205251 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
PARTICLE-OPTICAL ARRANGEMENT, FOR EXAMPLE MULTI-BEAM PARTICLE MICROSCOPE, WITH A MAGNET ARRANGEMENT FOR SEPARATING A PRIMARY AND A SECONDARY PARTICLE-OPTICAL BEAM PATH WITH IMPROVED PERFORMANCE
#2METHOD FOR OBTAINING MEASUREMENTS OF SEMICONDUCTOR STRUCTURES FROM A SINGLE WEDGE CUT OF AN INSPECTION VOLUME
#3CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD
#4COLLATION SYSTEM
#5DISTRIBUTIVE IMAGING ALLOWING SAMPLE RELAXATION
#6Charged Particle Beam Apparatus and Control Method for Charged Particle Beam Apparatus
#7MULTI-BEAM PARTICLE BEAM SYSTEM HAVING AN ELECTROSTATIC BOOSTER LENS, METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM SYSTEM, AND ASSOCIATED COMPUTER PROGRAM PRODUCT
#8ULTRA FAST PULSER FOR LOW ENERGY ELECTRON BEAMS
#9Charged Particle Beam Device and Method for Estimating Sample Characteristics
#10BROAD ION BEAM DELAYERING APPARATUS WITH INTEGRATED IMAGING
#11PARTICLE BEAM APPARATUS WITH MOVEABLE OBJECT STAGE
#12PREVENTING ESD IN PRT SEM DISCHARGES
#13METHOD AND APPARATUS FOR CHARGE COMPENSATION DURING 3D TOMOGRAPHY
#14MULTI-BEAM CHARGED PARTICLE MICROSCOPE FOR INSPECTION WITH IMPROVED IMAGE CONTRAST
#15METHODS AND SYSTEMS FOR EVENT MODULATED ELECTRON MICROSCOPY
#16METHOD FOR MONITORING ELECTRON BEAM OF MEASURING APPARATUS AND MONITORING APPARATUS USING THE SAME
#17PRECISE AUTOMATED CONTROL OF LAMELLA LIFT-OUT
#18Scanning Electron Microscope and Gradient Map Generation Method
#19Analysis System and Particle Analysis Method
#20AUTOMATED CHEMICAL SWITCHING FOR MATERIAL DELAYERING
#21PHOTO-ELECTRICAL EVOLUTION DEFECT INSPECTION
#22CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD
#23FOIL LENS CORRECTORS, CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME, AND ASSOCIATED METHODS
#24CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD
#25SCANNING ELECTRON MICROSCOPE WITH ENHANCED THREE-DIMENSIONAL IMAGING
#26MULTIPLE PARTICLE BEAM MICROSCOPE AND ASSOCIATED METHOD WITH FAST AUTOFOCUS AROUND AN ADJUSTABLE WORKING DISTANCE
#27METHOD FOR THE AUTOMATED MECHANICAL ADJUSTMENT OF A PARTICLE BEAM COLUMN, ASSOCIATED COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM COLUMN
#28SYSTEMS AND METHODS FOR FOCUSING CHARGED-PARTICLE BEAMS
#29SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME
#30COLUMN, PROCESSING ARRANGEMENT AND METHOD
#31EXAMINING, ANALYZING AND/OR PROCESSING AN OBJECT USING AN OBJECT RECEIVING CONTAINER
#32MULTI-BEAM CHARGED PARTICLE MICROSCOPE FOR INSPECTION WITH INCREASED THROUGHPUT
#33MAGNETIC MAGNIFICATION CONTROL FOR ELECTRON MICROSCOPES
#34ELECTRON MICROSCOPE AND CONTROL METHOD THEREOF
#35IN-COLUMN PARTICLE FILTER
#36SYSTEM, DEVICE AND METHOD OF CONTROLLING EMISSION CURRENT OF ELECTRON MICROSCOPE
#37Charged Particle Beam Device
#38SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR IN A SINGLE-BEAM OR MULTI-BEAM APPARATUS
