ClassID:

205251

H01J37/28 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Recent Application in this class:
#1
20260155329
2026-06-04

PARTICLE-OPTICAL ARRANGEMENT, FOR EXAMPLE MULTI-BEAM PARTICLE MICROSCOPE, WITH A MAGNET ARRANGEMENT FOR SEPARATING A PRIMARY AND A SECONDARY PARTICLE-OPTICAL BEAM PATH WITH IMPROVED PERFORMANCE

#2
20260154808
2026-06-04

METHOD FOR OBTAINING MEASUREMENTS OF SEMICONDUCTOR STRUCTURES FROM A SINGLE WEDGE CUT OF AN INSPECTION VOLUME

#3
20260148935
2026-05-28

CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD

#4
20260148929
2026-05-28

COLLATION SYSTEM

#5
20260148926
2026-05-28

DISTRIBUTIVE IMAGING ALLOWING SAMPLE RELAXATION

#6
20260148924
2026-05-28

Charged Particle Beam Apparatus and Control Method for Charged Particle Beam Apparatus

#7
20260148923
2026-05-28

MULTI-BEAM PARTICLE BEAM SYSTEM HAVING AN ELECTROSTATIC BOOSTER LENS, METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM SYSTEM, AND ASSOCIATED COMPUTER PROGRAM PRODUCT

#8
20260142118
2026-05-21

ULTRA FAST PULSER FOR LOW ENERGY ELECTRON BEAMS

#9
20260135061
2026-05-14

Charged Particle Beam Device and Method for Estimating Sample Characteristics

#10
20260135060
2026-05-14

BROAD ION BEAM DELAYERING APPARATUS WITH INTEGRATED IMAGING

#11
20260128255
2026-05-07

PARTICLE BEAM APPARATUS WITH MOVEABLE OBJECT STAGE

#12
20260128251
2026-05-07

PREVENTING ESD IN PRT SEM DISCHARGES

#13
20260112573
2026-04-23

METHOD AND APPARATUS FOR CHARGE COMPENSATION DURING 3D TOMOGRAPHY

#14
20260112572
2026-04-23

MULTI-BEAM CHARGED PARTICLE MICROSCOPE FOR INSPECTION WITH IMPROVED IMAGE CONTRAST

#15
20260112571
2026-04-23

METHODS AND SYSTEMS FOR EVENT MODULATED ELECTRON MICROSCOPY

#16
20260112570
2026-04-23

METHOD FOR MONITORING ELECTRON BEAM OF MEASURING APPARATUS AND MONITORING APPARATUS USING THE SAME

#17
20260112569
2026-04-23

PRECISE AUTOMATED CONTROL OF LAMELLA LIFT-OUT

#18
20260106107
2026-04-16

Scanning Electron Microscope and Gradient Map Generation Method

#19
20260106106
2026-04-16

Analysis System and Particle Analysis Method

#20
20260100328
2026-04-09

AUTOMATED CHEMICAL SWITCHING FOR MATERIAL DELAYERING

#21
20260100327
2026-04-09

PHOTO-ELECTRICAL EVOLUTION DEFECT INSPECTION

#22
20260100324
2026-04-09

CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD

#23
20260094784
2026-04-02

FOIL LENS CORRECTORS, CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME, AND ASSOCIATED METHODS

#24
20260088249
2026-03-26

CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD

#25
20260088247
2026-03-26

SCANNING ELECTRON MICROSCOPE WITH ENHANCED THREE-DIMENSIONAL IMAGING

#26
20260081105
2026-03-19

MULTIPLE PARTICLE BEAM MICROSCOPE AND ASSOCIATED METHOD WITH FAST AUTOFOCUS AROUND AN ADJUSTABLE WORKING DISTANCE

#27
20260081097
2026-03-19

METHOD FOR THE AUTOMATED MECHANICAL ADJUSTMENT OF A PARTICLE BEAM COLUMN, ASSOCIATED COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM COLUMN

#28
20260081095
2026-03-19

SYSTEMS AND METHODS FOR FOCUSING CHARGED-PARTICLE BEAMS

#29
20260075965
2026-03-12

SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME

#30
20260074143
2026-03-12

COLUMN, PROCESSING ARRANGEMENT AND METHOD

#31
20260074141
2026-03-12

EXAMINING, ANALYZING AND/OR PROCESSING AN OBJECT USING AN OBJECT RECEIVING CONTAINER

#32
20260074140
2026-03-12

MULTI-BEAM CHARGED PARTICLE MICROSCOPE FOR INSPECTION WITH INCREASED THROUGHPUT

#33
20260074139
2026-03-12

MAGNETIC MAGNIFICATION CONTROL FOR ELECTRON MICROSCOPES

#34
20260066216
2026-03-05

ELECTRON MICROSCOPE AND CONTROL METHOD THEREOF

#35
20260066209
2026-03-05

IN-COLUMN PARTICLE FILTER

#36
20260058091
2026-02-26

SYSTEM, DEVICE AND METHOD OF CONTROLLING EMISSION CURRENT OF ELECTRON MICROSCOPE

#37
20260045444
2026-02-12

Charged Particle Beam Device

#38
20260045442
2026-02-12

SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR IN A SINGLE-BEAM OR MULTI-BEAM APPARATUS

