Ion implanter, ion implantation method, and semiconductor device manufacturing method

Controllable electrostatic ion and fluid flow generator

Ion source

Paint hardening device and paint hardening method

CHARGED PARTICLE CANCER THERAPY AND PATIENT POSITIONING METHOD AND APPARATUS

PLANAR ION SOURCES FOR SPECTROMETERS

ION-GENERATING DEVICE

MEMS device for generating an ion beam

Collision ionization source

Ion implantation processes and apparatus

Charged particle beam system

Charged particle translation slide control apparatus and method of use thereof

Tandem charged particle accelerator including carbon ion beam injector and carbon stripping foil

Plasma generator with at least one non-metallic component

Carbon ion beam injector apparatus and method of use thereof

Focused ion beam system

Gallium ION source and materials therefore

All-optical method and system for generating ultrashort charged particle beam

Method of Anion Production from Atoms and Molecules

IONIZATION GENERATING TUBE AND AN IONIZATION GENERATING DEVICE COMPRISING THE SAME

Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions

ION DOPING APPARATUS AND ION DOPING METHOD

Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions

Double-faced ion source

Method and apparatus for normalizing performance of an electron source

Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions

Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions

Method and apparatus for ionization by cluster-ion impact

Method and apparatus for the generation of anionic and neutral particulate beams and a system using same

Collision ionization ion source