206475 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging Treatment of data
Sub-classes:OPTIMAL TIME-RELATED AND QUALITY-RELATED CHARGED PARTICLE BEAM SCANNING PARAMETERS
#2METHOD AND SYSTEM OF OVERLAY MEASUREMENT USING CHARGED-PARTICLE INSPECTION APPARATUS
#3CHARGED PARTICLE BEAM DISTORTION CORRECTION METHOD
#4ELECTRON BEAM LITHOGRAPHY APPARATUS, ELECTRON BEAM LITHOGRAPHY METHOD, AND RECORDING MEDIUM
#5NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES
#6Data generation method, charged particle beam irradiation device, and computer-readable recording medium
#7UV STERILIZATION OF CONTAINER, ROOM, SPACE OR DEFINED ENVIRONMENT
#8Methods and systems for acquiring 3D diffraction data
#9UV sterilization of container, room, space or defined environment
#10UV sterilization of container, room, space or defined environment
#11Crystal orientation figure creating device, charged particle beam device, crystal orientation figure creating method, and program
#12CHARACTERIZATION OF REGIONS WITH DIFFERENT CRYSTALLINITY IN MATERIALS
#13Pulse processing
#14Electron microscope
#15Discriminative imaging technique in scanning transmission charged particle microscopy
#16X-ray spectroscopy in a charged-particle microscope
#17Learning based approach for aligning images acquired with different modalities
#18Guided scanning electron microscopy metrology based on wafer topography
#19Diagnostic methods for the classifiers and the defects captured by optical tools
#20Virtual inspection systems with multiple modes
#21UV sterilization of container, room, space or defined environment
#22Pulse processing
#23Method and device for line pattern shape evaluation
#24Automated decision-based energy-dispersive x-ray methodology and apparatus
#25Information processing device and information processing method
#26Portable UV devices, systems and methods of use and manufacturing
#27Multi-beam particle microscope and method for operating same
#28Three-dimensional mapping using scanning electron microscope images
#29Charged particle beam apparatus, specimen observation system and operation program
#30UV devices, systems and methods for UV sterilization
#31Inspection system by charged particle beam and method of manufacturing devices using the system
#32Three-dimensional mapping using scanning electron microscope images
#33Image-enhancing spotlight mode for digital microscopy
#34Three-dimensional mapping using scanning electron microscope images
#35Pattern dimension measurement method using electron microscope, pattern dimension measurement system, and method for monitoring changes in electron microscope equipment over time
#36Method of protecting a radiation detector in a charged particle instrument
#37Microscope system, method for operating a charged-particle microscope
#38Ion source cleaning in semiconductor processing systems
#39Scan method
#40Inspection system by charged particle beam and method of manufacturing devices using the system
#41Physical properties measuring method and apparatus
#42ION SOURCE CLEANING IN SEMICONDUCTOR PROCESSING SYSTEMS
#43Pattern measurement apparatus and pattern measurement method
#44Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
#45SEMICONDUCTOR DEVICE ANALYZER AND SEMICONDUCTOR DEVICE ANALYSIS METHOD
#46Method and apparatus for analysis using X-ray spectra
#47Graphical user interface for use with electron beam wafer inspection
#48Hole inspection apparatus and hole inspection method using the same
#49Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
#50Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
#51Inspection system by charged particle beam and method of manufacturing devices using the system
#52Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
#53Sheet beam-type testing apparatus
#54Scanning electron microscope and three-dimensional shape measuring device that used it
#55Charged particle system
#56Pattern measuring method and electron microscope
#57Electron beam apparatus and device production method using the electron beam apparatus
#58Method for inspecting substrate, substrate inspecting system and electron
#59Inspection system by charged particle beam and method of manufacturing devices using the system
#60Electron beam apparatus and device production method using the electron beam apparatus
#61Method and apparatus for pattern inspection
#62Inspection system by charged particle beam and method of manufacturing devices using the system
#63Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
#64Inspection system by charged particle beam and method of manufacturing devices using the system
#65Scanning electron microscope
#66Method for inspecting substrate, substrate inspecting system and electron beam apparatus
#67Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
#68Sheet beam-type testing apparatus
#69Scanning electron microscope
#70Scanning electron microscope
#71Scanning electron microscope
#72Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
#73Sheet beam-type inspection apparatus