206466 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated Means for introducing and/or outputting objects
SEMICONDUCTOR MANUFACTURING DEVICE AND TEACHING APPARATUS INCLUDING THE SAME
#2VERTICALLY MOUNTED PROCESSING SYSTEM
#3Atmospheric Plasma Activation for Hybrid Bonding
#4SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#5SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
#6SUBSTRATE PROCESSING APPARATUS
#7METHOD FOR POSITIONING OBJECTS IN A PARTICLE BEAM MICROSCOPE WITH THE AID OF A FLEXIBLE PARTICLE BEAM BARRIER
#8High-Volume Transmission Electron Microscopy Grid
#9MICROSECOND MELTING AND REVITRIFICATION OF CRYO SAMPLES WITH A CORRELATIVE LIGHT ELECTRON MICROSCOPY SETUP
#10METHOD AND SYSTEM OF REDUCING CHAMBER VIBRATION
#11WAFER EDGE INSPECTION OF CHARGED PARTICLE INSPECTION SYSTEM
#12SAMPLE HOLDER AND ELECTRON MICROSCOPE
#13Device For Interfacing A Sample Transfer Device To An Analytic Or Sample Preparation Device And A Container For Transporting A Sample Under Environmentally Controlled Conditions
#14Automated Multi-Grid Handling Apparatus
#15SAMPLE HOLDER FOR TRANSMISSION ELECTRON MICROSCOPE, SAMPLE ANALYSIS SYSTEM INCLUDING THE SAME, AND METHOD FOR ANALYZING SAMPLE USING THE SAME
#16VOLUME FILLING CASSETTE FOR LOAD LOCK
#17Systems And Methods For Transferring A Sample
#18Immunostaining Method, Sample Exchange Chamber, And Charged Particle Beam Apparatus
#19SYSTEM OF SCANNING ELECTRON MICROSCOPE SAMPLE BOX AND METHOD OF OPENING THE SAME
#20SAMPLE HOLDER, LOADING DEVICE, AND METHOD FOR INSERTING A SAMPLE INTO A SAMPLE HOLDER
#21System and methods for automated processing of multiple samples in a BIB system
#22RAPID AND AUTOMATIC VIRUS IMAGING AND ANALYSIS SYSTEM AS WELL AS METHODS THEREOF
#23SAMPLE TRANSFER DEVICE
#24Automated multi-grid handling apparatus
#25Method for positioning objects in a particle beam microscope with the aid of a flexible particle beam barrier
#26Charged particle beam system
#27Transport Device and Charged Particle Beam System
#28Sample protection device for scanning electron microscopy
#29Vacuum apparatus
#30Automated multi-grid handling apparatus
#31Methods of post-curing additive manufacturing parts using electron beams
#32Substrate processing apparatus
#33Cryotransfer holder and workstation
#34Automated multi-grid handling apparatus
#35Vacuum transfer assembly
#36Scanning electron microscope
#37Sputter deposition apparatus including roller assembly and method
#38Paint hardening device and paint hardening method
#39Apparatus and method for large-scale high throughput quantitative characterization and three-dimensional reconstruction of material structure
#40VACUUM SPUTTERING APPARATUS AND ITS VACUUM ATMOSPHERE EXCHANGE DEVICE
#41Transmission electron microscope specimen and method of manufacturing the same
#42Coating arrangement and method
#43Method of observing liquid specimen, method of analyzing liquid specimen and electron microscope
#44Sample stage
#45System for dynamically compensating position errors of a sample
#46Cryotransfer holder and workstation
#47Scanning electron microscope
#48System and method for reduced workpiece adhesion due to electrostatic charge during removal from a processing station
#49Sample holder, ion milling apparatus, sample processing method, sample observing method, and sample processing and observing method
#50Multi-piece substrate holder and alignment mechanism
#51Correlation microscope
#52Method for enabling modular part replacement within an electron microscope sample holder
#53Position detecting system and processing apparatus
#54Charged particle beam device
#55Specimen holder
#56Sample preparation system and preparation method for an electron microscope
#57Cryostation system
#58Electron microscope and method for transmission electron microscopy imaging of sample arrays
#59Ion implantation apparatus and method for processing plurality of wafers using the same
#60Preparation of specimen arrays on an EM grid
#61Sample holder and analytical vacuum device
#62Sample collection device and sample collection device array
#63Workpiece transport and positioning apparatus
#64Method for enabling modular part replacement within an electron microscope sample holder
#65Specimen holder for a charged particle microscope
#66Method for S/TEM sample analysis
#67Transporting apparatus and method of transporting using the same
#68Ion beam sample preparation and coating apparatus and methods
#69Device for dust emitting of foreign matter and dust emission cause analysis device
#70Method for creating S/TEM sample and sample structure
#71High capacity TEM grid
#72Sample micromotion mechanism, method of using the same, and charged particle device
#73Workpiece transport and positioning apparatus
#74Specimen sample holder for workpiece transport apparatus
#75Workpiece holder for workpiece transport apparatus
#76Transmission electron microscope cells for use with liquid samples
#77Integrated lamellae extraction station
#78Preparation of specimen arrays on an EM grid
#79Inspection or observation apparatus and sample inspection or observation method
#80Charged particle beam device
#81Device for analising a radiating material using a microprobe
#82Inspection system by charged particle beam and method of manufacturing devices using the system
#83Transmission electron microscope, and method of observing specimen
#84Inspection or observation apparatus and sample inspection or observation method
#85In-vacuum high speed pre-chill and post-heat stations
#86Ion sources, systems and methods
#87Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus
#88Manipulator carrier for electron microscopes
#89Charged particle beam writing apparatus and charged particle beam writing method
#90Cryogenic specimen holder
#91Method for creating S/TEM sample and sample structure
#92MECHANISM AND METHOD FOR ENSURING ALIGNMENT OF A WORKPIECE TO A MASK
#93Sample surface inspection apparatus and method