#39CHARGED PARTICLE LENS
#40FIELD CURVATURE CORRECTOR FOR USE IN MULTI-ELECTRON-BEAM OPTICAL SYSTEM
#41PATTERN INSPECTION SYSTEM AND METHOD OF PATTERN INSPECTION USING THE SAME
#42HIGH THROUGHPUT MULTI-BEAM CHARGED PARTICLE INSPECTION SYSTEM WITH DYNAMIC CONTROL
#43OPTIMIZATION AND ALIGNMENT OF SHAPED CHARGED PARTICLE BEAMS
#44APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
#45ADAPTIVE DWELL TIME MICROSCOPY
#46OPTIMAL TIME-RELATED AND QUALITY-RELATED CHARGED PARTICLE BEAM SCANNING PARAMETERS
#47Stage Device and Charged Particle Beam Device Using Same
#48LENS WITH A SCANNING SYSTEM, CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF SCANNING A CHARGED PARTICLE BEAM
#49METHOD FOR CREATING A SAMPLE FOR USE IN A CHARGED PARTICLE MICROSCOPE
#50Observation Instrument and Control Method for Sample Stage
#51MULTI-BEAM PARTICLE MICROSCOPE WITH A QUICKLY REPLACEABLE PARTICLE SOURCE, AND METHOD FOR QUICKLY REPLACING A PARTICLE SOURCE IN THE MULTI-BEAM PARTICLE MICROSCOPE
#52LAMELLA PREPARATION FROM THICK HPF SAMPLES
#53SYSTEMS AND METHODS OF ENERGY DISCRIMINATION OF BACKSCATTERED CHARGED-PARTICLES
#54SAMPLE PREPARATION FOR CHARGED PARTICLE BEAM IMAGING
#55METHOD AND SYSTEM FOR 3D RECONSTRUCTION OF WAFER STRUCTURE BY DIAGONAL MILLING
#56HYBRID VACUUM ELECTROSTATIC CHUCK IN DEDICATED CHAMBER FOR HIGH WARPAGE WAFERS
#57HYBRID VACUUM ELECTROSTATIC CHUCK IN VACUUM CHAMBER FOR HIGH WARPAGE WAFERS
#58CREATING AN ELECTRIC FIELD WHEN PROCESSING A LITHOGRAPHY OBJECT
#59Charged Particle Beam Apparatus and Image Production Method
#60CALIBRATION OF DIGITAL ANALOG CONVERTER TO CONTROL DEFLECTORS IN CHARGED PARTICLE BEAM SYSTEM
#61CHARGED PARTICLE APPARATUS
#62SCANNING ELECTRON MICROSCOPY (SEM) BACK-SCATTERING ELECTRON (BSE) FOCUSED TARGET AND METHOD
#63MONITORING OF IMAGING PARAMETERS OF SCANNING ELECTRON MICROSCOPY
#64METHOD FOR OPERATING A PARTICLE BEAM APPARATUS, COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM APPARATUS FOR CARRYING OUT THE METHOD
#65Charged Particle Source, Charged Particle Gun, and Charged Particle Beam Device
#66LENS ARRANGEMENT IN AN ELECTRON MICROSCOPY SYSTEM
#67INHOMOGENEOUS D-SHAPED FOCUSED ION BEAMS
#68CHARGING ARTIFACT MITIGATION VIA SCANNING DIRECTION ROTATION
#69METHOD OF VIRTUAL SECTIONING OF STEM SAMPLE USING COMBINATION OF SE
#70METHOD AND SYSTEMS FOR BALANCING CHARGES ON A SURFACE OF AN OBJECT COMPRISING INTEGRATED CIRCUIT PATTERNS IN A SCANNING ELECTRON MICROSCOPE
#71METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER
#72METHODS AND SYSTEMS FOR EVENT MODULATED ELECTRON MICROSCOPY
#73METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING
#74AUTOMATIC ELECTRON BEAM CALIBRATION ON PERIODIC NANOSTRUCTURES
#75LIQUID SAMPLE HOLDER WITH ELECTROSTATIC MICROSCOPE AND CONTROL METHOD FOR OBSERVING MICROSCOPIC SAMPLES
