Systems and methods for providing a beam of charged particles

Foil sheet assemblies for ion implantation

LIQUID DROPLET INJECTING APPARATUS AND ION SOURCE

Process gas enhancement for beam treatment of a substrate

Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus

Water cluster ion beam mass spectrometer apparatus and method

Ion generation in mass spectrometers by cluster bombardment

Switchable gas cluster and atomic ion gun, and method of surface processing using the gun

Method for detecting hydrogen peroxide

Gas cluster ion beam system with rapid gas switching apparatus

Method for modifying a material layer using gas cluster ion beam processing

CHARGED PARTICLE SEPARATION APPARATUS AND CHARGED PARTICLE BOMBARDMENT APPARATUS

Method for modifying a material layer using gas cluster ion beam processing

Method of Smoothing Solid Surface with Gas Cluster Ion Beam and Solid Surface Smoothing Apparatus

Method and system for growing a thin film using a gas cluster ion beam

RF electron source for ionizing gas clusters

Method and apparatus for controlling a gas cluster ion beam formed from a gas mixture

Method to improve a copper/dielectric interface in semiconductor devices

Apparatus and methods of forming a gas cluster ion beam using a low-pressure source

Techniques for providing a ribbon-shaped gas cluster ion beam

Dual mode ion source for ion implantation

Dual mode ion source for ion implantation

Dual mode ion source for ion implantation

Mass spectrometer

Dual mode ion source for ion implantation

Ionizer and method for gas-cluster ion-beam formation

Method and apparatus for arc suppression in scanned ion beam processing equipment

Method and apparatus for improved processing with a gas-cluster ion beam

Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system