ClassID:

205242

H01J37/252 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof Tubes for spot-analysing by electron or ion beams; Microanalysers

Sub-classes:
Recent Application in this class:
#1
20250087447
2025-03-13

Charged Particle Beam Apparatus and Sample Analysis Method

#2
20240120173
2024-04-11

EBEAM INSPECTION

#3
20210396894
2021-12-23

Ion beam profiling system and related methods

#4
20210125808
2021-04-29

Particle beam profiles for analytic equipment configuration

#5
20200088660
2020-03-19

Handheld material analyser

#6
20200080949
2020-03-12

Sample inspection device and sample inspection method

#7
20200066482
2020-02-27

Charged particle microscope with a manipulator device, and method of preparing a specimen with said charged particle microscope

#8
20200058464
2020-02-20

X-ray analyzer and method for correcting counting rate

#9
20190164719
2019-05-30

Ion source and electron source having single-atom termination structure, tip having single-atom termination structure, gas field ion source, focused ion beam apparatus, electron source, electron microscope, mask repair apparatus, and method of manufacturing tip having single-atom termination structure

#10
20180330917
2018-11-15

Electron microscope and control method

#11
20180211812
2018-07-26

Electrostatic lens, and parallel beam generation device and parallel beam convergence device which use electrostatic lens and collimator

#12
20160356729
2016-12-08

Method of performing electron diffraction pattern analysis upon a sample

#13
20160245762
2016-08-25

Sample-specific reference spectra library

#14
20160172157
2016-06-16

Image type electron spin polarimeter

#15
20160141162
2016-05-19

Projection-type charged particle optical system and imaging mass spectrometry apparatus

#16
20160123905
2016-05-05

Inspection of inconsistencies in and on semiconductor devices and structures

#17
20160054240
2016-02-25

Method of acquiring EBSP patterns

#18
20150380227
2015-12-31

Two rotating electric fields mass analyzer

#19
20150338358
2015-11-26

Mineral identification using sequential decomposition into elements from mineral definitions

#20
20150318144
2015-11-05

Spectroscopic element and charged particle beam device using the same

#21
20150311030
2015-10-29

Multi-beam tool for cutting patterns

#22
20150308967
2015-10-29

Object information obtaining apparatus, program, and imaging system

#23
20150213997
2015-07-30

Ion sources, systems and methods

#24
20150206732
2015-07-23

Ion source, ion gun, and analysis instrument

#25
20150001423
2015-01-01

Device for spot size measurement at wafer level using a knife edge and a method for manufacturing such a device

#26
20140339424
2014-11-20

Device for mass selective determination of an ion

#27
20140332685
2014-11-13

Detecting high atomic number materials with cosmic ray muon tomography

#28
20140332684
2014-11-13

Electron beam interference device and electron beam interferometry

#29
20140326880
2014-11-06

Device for analising a radiating material using a microprobe

#30
20140306121
2014-10-16

Ion sources, systems and methods

#31
20140291511
2014-10-02

Charged particle beam apparatus and sample processing method using charged particle beam apparatus

#32
20140284477
2014-09-25

Charged-particle radiation apparatus

#33
20140117229
2014-05-01

Mineral identification using sequential decomposition into elements from mineral definitions

#34
20130112870
2013-05-09

HOLLOW CYLINDRICAL ANALYZER

#35
20120261571
2012-10-18

Imaging energy filter for electrically charged particles and spectroscope having same

#36
20120141693
2012-06-07

Ion sources, systems and methods

#37
20110151597
2011-06-23

Analysis method for semiconductor device

#38
20110139368
2011-06-16

APPARATUS AND SYSTEMS FOR INTEGRATED CIRCUIT DIAGNOSIS

#39
20110000323
2011-01-06

Device and method for introducing gas for analysis device

#40
20100284513
2010-11-11

Wavelength-dispersive X-ray spectrometer

#41
20100181476
2010-07-22

Spectrometer for Surface Analysis and Method Therefor

#42
20100163742
2010-07-01

Silicon drift X-ray detector

#43
20100077873
2010-04-01

Monitoring device of gas introducing device for analyzer

#44
20100001202
2010-01-07

SPHERICAL ABERRATION CORRECTION DECELERATING LENS, SPHERICAL ABERRATION CORRECTION LENS SYSTEM, ELECTRON SPECTROMETER, AND PHOTOELECTRON MICROSCOPE

#45
20090179161
2009-07-16

Ion sources, systems and methods

#46
20080135754
2008-06-12

Charged-Particle Beam System

#47
20080111069
2008-05-15

Determining dopant information

#48
20080067383
2008-03-20

Electron-beam size measuring apparatus and size measuring method with electron beams

#49
20080009140
2008-01-10

Electron induced chemical etching for device level diagnosis

#50
20070221843
2007-09-27

Ion sources, systems and methods

#51
20070210251
2007-09-13

Ion sources, systems and methods

#52
20070210250
2007-09-13

Ion sources, systems and methods

#53
20070205375
2007-09-06

Ion sources, systems and methods

#54
20070200070
2007-08-30

Aberration-correcting cathode lens microscopy instrument

#55
20070200062
2007-08-30

Energy-filtering cathode lens microscopy instrument

#56
20070194251
2007-08-23

Ion sources, systems and methods

#57
20070194226
2007-08-23

Ion sources, systems and methods

#58
20070187621
2007-08-16

Ion sources, systems and methods

#59
20070158582
2007-07-12

Ion sources, systems and methods

#60
20070158581
2007-07-12

Ion sources, systems and methods

#61
20070158580
2007-07-12

Ion sources, systems and methods

#62
20070158558
2007-07-12

Ion sources, systems and methods

#63
20070158557
2007-07-12

Ion sources, systems and methods

#64
20070158556
2007-07-12

Ion sources, systems and methods

#65
20070158555
2007-07-12

Ion sources, systems and methods

#66
20070138388
2007-06-21

Ion sources, systems and methods

#67
20070115468
2007-05-24

Spectrometer for surface analysis and method therefor

#68
20060250147
2006-11-09

Insulating film measuring device, insulating film measuring method, insulating film evaluating device, insulating film evaluating method, substrate for electric discharge display element, and plasma display panel

#69
20060163479
2006-07-27

Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method

#70
20050082477
2005-04-21

Lattice strain measuring system and method