ClassID:

206466

H01J2237/204 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated Means for introducing and/or outputting objects

Recent Application in this class:
#1
20260144008
2026-05-21

SEMICONDUCTOR MANUFACTURING DEVICE AND TEACHING APPARATUS INCLUDING THE SAME

#2
20260058109
2026-02-26

VERTICALLY MOUNTED PROCESSING SYSTEM

#3
20260018395
2026-01-15

Atmospheric Plasma Activation for Hybrid Bonding

#4
20250349523
2025-11-13

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#5
20250316460
2025-10-09

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM

#6
20250273445
2025-08-28

SUBSTRATE PROCESSING APPARATUS

#7
20250266234
2025-08-21

METHOD FOR POSITIONING OBJECTS IN A PARTICLE BEAM MICROSCOPE WITH THE AID OF A FLEXIBLE PARTICLE BEAM BARRIER

#8
20250201509
2025-06-19

High-Volume Transmission Electron Microscopy Grid

#9
20250052992
2025-02-13

MICROSECOND MELTING AND REVITRIFICATION OF CRYO SAMPLES WITH A CORRELATIVE LIGHT ELECTRON MICROSCOPY SETUP

#10
20250014857
2025-01-09

METHOD AND SYSTEM OF REDUCING CHAMBER VIBRATION

#11
20240420916
2024-12-19

WAFER EDGE INSPECTION OF CHARGED PARTICLE INSPECTION SYSTEM

#12
20240404781
2024-12-05

SAMPLE HOLDER AND ELECTRON MICROSCOPE

#13
20240274399
2024-08-15

Device For Interfacing A Sample Transfer Device To An Analytic Or Sample Preparation Device And A Container For Transporting A Sample Under Environmentally Controlled Conditions

#14
20240212972
2024-06-27

Automated Multi-Grid Handling Apparatus

#15
20240153734
2024-05-09

SAMPLE HOLDER FOR TRANSMISSION ELECTRON MICROSCOPE, SAMPLE ANALYSIS SYSTEM INCLUDING THE SAME, AND METHOD FOR ANALYZING SAMPLE USING THE SAME

#16
20240153733
2024-05-09

VOLUME FILLING CASSETTE FOR LOAD LOCK

#17
20240112879
2024-04-04

Systems And Methods For Transferring A Sample

#18
20240019346
2024-01-18

Immunostaining Method, Sample Exchange Chamber, And Charged Particle Beam Apparatus

#19
20240014001
2024-01-11

SYSTEM OF SCANNING ELECTRON MICROSCOPE SAMPLE BOX AND METHOD OF OPENING THE SAME

#20
20230386779
2023-11-30

SAMPLE HOLDER, LOADING DEVICE, AND METHOD FOR INSERTING A SAMPLE INTO A SAMPLE HOLDER

#21
20230377833
2023-11-23

System and methods for automated processing of multiple samples in a BIB system

#22
20230170178
2023-06-01

RAPID AND AUTOMATIC VIRUS IMAGING AND ANALYSIS SYSTEM AS WELL AS METHODS THEREOF

#23
20230039753
2023-02-09

SAMPLE TRANSFER DEVICE

#24
20220415607
2022-12-29

Automated multi-grid handling apparatus

#25
20220375714
2022-11-24

Method for positioning objects in a particle beam microscope with the aid of a flexible particle beam barrier

#26
20220223371
2022-07-14

Charged particle beam system

#27
20220223369
2022-07-14

Transport Device and Charged Particle Beam System

#28
20220216031
2022-07-07

Sample protection device for scanning electron microscopy

#29
20220172922
2022-06-02

Vacuum apparatus

#30
20210343498
2021-11-04

Automated multi-grid handling apparatus

#31
20210331394
2021-10-28

Methods of post-curing additive manufacturing parts using electron beams

#32
20210125854
2021-04-29

Substrate processing apparatus

#33
20210110991
2021-04-15

Cryotransfer holder and workstation

#34
20210082657
2021-03-18

Automated multi-grid handling apparatus

#35
20210055534
2021-02-25

Vacuum transfer assembly

#36
20200402760
2020-12-24

Scanning electron microscope

#37
20200335654
2020-10-22

Sputter deposition apparatus including roller assembly and method

#38
20200306792
2020-10-01

Paint hardening device and paint hardening method

#39
20200294760
2020-09-17

Apparatus and method for large-scale high throughput quantitative characterization and three-dimensional reconstruction of material structure