#76SCANNING DEFLECTOR
#77ABERRATION CORRECTOR FOR SCANNING ELECTRON MICROSCOPE WITH MULTIPLE ELECTRON BEAMS
#78Particle Analysis Apparatus and Method
#79Image Acquisition Method and Scanning Transmission Electron Microscope
#80CHARGED PARTICLE DEVICE, DETECTOR, AND METHODS
#81PICTURE MODE RESOLUTION ENHANCEMENT FOR E-BEAM DETECTOR
#82ELECTRON MICROSCOPE AND IMAGE CAPTURING METHOD THEREOF
#83BEAM ALIGNMENT AND SYNCHRONIZATION IN MICROSCOPY
#84FAST CLOSED-LOOP CONTROL OF MULTI-BEAM CHARGED PARTICLE SYSTEM
#85Transmission Charged Particle Beam Device and Ronchigram Imaging Method
#86ENHANCED EDGE DETECTION USING DETECTOR INCIDENCE LOCATIONS
#87METHOD AND SYSTEM FOR FINE FOCUSING SECONDARY BEAM SPOTS ON DETECTOR FOR MULTI-BEAM INSPECTION APPARATUS
#88CHARGED-PARTICLE BEAM APPARATUS WITH FAST FOCUS CORRECTION AND METHODS THEREOF
#89ELECTRON-OPTICAL APPARATUS AND METHOD OF OBTAINING TOPOGRAPHICAL INFORMATION ABOUT A SAMPLE SURFACE
#90SEMICONDUCTOR ELECTRODE STRUCTURES AND METHODS OF FORMING SAME
#91MODULAR ASSEMBLY
#92Pattern Measurement Method, Measurement System, and Computer-Readable Medium
#93METHOD FOR OBTAINING A TILT SERIES OF IMAGES OF A SAMPLE AT A PLURALITY OF TILT ANGLES
#94METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE, PARTICLE BEAM MICROSCOPE AND COMPUTER PROGRAM PRODUCT
#95Charged Particle Beam Apparatus and Analysis Method
#96SCANNING ELECTRON MICROSCOPE (SEM) IMAGE IMPROVING METHOD
#97Microscope System
#98CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CONTROLLING CHARGED PARTICLE BEAM DEVICE
#99ULTRA-HIGH SENSITIVITY HYBRID INSPECTION WITH FULL WAFER COVERAGE CAPABILITY
#100AIRLESS TRANSFER AND ELECTRICAL TESTING OF SOLID STATE BATTERIES IN SCANNING ELECTRON MICROSCOPES
#101METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE BEAM DEVICE
#102METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE BEAM DEVICE
#103IMAGE GENERATION WITH IMPROVED SCANNING LINES FOR SMART CHARGE DISTRIBUTION
#104SEMICONDUCTOR PATTERN MEASUREMENT METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD INCLUDING THE SAME
#105METHOD AND SYSTEM OF OVERLAY MEASUREMENT USING CHARGED-PARTICLE INSPECTION APPARATUS
#106ELECTRON-OPTICAL STACK, MODULE, ASSESSMENT APPARATUS, METHOD OF MANUFACTURING AN ELECTRON-OPTICAL STACK
#107Aberration Correction Device and Aberration Correction Method
#108CHARGED PARTICLE BEAM DEVICE
#109CHARGED PARTICLE BEAM DEVICE AND SUBSTRATE DETACHING METHOD
#1103D FIDUCIAL FOR PRECISION 3D NAND CHANNEL TILT/SHIFT ANALYSIS
#111Charged Particle Beam Device
#112MULTI-BEAM PARTICLE MICROSCOPE COMPRISING AN ABERRATION CORRECTION UNIT HAVING GEOMETRY-BASED CORRECTION ELECTRODES, AND METHOD FOR ADJUSTING THE ABERRATION CORRECTION, AND COMPUTER PROGRAM PRODUCT
#113MULTI-BEAM IMAGE ACQUISITION APPARATUS AND DRIFT CORRECTION METHOD FOR MULTIPLE SECONDARY ELECTRON BEAMS