#39
20260045441
2026-02-12

CHARGED PARTICLE LENS

#40
20260045437
2026-02-12

FIELD CURVATURE CORRECTOR FOR USE IN MULTI-ELECTRON-BEAM OPTICAL SYSTEM

#41
20260031301
2026-01-29

PATTERN INSPECTION SYSTEM AND METHOD OF PATTERN INSPECTION USING THE SAME

#42
20260024721
2026-01-22

HIGH THROUGHPUT MULTI-BEAM CHARGED PARTICLE INSPECTION SYSTEM WITH DYNAMIC CONTROL

#43
20260018377
2026-01-15

OPTIMIZATION AND ALIGNMENT OF SHAPED CHARGED PARTICLE BEAMS

#44
20260018376
2026-01-15

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

#45
20260018375
2026-01-15

ADAPTIVE DWELL TIME MICROSCOPY

#46
20260018374
2026-01-15

OPTIMAL TIME-RELATED AND QUALITY-RELATED CHARGED PARTICLE BEAM SCANNING PARAMETERS

#47
20260018372
2026-01-15

Stage Device and Charged Particle Beam Device Using Same

#48
20260018369
2026-01-15

LENS WITH A SCANNING SYSTEM, CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF SCANNING A CHARGED PARTICLE BEAM

#49
20260011528
2026-01-08

METHOD FOR CREATING A SAMPLE FOR USE IN A CHARGED PARTICLE MICROSCOPE

#50
20260011527
2026-01-08

Observation Instrument and Control Method for Sample Stage

#51
20260011524
2026-01-08

MULTI-BEAM PARTICLE MICROSCOPE WITH A QUICKLY REPLACEABLE PARTICLE SOURCE, AND METHOD FOR QUICKLY REPLACING A PARTICLE SOURCE IN THE MULTI-BEAM PARTICLE MICROSCOPE

#52
20260004992
2026-01-01

LAMELLA PREPARATION FROM THICK HPF SAMPLES

#53
20260004991
2026-01-01

SYSTEMS AND METHODS OF ENERGY DISCRIMINATION OF BACKSCATTERED CHARGED-PARTICLES

#54
20250391709
2025-12-25

SAMPLE PREPARATION FOR CHARGED PARTICLE BEAM IMAGING

#55
20250391707
2025-12-25

METHOD AND SYSTEM FOR 3D RECONSTRUCTION OF WAFER STRUCTURE BY DIAGONAL MILLING

#56
20250391693
2025-12-25

HYBRID VACUUM ELECTROSTATIC CHUCK IN DEDICATED CHAMBER FOR HIGH WARPAGE WAFERS

#57
20250391692
2025-12-25

HYBRID VACUUM ELECTROSTATIC CHUCK IN VACUUM CHAMBER FOR HIGH WARPAGE WAFERS

#58
20250391632
2025-12-25

CREATING AN ELECTRIC FIELD WHEN PROCESSING A LITHOGRAPHY OBJECT

#59
20250391630
2025-12-25

Charged Particle Beam Apparatus and Image Production Method

#60
20250391628
2025-12-25

CALIBRATION OF DIGITAL ANALOG CONVERTER TO CONTROL DEFLECTORS IN CHARGED PARTICLE BEAM SYSTEM

#61
20250385072
2025-12-18

CHARGED PARTICLE APPARATUS

#62
20250385070
2025-12-18

SCANNING ELECTRON MICROSCOPY (SEM) BACK-SCATTERING ELECTRON (BSE) FOCUSED TARGET AND METHOD

#63
20250385069
2025-12-18

MONITORING OF IMAGING PARAMETERS OF SCANNING ELECTRON MICROSCOPY

#64
20250385067
2025-12-18

METHOD FOR OPERATING A PARTICLE BEAM APPARATUS, COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM APPARATUS FOR CARRYING OUT THE METHOD

