage device

Positioning system and method for precise stage and pattern used therof

Sample stage device

Charged particle beam drawing apparatus and charged particle beam drawing method

Electron beam drift detection device and method for detecting electron beam drift

Charged particle beam writing apparatus and method

Particle beam device having a sample holder

Charged particle beam lithography system and target positioning device

SPECIMEN HOLDER ASSEMBLY

Lateral displacement and rotational displacement sensor

PATTERN INSPECTION DEVICE AND METHOD

WORKPIECE HANDLING SYSTEM

Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus

NANOROBOT MODULE, AUTOMATION AND EXCHANGE

Ion implanting apparatus

Charged particle beam lithography system and target positioning device

Sample stage apparatus and method of controlling the same

Apparatus for Handling a Substrate and a Method Thereof

Tracking control method and electron beam writing system

Electric charged particle beam microscope and microscopy

Grid for transmission electron microscopy tomography and method of fabricating the same

Method and device for controlling and monitoring a position of a holding element

Charged particle beam deflection method with separate stage tracking and stage positional error signals

Charged particle beam apparatus and specimen holder

Sample holding mechanism and sample working/observing apparatus

Implanting with improved uniformity and angle control on tilted wafers

Beam shot position correction coefficient computation/updating technique for ultrafine pattern fabrication using variable shaped beam lithography

Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus

Charged particle beam system and a method for inspecting a sample

Electron-beam size measuring apparatus and size measuring method with electron beams

Semiconductor wafer inspection tool and semiconductor wafer inspection method

Move mechanism for moving target object and charged particle beam writing apparatus

Method for optically detecting height of a specimen and charged particle beam apparatus using the same

Strain detection for automated nano-manipulation

Real-time compensation of mechanical position error in pattern generation or imaging applications

System and method for positioning an object through use of a rotating laser metrology system

Scanning electron microscope

Stage system, exposure apparatus, and device manufacturing method

Transmission electron microscope and image observation method using it

Method and apparatus for sample formation and microanalysis in a vacuum chamber

Apparatus for sample formation and microanalysis in a vacuum chamber

Electron beam apparatus and method with surface height calculator and a dual projection optical unit

Method for reciprocating a workpiece through an ion beam

Reciprocating drive for scanning a workpiece

Reciprocating drive for scanning a workpiece through an ion beam

Charged particle beam apparatus and specimen holder

Cyclic error reduction in average interferometric position measurements

Stage system, exposure apparatus, and device manufacturing method