#40
20200123648
2020-04-23

VACUUM SPUTTERING APPARATUS AND ITS VACUUM ATMOSPHERE EXCHANGE DEVICE

#41
20200027691
2020-01-23

Transmission electron microscope specimen and method of manufacturing the same

#42
20200017953
2020-01-16

Coating arrangement and method

#43
20190295813
2019-09-26

Method of observing liquid specimen, method of analyzing liquid specimen and electron microscope

#44
20190287756
2019-09-19

Sample stage

#45
20190198372
2019-06-27

System for dynamically compensating position errors of a sample

#46
20190131106
2019-05-02

Cryotransfer holder and workstation

#47
20190103245
2019-04-04

Scanning electron microscope

#48
20190057835
2019-02-21

System and method for reduced workpiece adhesion due to electrostatic charge during removal from a processing station

#49
20190033182
2019-01-31

Sample holder, ion milling apparatus, sample processing method, sample observing method, and sample processing and observing method

#50
20190027635
2019-01-24

Multi-piece substrate holder and alignment mechanism

#51
20180356624
2018-12-13

Correlation microscope

#52
20180330915
2018-11-15

Method for enabling modular part replacement within an electron microscope sample holder

#53
20180301322
2018-10-18

Position detecting system and processing apparatus

#54
20180269027
2018-09-20

Charged particle beam device

#55
20180096817
2018-04-05

Specimen holder

#56
20180095015
2018-04-05

Sample preparation system and preparation method for an electron microscope

#57
20170213693
2017-07-27

Cryostation system

#58
20170207062
2017-07-20

Electron microscope and method for transmission electron microscopy imaging of sample arrays

#59
20170040197
2017-02-09

Ion implantation apparatus and method for processing plurality of wafers using the same

#60
20170025250
2017-01-26

Preparation of specimen arrays on an EM grid

#61
20170004952
2017-01-05

Sample holder and analytical vacuum device

#62
20160377513
2016-12-29

Sample collection device and sample collection device array

#63
20160372302
2016-12-22

Workpiece transport and positioning apparatus

#64
20160336144
2016-11-17

Method for enabling modular part replacement within an electron microscope sample holder

#65
20160181059
2016-06-23

Specimen holder for a charged particle microscope

#66
20160163506
2016-06-09

Method for S/TEM sample analysis

#67
20160114986
2016-04-28

Transporting apparatus and method of transporting using the same

#68
20160024645
2016-01-28

Ion beam sample preparation and coating apparatus and methods

#69
20150371817
2015-12-24

Device for dust emitting of foreign matter and dust emission cause analysis device

#70
20150323429
2015-11-12

Method for creating S/TEM sample and sample structure

#71
20150294834
2015-10-15

High capacity TEM grid

#72
20150255246
2015-09-10

Sample micromotion mechanism, method of using the same, and charged particle device

#73
20150243473
2015-08-27

Workpiece transport and positioning apparatus

#74
20150170874
2015-06-18

Specimen sample holder for workpiece transport apparatus

#75
20150166273
2015-06-18

Workpiece holder for workpiece transport apparatus

#76
20150118126
2015-04-30

Transmission electron microscope cells for use with liquid samples

#77
20150114193
2015-04-30

Integrated lamellae extraction station

#78
20150090899
2015-04-02

Preparation of specimen arrays on an EM grid

#79
20150083908
2015-03-26

Inspection or observation apparatus and sample inspection or observation method

#80
20150060694
2015-03-05

Charged particle beam device

#81
20140326880
2014-11-06

Device for analising a radiating material using a microprobe

#82
20140319346
2014-10-30

Inspection system by charged particle beam and method of manufacturing devices using the system