#65
20250385065
2025-12-18

Charged Particle Source, Charged Particle Gun, and Charged Particle Beam Device

#66
20250379024
2025-12-11

LENS ARRANGEMENT IN AN ELECTRON MICROSCOPY SYSTEM

#67
20250372345
2025-12-04

INHOMOGENEOUS D-SHAPED FOCUSED ION BEAMS

#68
20250372344
2025-12-04

CHARGING ARTIFACT MITIGATION VIA SCANNING DIRECTION ROTATION

#69
20250372341
2025-12-04

METHOD OF VIRTUAL SECTIONING OF STEM SAMPLE USING COMBINATION OF SE

#70
20250364206
2025-11-27

METHOD AND SYSTEMS FOR BALANCING CHARGES ON A SURFACE OF AN OBJECT COMPRISING INTEGRATED CIRCUIT PATTERNS IN A SCANNING ELECTRON MICROSCOPE

#71
20250357165
2025-11-20

METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER

#72
20250357077
2025-11-20

METHODS AND SYSTEMS FOR EVENT MODULATED ELECTRON MICROSCOPY

#73
20250357076
2025-11-20

METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING

#74
20250357075
2025-11-20

AUTOMATIC ELECTRON BEAM CALIBRATION ON PERIODIC NANOSTRUCTURES

#75
20250357072
2025-11-20

LIQUID SAMPLE HOLDER WITH ELECTROSTATIC MICROSCOPE AND CONTROL METHOD FOR OBSERVING MICROSCOPIC SAMPLES

#76
20250357071
2025-11-20

SCANNING DEFLECTOR

#77
20250357067
2025-11-20

ABERRATION CORRECTOR FOR SCANNING ELECTRON MICROSCOPE WITH MULTIPLE ELECTRON BEAMS

#78
20250354946
2025-11-20

Particle Analysis Apparatus and Method

#79
20250354945
2025-11-20

Image Acquisition Method and Scanning Transmission Electron Microscope

#80
20250349504
2025-11-13

CHARGED PARTICLE DEVICE, DETECTOR, AND METHODS

#81
20250349502
2025-11-13

PICTURE MODE RESOLUTION ENHANCEMENT FOR E-BEAM DETECTOR

#82
20250349493
2025-11-13

ELECTRON MICROSCOPE AND IMAGE CAPTURING METHOD THEREOF

#83
20250349491
2025-11-13

BEAM ALIGNMENT AND SYNCHRONIZATION IN MICROSCOPY

#84
20250343021
2025-11-06

FAST CLOSED-LOOP CONTROL OF MULTI-BEAM CHARGED PARTICLE SYSTEM

#85
20250336641
2025-10-30

Transmission Charged Particle Beam Device and Ronchigram Imaging Method

#86
20250336639
2025-10-30

ENHANCED EDGE DETECTION USING DETECTOR INCIDENCE LOCATIONS

#87
20250336636
2025-10-30

METHOD AND SYSTEM FOR FINE FOCUSING SECONDARY BEAM SPOTS ON DETECTOR FOR MULTI-BEAM INSPECTION APPARATUS

#88
20250336635
2025-10-30

CHARGED-PARTICLE BEAM APPARATUS WITH FAST FOCUS CORRECTION AND METHODS THEREOF

#89
20250329511
2025-10-23

ELECTRON-OPTICAL APPARATUS AND METHOD OF OBTAINING TOPOGRAPHICAL INFORMATION ABOUT A SAMPLE SURFACE

#90
20250329510
2025-10-23

SEMICONDUCTOR ELECTRODE STRUCTURES AND METHODS OF FORMING SAME

#91
20250329509
2025-10-23

MODULAR ASSEMBLY

#92
20250327663
2025-10-23

Pattern Measurement Method, Measurement System, and Computer-Readable Medium

#93
20250323012
2025-10-16

METHOD FOR OBTAINING A TILT SERIES OF IMAGES OF A SAMPLE AT A PLURALITY OF TILT ANGLES

#94
20250316446
2025-10-09

METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE, PARTICLE BEAM MICROSCOPE AND COMPUTER PROGRAM PRODUCT

#95
20250316445
2025-10-09

Charged Particle Beam Apparatus and Analysis Method

#96
20250316443
2025-10-09

SCANNING ELECTRON MICROSCOPE (SEM) IMAGE IMPROVING METHOD

#97
20250316442
2025-10-09

Microscope System

#98
20250316441
2025-10-09

CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CONTROLLING CHARGED PARTICLE BEAM DEVICE

#99
20250316437
2025-10-09

ULTRA-HIGH SENSITIVITY HYBRID INSPECTION WITH FULL WAFER COVERAGE CAPABILITY

#100
20250308837
2025-10-02

AIRLESS TRANSFER AND ELECTRICAL TESTING OF SOLID STATE BATTERIES IN SCANNING ELECTRON MICROSCOPES

#101
20250308836
2025-10-02

METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE BEAM DEVICE

#102
20250308835
2025-10-02

METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE BEAM DEVICE

#103
20250299915
2025-09-25

IMAGE GENERATION WITH IMPROVED SCANNING LINES FOR SMART CHARGE DISTRIBUTION

#104
20250299914
2025-09-25

SEMICONDUCTOR PATTERN MEASUREMENT METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD INCLUDING THE SAME

#105
20250299913
2025-09-25

METHOD AND SYSTEM OF OVERLAY MEASUREMENT USING CHARGED-PARTICLE INSPECTION APPARATUS

#106
20250299904
2025-09-25

ELECTRON-OPTICAL STACK, MODULE, ASSESSMENT APPARATUS, METHOD OF MANUFACTURING AN ELECTRON-OPTICAL STACK

#107
20250299903
2025-09-25

Aberration Correction Device and Aberration Correction Method

#108
20250292993
2025-09-18

CHARGED PARTICLE BEAM DEVICE

#109
20250292989
2025-09-18

CHARGED PARTICLE BEAM DEVICE AND SUBSTRATE DETACHING METHOD

#110
20250292433
2025-09-18

3D FIDUCIAL FOR PRECISION 3D NAND CHANNEL TILT/SHIFT ANALYSIS

#111
20250285833
2025-09-11

Charged Particle Beam Device

#112
20250285831
2025-09-11

MULTI-BEAM PARTICLE MICROSCOPE COMPRISING AN ABERRATION CORRECTION UNIT HAVING GEOMETRY-BASED CORRECTION ELECTRODES, AND METHOD FOR ADJUSTING THE ABERRATION CORRECTION, AND COMPUTER PROGRAM PRODUCT