#114CHARGED PARTICLE OPTICAL DEVICE, ASSESSMENT APPARATUS, METHOD OF ASSESSING A SAMPLE
#115MACHINE LEARNING METHOD FOR IDENTIFYING THE CRYSTAL PHASE DISTRIBUTION OF POLYCRYSTALLINE THIN FILMS IN NANODEVICES
#116CHARGED PARTICLE BEAM DEVICE
#117MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH REDUCED CHARGING EFFECTS
#118Scanning Transmission Electron Microscope and Aligning Method of Aperture
#119METHOD FOR POSITIONING OBJECTS IN A PARTICLE BEAM MICROSCOPE WITH THE AID OF A FLEXIBLE PARTICLE BEAM BARRIER
#120CHARGED PARTICLE-OPTICAL APPARATUS
#121MEASUREMENT DEVICE AND SCANNING IMAGE ACQUISITION METHOD
#122SYSTEMS AND METHODS OF SEM INSPECTION USING SELECTIVE SCAN APPROACH
#123HIGH RESOLUTION IMAGING APPARATUS AND METHOD
#124ENERGY BAND-PASS FILTERING FOR IMPROVED HIGH LANDING ENERGY BACKSCATTERED CHARGED PARTICLE IMAGE RESOLUTION
#125CHARGED PARTICLE BEAM DEVICE AND METHOD FOR OUTPUTTING IMAGE DATA OF INTEREST
#126CHARGED-PARTICLE BEAM APPARATUS WITH LARGE FIELD-OF-VIEW AND METHODS THEREOF
#127ELECTRON MICROSCOPE DETECTOR AND RELATED METHODS
#128CHARGED PARTICLE BEAM DEVICE
#129Charged Particle Beam System
#130CHARGED PARTICLE BEAM DEVICE, AND MEASUREMENT METHOD
#131APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
#132IMPROVED SCANNING ELECTRON MICROSCOPE AND METHOD OF USING THE SAME
#133E-BEAM OPTIMIZATION FOR OVERLAY MEASUREMENT OF BURIED FEATURES
#134DYNAMIC DETERMINATION OF A SAMPLE INSPECTION RECIPE OF CHARGED PARTICLE BEAM INSPECTION
#135SYSTEM AND METHOD FOR DEFECT INSPECTION USING VOLTAGE CONTRAST IN A CHARGED PARTICLE SYSTEM
#136A MULTI-MODE LOW-VOLTAGE ELECTRON MICROSCOPE
#137SCANNING ELECTRON MICROSCOPE DEVICE
#138MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED BEAM TUBE
#139METHOD FOR VOLTAGE CONTRAST IMAGING WITH A CORPUSCULAR MULTI-BEAM MICROSCOPE, CORPUSCULAR MULTI-BEAM MICROSCOPE FOR VOLTAGE CONTRAST IMAGING AND SEMICONDUCTOR STRUCTURES FOR VOLTAGE CONTRAST IMAGING WITH A CORPUSCULAR MULTI-BEAM MICROSCOPE
#1403D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAGES OBTAINED DURING DELAYERING OF THE SAMPLE
#141SYSTEMS AND METHODS FOR VOLTAGE CONTRAST DEFECT DETECTION
#142LIVE-ASSISTED IMAGE ACQUISITION METHOD AND SYSTEM WITH CHARGED PARTICLE MICROSCOPY
#143Gas Phase Sample Preparation for Cryo-Electron Microscopy
#144VACUUM CHAMBER SYSTEM INCLUDING TEMPERATURE CONDITIONING PLATE
#145OBJECTIVE LENSES, CHARGED PARTICLE MICROSCOPES INCLUDING THE SAME, AND ASSOCIATED METHODS
#146INSPECTION FLOW DETERMINATION DEVICE, CHARGED PARTICLE BEAM DEVICE, AND PROGRAM
#147SCANNING PATTERNS FOR SCIENTIFIC INSTRUMENTS
#148METHOD OF CHARACTERIZING A FAULT IN A SCANNING ELECTRON MICROSCOPE
#149SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY
#150PROBE TIP X-Y LOCATION IDENTIFICATION USING A CHARGED PARTICLE BEAM
#151SEGMENTED ENDPOINTING FOR SAMPLE PREPARATION
