204521 ⎘
Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps Arrangements for centring ray or beam
Electron gun, electron beam applicator, emission axis verification method for electron beam emitted from photocathode, and emission axis alignment method for electron beam emitted from photocathode
#2Electron gun
#3Electron beam apparatus and a device manufacturing method by using said electron beam apparatus
#4Electron beam apparatus and a device manufacturing method by using said electron beam apparatus
#5Extractor for an microcolumn, an alignment method for an extractor aperture to an electron emitter, and a measuring method and an alignment method using thereof