#113
20250285830
2025-09-11

MULTI-BEAM IMAGE ACQUISITION APPARATUS AND DRIFT CORRECTION METHOD FOR MULTIPLE SECONDARY ELECTRON BEAMS

#114
20250285828
2025-09-11

CHARGED PARTICLE OPTICAL DEVICE, ASSESSMENT APPARATUS, METHOD OF ASSESSING A SAMPLE

#115
20250279258
2025-09-04

MACHINE LEARNING METHOD FOR IDENTIFYING THE CRYSTAL PHASE DISTRIBUTION OF POLYCRYSTALLINE THIN FILMS IN NANODEVICES

#116
20250273422
2025-08-28

CHARGED PARTICLE BEAM DEVICE

#117
20250266241
2025-08-21

MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH REDUCED CHARGING EFFECTS

#118
20250266236
2025-08-21

Scanning Transmission Electron Microscope and Aligning Method of Aperture

#119
20250266234
2025-08-21

METHOD FOR POSITIONING OBJECTS IN A PARTICLE BEAM MICROSCOPE WITH THE AID OF A FLEXIBLE PARTICLE BEAM BARRIER

#120
20250253123
2025-08-07

CHARGED PARTICLE-OPTICAL APPARATUS

#121
20250253122
2025-08-07

MEASUREMENT DEVICE AND SCANNING IMAGE ACQUISITION METHOD

#122
20250253121
2025-08-07

SYSTEMS AND METHODS OF SEM INSPECTION USING SELECTIVE SCAN APPROACH

#123
20250246420
2025-07-31

HIGH RESOLUTION IMAGING APPARATUS AND METHOD

#124
20250246399
2025-07-31

ENERGY BAND-PASS FILTERING FOR IMPROVED HIGH LANDING ENERGY BACKSCATTERED CHARGED PARTICLE IMAGE RESOLUTION

#125
20250246398
2025-07-31

CHARGED PARTICLE BEAM DEVICE AND METHOD FOR OUTPUTTING IMAGE DATA OF INTEREST

#126
20250246397
2025-07-31

CHARGED-PARTICLE BEAM APPARATUS WITH LARGE FIELD-OF-VIEW AND METHODS THEREOF

#127
20250239431
2025-07-24

ELECTRON MICROSCOPE DETECTOR AND RELATED METHODS

#128
20250239430
2025-07-24

CHARGED PARTICLE BEAM DEVICE

#129
20250232947
2025-07-17

Charged Particle Beam System

#130
20250232946
2025-07-17

CHARGED PARTICLE BEAM DEVICE, AND MEASUREMENT METHOD

#131
20250232945
2025-07-17

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

#132
20250231130
2025-07-17

IMPROVED SCANNING ELECTRON MICROSCOPE AND METHOD OF USING THE SAME

#133
20250231129
2025-07-17

E-BEAM OPTIMIZATION FOR OVERLAY MEASUREMENT OF BURIED FEATURES

#134
20250226175
2025-07-10

DYNAMIC DETERMINATION OF A SAMPLE INSPECTION RECIPE OF CHARGED PARTICLE BEAM INSPECTION

#135
20250226174
2025-07-10

SYSTEM AND METHOD FOR DEFECT INSPECTION USING VOLTAGE CONTRAST IN A CHARGED PARTICLE SYSTEM

#136
20250226173
2025-07-10

A MULTI-MODE LOW-VOLTAGE ELECTRON MICROSCOPE

#137
20250218721
2025-07-03

SCANNING ELECTRON MICROSCOPE DEVICE

#138
20250218719
2025-07-03

MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED BEAM TUBE

#139
20250210302
2025-06-26