#152OBJECTIVE LENS COVER AND CHARGED PARTICLE BEAM APPARATUS INCLUDING THE SAME
#153ELECTROMAGNETIC LENS, SCANNING ELECTRON MICROSCOPE, AND MULTI-ELECTRON BEAM INSPECTION APPARATUS
#154ELECTRONIC DEVICE FOR PREDICTING CHARACTERISTIC OF SEMICONDUCTOR DEVICE AND OPERATING METHOD OF ELECTRONIC DEVICE
#155Method and System for Imaging a Sample
#156METHOD FOR DISTORTION MEASUREMENT AND PARAMETER SETTING FOR CHARGED PARTICLE BEAM IMAGING DEVICES AND CORRESPONDING DEVICES
#157MICROSCOPY IMAGING METHOD AND SYSTEM
#158DEFLECTOR FOR A CHARGED PARTICLE BEAM APPARATUS, DEFLECTING SYSTEM, CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF FABRICATING A DEFLECTOR
#159BEAM MANIPULATION USING CHARGE REGULATOR IN A CHARGED PARTICLE SYSTEM
#160CHARGED PARTICLE BEAM DEVICE ADJUSTMENT METHOD AND CHARGED PARTICLE BEAM DEVICE
#161METHOD FOR OPERATING A PARTICLE BEAM APPARATUS, COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM APPARATUS FOR CARRYING OUT THE METHOD
#162Recipe Creating System, Length Measurement System, and Recipe Creating Method
#163X-RAY IMAGING SYSTEM FOR RADIATION THERAPY
#164METHOD OF CHARACTERIZING A DETECTION PATH OF A CHARGED PARTICLE BEAM AND A CHARGED PARTICLE MIRROR
#165MULTI-BEAM CHARGED PARTICLE MICROSCOPE DESIGN WITH MIRROR FOR FIELD CURVATURE CORRECTION
#166Charged Particle Beam Device
#167METHOD OF OPERATING A CHARGED PARTICLE BEAM APPARATUS, AND CHARGED PARTICLE BEAM APPARATUS
#168METHOD FOR CREATING DETECTION DATA IN ELECTRON BEAM APPLICATION DEVICE, METHOD FOR SYNTHESIZING IMAGE OF OBJECT BEING IRRADIATED, PROGRAM, RECORDING MEDIUM, AND ELECTRON BEAM APPLICATION DEVICE
#169LENS DESIGNS
#170DETECTOR DEVICE, ELECTRON BEAM APPARATUS, AND METHOD FOR INSPECTING AND/OR IMAGING A SAMPLE
#171CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
#172METHOD OF ASSESSING A SAMPLE, APPARATUS FOR ASSESSING A SAMPLE
#173APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
#174MULTIPOLE ELEMENTS AND CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME
#175ABERRATION CORRECTION SYSTEMS AND CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME
#176MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH IMPROVED IMAGING OF SECONDARY ELECTRON BEAMLETS ON A DETECTOR
#177SAMPLE CARRIER AND USES THEREOF
#178METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE, COMPUTER PROGRAM PRODUCT AND MULTI-BEAM PARTICLE MICROSCOPE
#179OPERANDO SCANNING ELECTRON MICROSCOPY PLATFORM AND METHODS OF USING THE SAME
#180CHARGED PARTICLE BEAM INSPECTION SYSTEM AND CHARGED PARTICLE BEAM INSPECTION METHOD
#181METHOD AND SYSTEM FOR CALIBRATION OF DIFFRACTION ANGLES
#182SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACTIVE MATERIALS
#183METHOD OF PROCESSING DATA DERIVED FROM A SAMPLE
#184Optics for In-Situ Scanning Electron Microscope Repair
#185Electron Filter
#186CHARGED PARTICLE-OPTICAL APPARATUS