#94Inspection system by charged particle beam and method of manufacturing devices using the system
#95Cryogenic specimen holder
#96Method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system
#97Wafer handling method and ion implanter
#98Specimen holder and specimen holder movement device
#99Ion sources, systems and methods
#100Sample transfer device and sample transferring method
#101Charged particle beam system
#102Ion beam processing apparatus
#103Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
#104Transmission electron microscope, and method of observing specimen
#105WORKPIECE HANDLING SYSTEM
#106Method for S/TEM sample analysis
#107Ion implanter
#108Method and system for moving wafer during scanning the wafer
#109Method for creating S/TEM sample and sample structure
#110Method for creating S/tem sample and sample structure
#111Slider bearing for use with an apparatus comprising a vacuum chamber
#112Charged particle beam apparatus
#113Sample transfer unit and sample transferring method
#114Beam device system comprising a particle beam device and an optical microscope
#115NANOROBOT MODULE, AUTOMATION AND EXCHANGE
#116Ion implantation apparatus, substrate clamping mechanism, and ion implantation method
#117Charged-particle optical system with dual loading options
#118Method and handling apparatus for placing patterning device on support member for charged particle beam imaging
#119Method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system
#120Defective product inspection apparatus, probe positioning method and probe moving method
#121Methods for in situ surface treatment in an ion implantation system
#122Apparatus for Handling a Substrate and a Method Thereof
#123Systems and Methods of Identifying Biomarkers for Subsequent Screening and Monitoring of Diseases
#124Systems and Methods of Identifying Biomarkers for Subsequent Screening and Monitoring of Diseases
#125SUBSTRATE SUPPORT, SUBSTRATE PROCESSING APPARATUS INCLUDING SUBSTRATE SUPPORT, AND METHOD OF ALIGNING SUBSTRATE
#126Sample holder, method for observation and inspection, and apparatus for observation and inspection
#127Method of preparing a transmission electron microscope sample and a sample piece for a transmission electron microscope
#128Sample preparing device and sample posture shifting method
#129Method and apparatus for transfer of samples in a controlled environment
#130Grid for transmission electron microscopy tomography and method of fabricating the same
#131Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
#132Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
#133Inspection system by charged particle beam and method of manufacturing devices using the system
#134Portable electron microscope using micro-column
#135Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
#136Sheet beam-type testing apparatus
#137Sample surface inspection apparatus and method
#138Sample transfer unit and sample transferring method
#139Electron microscope
#140Electron beam apparatus and device production method using the electron beam apparatus
#141Method of fabricating grabbing face of sample grabbing portion
#142Method for inspecting substrate, substrate inspecting system and electron
#143Charged particle beam system and its specimen holder
#144Defective product inspection apparatus, probe positioning method and probe moving method
#145Inspection system by charged particle beam and method of manufacturing devices using the system
#146Sample preparation technique
#147Electron beam apparatus and device production method using the electron beam apparatus
#148Inspection system by charged particle beam and method of manufacturing devices using the system
#149Metrology system of fine pattern for process control by charged particle beam
#150Specimen holding device and charged particle beam device
#151Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
#152Method, System and Device for Microscopic Examination Employing Fib-Prepared Sample Grasping Element
#153Charged particle beam apparatus
#154Position measuring apparatus and positional deviation measuring method
#155Strain detection for automated nano-manipulation
#156Inspection system by charged particle beam and method of manufacturing devices using the system
#157Method for inspecting substrate, substrate inspecting system and electron beam apparatus
#158Vacuum conveying apparatus and charged particle beam equipment with the same
#159ION IMPLANTING APPARATUS AND METHOD
#160Integrated in situ scanning electronic microscope review station in semiconductor wafers and photomasks optical inspection system
#161Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
#162Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method, and cross section working apparatus
#163Sheet beam-type testing apparatus
#164Method and apparatus for the automated process of in-situ lift-out
#165Apparatus and method of detecting probe tip contact with a surface
#166Systems and methods of identifying biomarkers for subsequent screening and monitoring of diseases
#167Rotating specimen holder
#168Large substrate test system
#169Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope
#170Method and apparatus for sample formation and microanalysis in a vacuum chamber
#171Apparatus for sample formation and microanalysis in a vacuum chamber
#172Method, system and device for microscopic examination employing fib-prepared sample grasping element
#173Sample surface inspection apparatus and method
#174Defective product inspection apparatus, probe positioning method and probe moving method
#175Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
#176Motor, robot, substrate loader, and exposure apparatus
#177Robotic system for sequencing multiple specimens between a holding tray and a microscope
#178Specimen holder, observation system, and method of rotating specimen
#179Sheet beam-type inspection apparatus
#180Positioning samples for microscopy, inspection, or analysis