METHOD FOR VOLTAGE CONTRAST IMAGING WITH A CORPUSCULAR MULTI-BEAM MICROSCOPE, CORPUSCULAR MULTI-BEAM MICROSCOPE FOR VOLTAGE CONTRAST IMAGING AND SEMICONDUCTOR STRUCTURES FOR VOLTAGE CONTRAST IMAGING WITH A CORPUSCULAR MULTI-BEAM MICROSCOPE

#140
20250210301
2025-06-26

3D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAGES OBTAINED DURING DELAYERING OF THE SAMPLE

#141
20250208074
2025-06-26

SYSTEMS AND METHODS FOR VOLTAGE CONTRAST DEFECT DETECTION

#142
20250201512
2025-06-19

LIVE-ASSISTED IMAGE ACQUISITION METHOD AND SYSTEM WITH CHARGED PARTICLE MICROSCOPY

#143
20250198891
2025-06-19

Gas Phase Sample Preparation for Cryo-Electron Microscopy

#144
20250191875
2025-06-12

VACUUM CHAMBER SYSTEM INCLUDING TEMPERATURE CONDITIONING PLATE

#145
20250191873
2025-06-12

OBJECTIVE LENSES, CHARGED PARTICLE MICROSCOPES INCLUDING THE SAME, AND ASSOCIATED METHODS

#146
20250189462
2025-06-12

INSPECTION FLOW DETERMINATION DEVICE, CHARGED PARTICLE BEAM DEVICE, AND PROGRAM

#147
20250183002
2025-06-05

SCANNING PATTERNS FOR SCIENTIFIC INSTRUMENTS

#148
20250183000
2025-06-05

METHOD OF CHARACTERIZING A FAULT IN A SCANNING ELECTRON MICROSCOPE

#149
20250182999
2025-06-05

SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY

#150
20250180600
2025-06-05

PROBE TIP X-Y LOCATION IDENTIFICATION USING A CHARGED PARTICLE BEAM

#151
20250174428
2025-05-29

SEGMENTED ENDPOINTING FOR SAMPLE PREPARATION

#152
20250174426
2025-05-29

OBJECTIVE LENS COVER AND CHARGED PARTICLE BEAM APPARATUS INCLUDING THE SAME

#153
20250174425
2025-05-29

ELECTROMAGNETIC LENS, SCANNING ELECTRON MICROSCOPE, AND MULTI-ELECTRON BEAM INSPECTION APPARATUS

#154
20250167051
2025-05-22

ELECTRONIC DEVICE FOR PREDICTING CHARACTERISTIC OF SEMICONDUCTOR DEVICE AND OPERATING METHOD OF ELECTRONIC DEVICE

#155
20250166963
2025-05-22

Method and System for Imaging a Sample

#156
20250166962
2025-05-22

METHOD FOR DISTORTION MEASUREMENT AND PARAMETER SETTING FOR CHARGED PARTICLE BEAM IMAGING DEVICES AND CORRESPONDING DEVICES

#157
20250166961
2025-05-22

MICROSCOPY IMAGING METHOD AND SYSTEM

#158
20250166958
2025-05-22

DEFLECTOR FOR A CHARGED PARTICLE BEAM APPARATUS, DEFLECTING SYSTEM, CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF FABRICATING A DEFLECTOR

#159
20250166955
2025-05-22

BEAM MANIPULATION USING CHARGE REGULATOR IN A CHARGED PARTICLE SYSTEM

#160
20250157785
2025-05-15

CHARGED PARTICLE BEAM DEVICE ADJUSTMENT METHOD AND CHARGED PARTICLE BEAM DEVICE

#161
20250157782
2025-05-15

METHOD FOR OPERATING A PARTICLE BEAM APPARATUS, COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM APPARATUS FOR CARRYING OUT THE METHOD