#187DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
#188NANOFLUIDIC CELL FOR CHARACTERIZATION OF NANO-BUBBLES IN A SIMULATED RESERVOIR
#189MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED ALIGNMENT AND METHOD FOR ALIGNING THE MULTI-BEAM PARTICLE MICROSCOPE, AND COMPUTER PROGRAM PRODUCT
#190FAST AND ACCURATE STRAIN MAPPING USING ELECTRON DIFFRACTION
#191DUAL BEAM SYSTEMS AND METHODS FOR DECOUPLING THE WORKING DISTANCE OF A CHARGED PARTICLE BEAM DEVICE FROM FOCUSED ION BEAM GEOMETRY INDUCED CONSTRAINTS
#192CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF
#193TECHNIQUES FOR IMAGING LOW DUTY CYCLE SIGNALS USING A SCANNING ELECTRON MICROSCOPE
#194SHIELDED DETECTOR FOR CHARGED PARTICLE MICROSCOPY
#195Detection of Probabilistic Process Windows
#196SYSTEM AND METHOD FOR DYNAMIC ABERRATION CORRECTION
#197Charged Particle Beam Device, and Beam Deflection Method in Charged Particle Beam Device
#198METHOD TO MORE PRECISELY CALIBRATE THE MECHANICAL TILT AND ROTATION ANGLES OF AN SEM COLUMN
#199CHARGED PARTICLE OPTICAL DEVICE AND METHOD
#200SEM NAVIGATION BY FOCUSED ION BEAM SYSTEM WITH CRYO COOLING SAMPLE STAGE
#201Charged Particle Beam Device
#202CHARGED PARTICLE BEAM APPARATUS
#203OBJECTIVE LENS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING SAME
#204CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS FOR IMAGING
#205SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATION IN CHARGED PARTICLE BEAM SYSTEM
#206JIG AND SAMPLE PROCESSING METHOD
#207Charged Particle Beam Apparatus and Camera Image Displaying Method
#208SENSOR SUBSTRATE, APPARATUS, AND METHOD
#209FIB AND SEM RESOLUTION ENHANCEMENT USING ASYMMETRIC PROBE DECONVOLUTION
#210APPARATUS AND METHOD FOR ANALYSING A SAMPLE BY MEANS OF ELECTRICALLY CHARGED PARTICLES
#211CHARGED-PARTICLE BEAM APPARATUS FOR VOLTAGE-CONTRAST INSPECTION AND METHODS THEREOF
#212SCANNING ELECTRON MICROSCOPY-BASED SAMPLE ANALYSIS
#213CHARGED PARTICLE BEAM MICROSCOPE IMAGE PROCESSING SYSTEM AND CONTROL METHOD THEREOF
#214APPARATUS AND METHOD FOR MANIPULATING A MICROSCOPIC SAMPLE
#215COMPUTER, PROGRAM, AND CHARGED PARTICLE BEAM PROCESSING SYSTEM
#216Correction Method and Correction Device
#217METHOD FOR DETERMINING A DISTORTION-CORRECTED POSITION OF A FEATURE IN AN IMAGE IMAGED WITH A MULTI-BEAM CHARGED PARTICLE MICROSCOPE, CORRESPONDING COMPUTER PROGRAM PRODUCT AND MULTI-BEAM CHARGED PARTICLE MICROSCOPE
#218CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION
#219METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE
#220CHARGED PARTICLE BEAM DEVICE
#221MAGNETIC LENSES, CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME, AND ASSOCIATED METHODS
#222SYSTEMS AND METHODS FOR DEFECT DETECTION AND DEFECT LOCATION IDENTIFICATION IN A CHARGED PARTICLE SYSTEM
#223METHOD FOR REDUCING MEASUREMENT ERRORS IN CRITICAL PATTERN DIMENSIONS OF POLYCRYSTAL LAYERS
