206515 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging Components associated with the control of the tube
Sub-classes:Cross sectional depth composition generation utilizing scanning electron microscopy
#2Cross sectional depth composition generation utilizing scanning electron microscopy
#3Beam position monitors for medical radiation machines
#4Electron microscope
#5Charged particle beam apparatus and program
#6Methods and apparatus for depositing and/or etching material on a substrate
#7Charged particle beam apparatus and electrostatic chuck apparatus
#8Method of using a compound particle-optical lens
#9Image quality adjusting method, non-transitory computer-readable recording medium, and electron microscope
#10Scanning transmission electron microscopy for imaging extended areas
#11Method of adjusting transmission electron microscope
#12Image processing device and computer program
#13Scanning transmission electron microscopy
#14Pattern measurement apparatus and pattern measurement method
#15Laser Atom Probe and Laser Atom Probe Analysis Methods
#16Method and apparatus for controlling beam current uniformity in an ion implanter
#17Method for controlling electron beam in multi-microcolumn and multi-microcolumn using the same
#18Method and apparatus for setting sample observation condition, and method and apparatus for sample observation
#19Inspection system by charged particle beam and method of manufacturing devices using the system
#20Manufacturing equipment using ION beam or electron beam
#21Line-width measurement adjusting method and scanning electron microscope
#22Inspection system by charged particle beam and method of manufacturing devices using the system