204519 ⎘
Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps Arrangements for controlling convergence of a plurality of beams
ELECTRON BEAM APPARATUS, AND X-RAY GENERATION APPARATUS AND SCANNING ELECTRON MICROSCOPE EACH INCLUDING THE SAME
#2Apparatus for generating a plurality of beamlets
#3Apparatus for generating a plurality of beamlets
#4Apparatus for generating a plurality of beamlets
#5Apparatus for generating a plurality of beamlets