#224ELECTRON BEAM POSITION DETECTION AND REPOSITIONING
#225OVERLAY MEASUREMENT USING BALANCED CAPACITY TARGETS
#226DISCHARGING A REGION OF A SAMPLE
#227CHARGED PARTICLE BEAM DEVICE
#228SUBSTRATE INSPECTION METHOD
#229CHARGED PARTICLE BEAM DEVICES AND MEMBRANE ASSEMBLIES USEFUL THEREIN
#230ELECTRON BEAM APPLICATION DEVICE AND METHOD FOR CREATING DETECTION DATA IN ELECTRON BEAM APPLICATION DEVICE
#231Low-voltage electron beam control of conductive state at a complex-oxide interface
#232TECHNIQUES FOR DETECTING PROBE LANDING IN INTEGRATED CIRCUIT TESTING SYSTEMS
#233METHOD TO INVESTIGATE A SEMICONDUCTOR SAMPLE LAYER BY LAYER AND INVESTIGATION DEVICE TO PERFORM SUCH METHOD
#234SCANNING ELECTRON MICROSCOPY-BASED TOMOGRAPHY OF SPECIMENS
#235FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR
#236ORIENTATION TOOL FOR ELECTRON BACKSCATTER DIFFRACTION
#237COMPENSATION RASTER SCANNING
#238Entropy based image processing for focused ion beam delayer-edge slices detection
#239SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAGE CONTRAST DEFECT SIGNAL
#240MULTI-BEAM SYSTEM AND MULTI-BEAM GENERATING UNIT WITH REDUCED SENSITIVITY TO DRIFT AND DAMAGES
#241CHARGED PARTICLE BEAM DEVICE
#242High resolution imaging apparatus and method
#243Charged Particle Beam System
#244METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM IMAGING DEVICE
#245MULTIPLE CHARGED PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATION, METHOD FOR OPERATING A MULTI-BEAM CHARGED PARTICLE MICROSCOPE SYSTEM WITH A MIRROR MODE OF OPERATION AND ASSOCIATED COMPUTER PROGRAM PRODUCT
#246INSPECTION APPARATUS AND METHOD
#247STAGE DEVICE
#248ELECTRON BEAM PROBING TECHNIQUES AND RELATED STRUCTURES
#249Methods and systems for event modulated electron microscopy
#250SOFTWARE, METHODS, AND SYSTEMS FOR DETERMINATION OF A LOCAL FOCUS POINT
#251BEAM MANIPULATOR IN CHARGED PARTICLE-BEAM APPARATUS
#252FOCUSED ION BEAM DEVICE
#253ANALYSIS METHOD, COMPUTER-READABLE MEDIUM, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
#254METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGED PARTICLE INSPECTION SYSTEM, METHOD OF PROCESSING A SAMPLE, ASSESSMENT METHOD
#255CHARGED-PARTICLE OPTICAL APPARATUS AND PROJECTION METHOD
#256IMPROVED NAVIGATION FOR ELECTRON MICROSCOPY
#257CHARGED PARTICLE DEVICE, CHARGED PARTICLE ASSESSMENT APPARATUS, MEASURING METHOD, AND MONITORING METHOD
#258FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS
#259SYSTEMS AND METHODS OF CLAMP COMPENSATION
#260CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
#261CRENELLATED SAMPLE HOLDER AND SPUTTER TARGET FOR SAMPLE PREPARATION IN CRYO ELECTRON MICROSCOPY APPLICATIONS
#262CHARGED-PARTICLE APPARATUS, MULTI-DEVICE APPARATUS, METHOD OF USING CHARGED-PARTICLE APPARATUS AND CONTROL METHOD
#263Microscope Stage Fixture for Horizontal Rotation