#83
20140264017
2014-09-18

Transmission electron microscope, and method of observing specimen

#84
20140246583
2014-09-04

Inspection or observation apparatus and sample inspection or observation method

#85
20140034846
2014-02-06

In-vacuum high speed pre-chill and post-heat stations

#86
20130256532
2013-10-03

Ion sources, systems and methods

#87
20130200262
2013-08-08

Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus

#88
20130099134
2013-04-25

Manipulator carrier for electron microscopes

#89
20130082193
2013-04-04

Charged particle beam writing apparatus and charged particle beam writing method

#90
20130014528
2013-01-17

Cryogenic specimen holder

#91
20120152731
2012-06-21

Method for creating S/TEM sample and sample structure

#92
20120060353
2012-03-15

MECHANISM AND METHOD FOR ENSURING ALIGNMENT OF A WORKPIECE TO A MASK

#93
20120049063
2012-03-01

Sample surface inspection apparatus and method

#94
20120032079
2012-02-09

Inspection system by charged particle beam and method of manufacturing devices using the system

#95
20120024086
2012-02-02

Cryogenic specimen holder

#96
20120006984
2012-01-12

Method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system

#97
20110248190
2011-10-13

Wafer handling method and ion implanter

#98
20110240881
2011-10-06

Specimen holder and specimen holder movement device

#99
20110240853
2011-10-06

Ion sources, systems and methods

#100
20110180724
2011-07-28

Sample transfer device and sample transferring method

#101
20110147618
2011-06-23

Charged particle beam system

#102
20110121207
2011-05-26

Ion beam processing apparatus

#103
20110104830
2011-05-05

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

#104
20110057100
2011-03-10

Transmission electron microscope, and method of observing specimen

#105
20110027463
2011-02-03

WORKPIECE HANDLING SYSTEM

#106
20110006207
2011-01-13

Method for S/TEM sample analysis

#107
20100314552
2010-12-16

Ion implanter

#108
20100310341
2010-12-09

Method and system for moving wafer during scanning the wafer

#109
20100308219
2010-12-09

Method for creating S/TEM sample and sample structure

#110
20100300873
2010-12-02

Method for creating S/tem sample and sample structure

#111
20100276592
2010-11-04

Slider bearing for use with an apparatus comprising a vacuum chamber

#112
20100258739
2010-10-14

Charged particle beam apparatus

#113
20100230592
2010-09-16

Sample transfer unit and sample transferring method

#114
20100224780
2010-09-09

Beam device system comprising a particle beam device and an optical microscope

#115
20100140473
2010-06-10

NANOROBOT MODULE, AUTOMATION AND EXCHANGE

#116
20100133449
2010-06-03

Ion implantation apparatus, substrate clamping mechanism, and ion implantation method

#117
20100108907
2010-05-06

Charged-particle optical system with dual loading options

#118
20100090107
2010-04-15

Method and handling apparatus for placing patterning device on support member for charged particle beam imaging

#119
20100084554
2010-04-08

Method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system

#120
20090230984
2009-09-17

Defective product inspection apparatus, probe positioning method and probe moving method

#121
20090200493
2009-08-13

Methods for in situ surface treatment in an ion implantation system

#122
20090196717
2009-08-06

Apparatus for Handling a Substrate and a Method Thereof

#123
20090196484
2009-08-06

Systems and Methods of Identifying Biomarkers for Subsequent Screening and Monitoring of Diseases

#124
20090196483
2009-08-06

Systems and Methods of Identifying Biomarkers for Subsequent Screening and Monitoring of Diseases

#125
20090173446
2009-07-09

SUBSTRATE SUPPORT, SUBSTRATE PROCESSING APPARATUS INCLUDING SUBSTRATE SUPPORT, AND METHOD OF ALIGNING SUBSTRATE

#126
20090166536
2009-07-02

Sample holder, method for observation and inspection, and apparatus for observation and inspection

#127
20090119807
2009-05-07

Method of preparing a transmission electron microscope sample and a sample piece for a transmission electron microscope

#128
20090114842
2009-05-07

Sample preparing device and sample posture shifting method

#129
20090078060
2009-03-26

Method and apparatus for transfer of samples in a controlled environment

#130
20090065708
2009-03-12

Grid for transmission electron microscopy tomography and method of fabricating the same