#162
20250140516
2025-05-01

Recipe Creating System, Length Measurement System, and Recipe Creating Method

#163
20250140515
2025-05-01

X-RAY IMAGING SYSTEM FOR RADIATION THERAPY

#164
20250140511
2025-05-01

METHOD OF CHARACTERIZING A DETECTION PATH OF A CHARGED PARTICLE BEAM AND A CHARGED PARTICLE MIRROR

#165
20250132124
2025-04-24

MULTI-BEAM CHARGED PARTICLE MICROSCOPE DESIGN WITH MIRROR FOR FIELD CURVATURE CORRECTION

#166
20250132123
2025-04-24

Charged Particle Beam Device

#167
20250132121
2025-04-24

METHOD OF OPERATING A CHARGED PARTICLE BEAM APPARATUS, AND CHARGED PARTICLE BEAM APPARATUS

#168
20250132117
2025-04-24

METHOD FOR CREATING DETECTION DATA IN ELECTRON BEAM APPLICATION DEVICE, METHOD FOR SYNTHESIZING IMAGE OF OBJECT BEING IRRADIATED, PROGRAM, RECORDING MEDIUM, AND ELECTRON BEAM APPLICATION DEVICE

#169
20250125120
2025-04-17

LENS DESIGNS

#170
20250125118
2025-04-17

DETECTOR DEVICE, ELECTRON BEAM APPARATUS, AND METHOD FOR INSPECTING AND/OR IMAGING A SAMPLE

#171
20250118528
2025-04-10

CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD

#172
20250116587
2025-04-10

METHOD OF ASSESSING A SAMPLE, APPARATUS FOR ASSESSING A SAMPLE

#173
20250112023
2025-04-03

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

#174
20250112019
2025-04-03

MULTIPOLE ELEMENTS AND CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME

#175
20250112018
2025-04-03

ABERRATION CORRECTION SYSTEMS AND CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME

#176
20250104966
2025-03-27

MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH IMPROVED IMAGING OF SECONDARY ELECTRON BEAMLETS ON A DETECTOR

#177
20250104962
2025-03-27

SAMPLE CARRIER AND USES THEREOF

#178
20250104961
2025-03-27

METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE, COMPUTER PROGRAM PRODUCT AND MULTI-BEAM PARTICLE MICROSCOPE

#179
20250104960
2025-03-27

OPERANDO SCANNING ELECTRON MICROSCOPY PLATFORM AND METHODS OF USING THE SAME

#180
20250095956
2025-03-20

CHARGED PARTICLE BEAM INSPECTION SYSTEM AND CHARGED PARTICLE BEAM INSPECTION METHOD

#181
20250095955
2025-03-20

METHOD AND SYSTEM FOR CALIBRATION OF DIFFRACTION ANGLES

#182
20250095953
2025-03-20

SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACTIVE MATERIALS

#183
20250095133
2025-03-20

METHOD OF PROCESSING DATA DERIVED FROM A SAMPLE

#184
20250087450
2025-03-13

Optics for In-Situ Scanning Electron Microscope Repair

#185
20250087449
2025-03-13

Electron Filter

#186
20250087445
2025-03-13

CHARGED PARTICLE-OPTICAL APPARATUS

#187
20250087444
2025-03-13

DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD

#188
20250087443
2025-03-13

NANOFLUIDIC CELL FOR CHARACTERIZATION OF NANO-BUBBLES IN A SIMULATED RESERVOIR

#189
20250079111
2025-03-06

MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED ALIGNMENT AND METHOD FOR ALIGNING THE MULTI-BEAM PARTICLE MICROSCOPE, AND COMPUTER PROGRAM PRODUCT

#190
20250076038
2025-03-06

FAST AND ACCURATE STRAIN MAPPING USING ELECTRON DIFFRACTION

#191
20250069958
2025-02-27

DUAL BEAM SYSTEMS AND METHODS FOR DECOUPLING THE WORKING DISTANCE OF A CHARGED PARTICLE BEAM DEVICE FROM FOCUSED ION BEAM GEOMETRY INDUCED CONSTRAINTS

#192
20250069848
2025-02-27

CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF

#193
20250069845
2025-02-27

TECHNIQUES FOR IMAGING LOW DUTY CYCLE SIGNALS USING A SCANNING ELECTRON MICROSCOPE

#194
20250069844
2025-02-27

SHIELDED DETECTOR FOR CHARGED PARTICLE MICROSCOPY

#195
20250069843
2025-02-27

Detection of Probabilistic Process Windows

#196
20250062098
2025-02-20

SYSTEM AND METHOD FOR DYNAMIC ABERRATION CORRECTION

#197
20250062096
2025-02-20

Charged Particle Beam Device, and Beam Deflection Method in Charged Particle Beam Device