#264Charged Particle Beam Device
#265METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE
#266METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE
#267SYSTEM AND METHOD FOR ADJUSTING BEAM CURRENT USING A FEEDBACK LOOP IN CHARGED PARTICLE SYSTEMS
#268SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMENTS AND THEIR USE FOR PROCESS MONITORING AND CONTROL
#269PARTICLE BEAM MICROSCOPE
#270SEMICONDUCTOR STRUCTURE, INSPECTION METHOD AND INSPECTION SYSTEM
#271ELECTRON MICROSCOPE FOR EXAMINING A SPECIMEN
#272ALIGNING A DISTORTED IMAGE
#273METHOD FOR IMAGING WITH A SCANNING ELECTRON MICROSCOPE AND SCANNING ELECTRON MICROSCOPE FOR CARRYING OUT THE METHOD
#274CHARGED PARTICLE OPTICS, CHARGED PARTICLE BEAM APPARATUS, AND METHOD FOR SCANNING A CHARGED PARTICLE BEAM
#275MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTI-ELECTRON BEAM IMAGE ACQUISITION METHOD
#276MACHINE LEARNING BASED YIELD PREDICTION
#277DEEP LEARNING TECHNIQUES FOR FAST ANOMALY DETECTION IN EXPERIMENTAL DATA
#278Device For Interfacing A Sample Transfer Device To An Analytic Or Sample Preparation Device And A Container For Transporting A Sample Under Environmentally Controlled Conditions
#279METHOD OF FORMING A MULTIPOLE DEVICE, METHOD OF INFLUENCING AN ELECTRON BEAM, AND MULTIPOLE DEVICE
#280CHARGED PARTICLE BEAM DEVICE AND METHOD FOR DEMAGNETIZING MAGNETIC LENS
#281INSULATING STRUCTURE, ELECTROSTATIC LENS, AND CHARGED PARTICLE BEAM DEVICE
#282HIGH RESOLUTION, LOW ENERGY ELECTRON MICROSCOPE FOR PROVIDING TOPOGRAPHY INFORMATION AND METHOD OF MASK INSPECTION
#283TEM Orientation Mapping via Dark-Field Vector Images
#284Systems and methods for performing sample lift-out for highly reactive materials
#285METHOD FOR DETERMINING A POSITION OF AN OBJECT IN A BEAM APPARATUS, COMPUTER PROGRAM PRODUCT AND BEAM APPARATUS FOR CARRYING OUT THE METHOD
#286Transmission charged particle microscope with an electron energy loss spectroscopy detector
#287Method of Dispositioning and Control of a Semiconductor Manufacturing Process
#288METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND COMPUTER PROGRAM PRODUCT
#289Stage Device, Charged Particle Beam Device, and Vacuum Device
#290DETECTING DEFECTS IN ARRAY REGIONS ON SPECIMENS
#291CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD
#292SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE
#293SUPPORT STRUCTURE OF INVERTED LAMELLA FOR TALL ROI
#294FILLING EMPTY STRUCTURES BY DEPOSITION UNDER SEM - BALANCING PARAMETERS BY GAS FLOW CONTROL
#295SAMPLE HOLDER AND IMPEDANCE MICROSCOPE
#296CHARGED PARTICLE BEAM DEVICE, AND SAMPLE OBSERVATION METHOD EMPLOYING SAME
#297FOCUSED ION BEAM SYSTEM
#298Electron Microscope
#299High-Voltage Insulating Structure, Charged Particle Gun, and Charged Particle Beam Device
#300SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME