204522 ⎘
Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps Arrangements for controlling cross-section of ray or beam; Arrangements for correcting aberration of beam, e.g. due to lenses
METHODS, MEDIUMS, AND SYSTEMS FOR IDENTIFYING TUNABLE DOMAINS FOR ION BEAM SHAPE MATCHING
#2Electron gun, control method and control program thereof, and three-dimensional shaping apparatus
#3Charged particle-beam device
#4Device and method for optimizing diffusion section of electron beam
#5Spherical aberration corrector, method of spherical aberration correction, and charged particle beam instrument
#6Charged particle lithography system with a long shape illumination beam
#7Charged particle optical system, drawing apparatus, and method of manufacturing article
#8Particle-beam column corrected for both chromatic and spherical aberration
#9SHAPING OFFSET ADJUSTMENT METHOD AND CHARGED PARTICLE BEAM DRAWING APPARATUS
#10Aberration correction device and charged particle beam device employing same
#11Method for correcting electronic proximity effects using off-center scattering functions
#12Cathode assembly with integral tabs
#13Aberration correction apparatus that corrects spherical aberration of charged particle apparatus
#14Non-axisymmetric charged-particle beam system
#15Non-axisymmetric charged-particle beam system