#198
20250054726
2025-02-13

METHOD TO MORE PRECISELY CALIBRATE THE MECHANICAL TILT AND ROTATION ANGLES OF AN SEM COLUMN

#199
20250046570
2025-02-06

CHARGED PARTICLE OPTICAL DEVICE AND METHOD

#200
20250046568
2025-02-06

SEM NAVIGATION BY FOCUSED ION BEAM SYSTEM WITH CRYO COOLING SAMPLE STAGE

#201
20250046565
2025-02-06

Charged Particle Beam Device

#202
20250046564
2025-02-06

CHARGED PARTICLE BEAM APPARATUS

#203
20250046562
2025-02-06

OBJECTIVE LENS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING SAME

#204
20250037967
2025-01-30

CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS FOR IMAGING

#205
20250037966
2025-01-30

SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATION IN CHARGED PARTICLE BEAM SYSTEM

#206
20250037964
2025-01-30

JIG AND SAMPLE PROCESSING METHOD

#207
20250029812
2025-01-23

Charged Particle Beam Apparatus and Camera Image Displaying Method

#208
20250029811
2025-01-23

SENSOR SUBSTRATE, APPARATUS, AND METHOD

#209
20250029809
2025-01-23

FIB AND SEM RESOLUTION ENHANCEMENT USING ASYMMETRIC PROBE DECONVOLUTION

#210
20250029807
2025-01-23

APPARATUS AND METHOD FOR ANALYSING A SAMPLE BY MEANS OF ELECTRICALLY CHARGED PARTICLES

#211
20250027990
2025-01-23

CHARGED-PARTICLE BEAM APPARATUS FOR VOLTAGE-CONTRAST INSPECTION AND METHODS THEREOF

#212
20250022681
2025-01-16

SCANNING ELECTRON MICROSCOPY-BASED SAMPLE ANALYSIS

#213
20250022679
2025-01-16

CHARGED PARTICLE BEAM MICROSCOPE IMAGE PROCESSING SYSTEM AND CONTROL METHOD THEREOF

#214
20250022677
2025-01-16

APPARATUS AND METHOD FOR MANIPULATING A MICROSCOPIC SAMPLE

#215
20250014859
2025-01-09

COMPUTER, PROGRAM, AND CHARGED PARTICLE BEAM PROCESSING SYSTEM

#216
20250014858
2025-01-09

Correction Method and Correction Device

#217
20250006459
2025-01-02

METHOD FOR DETERMINING A DISTORTION-CORRECTED POSITION OF A FEATURE IN AN IMAGE IMAGED WITH A MULTI-BEAM CHARGED PARTICLE MICROSCOPE, CORRESPONDING COMPUTER PROGRAM PRODUCT AND MULTI-BEAM CHARGED PARTICLE MICROSCOPE

#218
20250006456
2025-01-02

CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION

#219
20250006455
2025-01-02

METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE

#220
20250006454
2025-01-02

CHARGED PARTICLE BEAM DEVICE

#221
20250006453
2025-01-02

MAGNETIC LENSES, CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME, AND ASSOCIATED METHODS

#222
20250005739
2025-01-02

SYSTEMS AND METHODS FOR DEFECT DETECTION AND DEFECT LOCATION IDENTIFICATION IN A CHARGED PARTICLE SYSTEM

#223
20240429107
2024-12-26

METHOD FOR REDUCING MEASUREMENT ERRORS IN CRITICAL PATTERN DIMENSIONS OF POLYCRYSTAL LAYERS

#224
20240429017
2024-12-26

ELECTRON BEAM POSITION DETECTION AND REPOSITIONING

#225
20240427253
2024-12-26

OVERLAY MEASUREMENT USING BALANCED CAPACITY TARGETS

#226
20240420917
2024-12-19

DISCHARGING A REGION OF A SAMPLE

#227
20240420915
2024-12-19

CHARGED PARTICLE BEAM DEVICE

#228
20240412943
2024-12-12

SUBSTRATE INSPECTION METHOD

#229
20240412940
2024-12-12

CHARGED PARTICLE BEAM DEVICES AND MEMBRANE ASSEMBLIES USEFUL THEREIN

#230
20240412939
2024-12-12

ELECTRON BEAM APPLICATION DEVICE AND METHOD FOR CREATING DETECTION DATA IN ELECTRON BEAM APPLICATION DEVICE

#231
20240412889
2024-12-12

Low-voltage electron beam control of conductive state at a complex-oxide interface