#131
20090050822
2009-02-26

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

#132
20090039262
2009-02-12

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

#133
20090032708
2009-02-05

Inspection system by charged particle beam and method of manufacturing devices using the system

#134
20080315096
2008-12-25

Portable electron microscope using micro-column

#135
20080308729
2008-12-18

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

#136
20080302963
2008-12-11

Sheet beam-type testing apparatus

#137
20080265159
2008-10-30

Sample surface inspection apparatus and method

#138
20080203302
2008-08-28

Sample transfer unit and sample transferring method

#139
20080203301
2008-08-28

Electron microscope

#140
20080173815
2008-07-24

Electron beam apparatus and device production method using the electron beam apparatus

#141
20080156770
2008-07-03

Method of fabricating grabbing face of sample grabbing portion

#142
20080121804
2008-05-29

Method for inspecting substrate, substrate inspecting system and electron

#143
20080093565
2008-04-24

Charged particle beam system and its specimen holder

#144
20080048699
2008-02-28

Defective product inspection apparatus, probe positioning method and probe moving method

#145
20080042060
2008-02-21

Inspection system by charged particle beam and method of manufacturing devices using the system

#146
20070278421
2007-12-06

Sample preparation technique

#147
20070272859
2007-11-29

Electron beam apparatus and device production method using the electron beam apparatus

#148
20070235644
2007-10-11

Inspection system by charged particle beam and method of manufacturing devices using the system

#149
20070221844
2007-09-27

Metrology system of fine pattern for process control by charged particle beam

#150
20070210261
2007-09-13

Specimen holding device and charged particle beam device

#151
20070194235
2007-08-23

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

#152
20070187623
2007-08-16

Method, System and Device for Microscopic Examination Employing Fib-Prepared Sample Grasping Element

#153
20070120068
2007-05-31

Charged particle beam apparatus

#154
20070103657
2007-05-10

Position measuring apparatus and positional deviation measuring method

#155
20070089528
2007-04-26

Strain detection for automated nano-manipulation

#156
20070057186
2007-03-15

Inspection system by charged particle beam and method of manufacturing devices using the system

#157
20070045536
2007-03-01

Method for inspecting substrate, substrate inspecting system and electron beam apparatus

#158
20070029504
2007-02-08

Vacuum conveying apparatus and charged particle beam equipment with the same

#159
20070023698
2007-02-01

ION IMPLANTING APPARATUS AND METHOD

#160
20070022831
2007-02-01

Integrated in situ scanning electronic microscope review station in semiconductor wafers and photomasks optical inspection system

#161
20070018101
2007-01-25

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

#162
20060197017
2006-09-07

Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method, and cross section working apparatus

#163
20060138343
2006-06-29

Sheet beam-type testing apparatus

#164
20060091325
2006-05-04

Method and apparatus for the automated process of in-situ lift-out

#165
20060091302
2006-05-04

Apparatus and method of detecting probe tip contact with a surface

#166
20060068373
2006-03-30

Systems and methods of identifying biomarkers for subsequent screening and monitoring of diseases

#167
20060038133
2006-02-23

Rotating specimen holder

#168
20060022694
2006-02-02

Large substrate test system

#169
20060022135
2006-02-02

Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope

#170
20060011868
2006-01-19

Method and apparatus for sample formation and microanalysis in a vacuum chamber

#171
20060011867
2006-01-19

Apparatus for sample formation and microanalysis in a vacuum chamber

#172
20050178980
2005-08-18

Method, system and device for microscopic examination employing fib-prepared sample grasping element

#173
20050158653
2005-07-21

Sample surface inspection apparatus and method

#174
20050139781
2005-06-30

Defective product inspection apparatus, probe positioning method and probe moving method

#175
20050121611
2005-06-09

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

#176
20050115352
2005-06-02

Motor, robot, substrate loader, and exposure apparatus

#177
20050107917
2005-05-19

Robotic system for sequencing multiple specimens between a holding tray and a microscope

#178
20050092933
2005-05-05

Specimen holder, observation system, and method of rotating specimen

#179
20050092921
2005-05-05

Sheet beam-type inspection apparatus

#180
16355704
2022-07-26

Positioning samples for microscopy, inspection, or analysis