#232
20240410937
2024-12-12

TECHNIQUES FOR DETECTING PROBE LANDING IN INTEGRATED CIRCUIT TESTING SYSTEMS

#233
20240404786
2024-12-05

METHOD TO INVESTIGATE A SEMICONDUCTOR SAMPLE LAYER BY LAYER AND INVESTIGATION DEVICE TO PERFORM SUCH METHOD

#234
20240404784
2024-12-05

SCANNING ELECTRON MICROSCOPY-BASED TOMOGRAPHY OF SPECIMENS

#235
20240395499
2024-11-28

FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR

#236
20240395498
2024-11-28

ORIENTATION TOOL FOR ELECTRON BACKSCATTER DIFFRACTION

#237
20240395492
2024-11-28

COMPENSATION RASTER SCANNING

#238
20240379327
2024-11-14

Entropy based image processing for focused ion beam delayer-edge slices detection

#239
20240379325
2024-11-14

SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAGE CONTRAST DEFECT SIGNAL

#240
20240379322
2024-11-14

MULTI-BEAM SYSTEM AND MULTI-BEAM GENERATING UNIT WITH REDUCED SENSITIVITY TO DRIFT AND DAMAGES

#241
20240379318
2024-11-14

CHARGED PARTICLE BEAM DEVICE

#242
20240371622
2024-11-07

High resolution imaging apparatus and method

#243
20240371601
2024-11-07

Charged Particle Beam System

#244
20240371600
2024-11-07

METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM IMAGING DEVICE

#245
20240371596
2024-11-07

MULTIPLE CHARGED PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATION, METHOD FOR OPERATING A MULTI-BEAM CHARGED PARTICLE MICROSCOPE SYSTEM WITH A MIRROR MODE OF OPERATION AND ASSOCIATED COMPUTER PROGRAM PRODUCT

#246
20240369356
2024-11-07

INSPECTION APPARATUS AND METHOD

#247
20240363305
2024-10-31

STAGE DEVICE

#248
20240355685
2024-10-24

ELECTRON BEAM PROBING TECHNIQUES AND RELATED STRUCTURES

#249
20240355581
2024-10-24

Methods and systems for event modulated electron microscopy

#250
20240355578
2024-10-24

SOFTWARE, METHODS, AND SYSTEMS FOR DETERMINATION OF A LOCAL FOCUS POINT

#251
20240355575
2024-10-24

BEAM MANIPULATOR IN CHARGED PARTICLE-BEAM APPARATUS

#252
20240355574
2024-10-24

FOCUSED ION BEAM DEVICE

#253
20240347315
2024-10-17

ANALYSIS METHOD, COMPUTER-READABLE MEDIUM, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

#254
20240339295
2024-10-10

METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGED PARTICLE INSPECTION SYSTEM, METHOD OF PROCESSING A SAMPLE, ASSESSMENT METHOD

#255
20240339294
2024-10-10

CHARGED-PARTICLE OPTICAL APPARATUS AND PROJECTION METHOD

#256
20240339293
2024-10-10

IMPROVED NAVIGATION FOR ELECTRON MICROSCOPY

#257
20240339292
2024-10-10

CHARGED PARTICLE DEVICE, CHARGED PARTICLE ASSESSMENT APPARATUS, MEASURING METHOD, AND MONITORING METHOD

#258
20240339289
2024-10-10

FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS

#259
20240339286
2024-10-10

SYSTEMS AND METHODS OF CLAMP COMPENSATION

#260
20240331971
2024-10-03

CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD

#261
20240331969
2024-10-03

CRENELLATED SAMPLE HOLDER AND SPUTTER TARGET FOR SAMPLE PREPARATION IN CRYO ELECTRON MICROSCOPY APPLICATIONS

#262
20240331968
2024-10-03

CHARGED-PARTICLE APPARATUS, MULTI-DEVICE APPARATUS, METHOD OF USING CHARGED-PARTICLE APPARATUS AND CONTROL METHOD

#263
20240321546
2024-09-26

Microscope Stage Fixture for Horizontal Rotation

#264
20240321543
2024-09-26

Charged Particle Beam Device

#265
20240312760
2024-09-19

METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE

#266
20240312759
2024-09-19

METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE

#267
20240312758
2024-09-19

SYSTEM AND METHOD FOR ADJUSTING BEAM CURRENT USING A FEEDBACK LOOP IN CHARGED PARTICLE SYSTEMS

#268
20240312757
2024-09-19

SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMENTS AND THEIR USE FOR PROCESS MONITORING AND CONTROL

#269
20240304412
2024-09-12

PARTICLE BEAM MICROSCOPE

#270
20240304411
2024-09-12

SEMICONDUCTOR STRUCTURE, INSPECTION METHOD AND INSPECTION SYSTEM

#271
20240302304
2024-09-12

ELECTRON MICROSCOPE FOR EXAMINING A SPECIMEN

#272
20240297013
2024-09-05

ALIGNING A DISTORTED IMAGE

#273
20240290574
2024-08-29

METHOD FOR IMAGING WITH A SCANNING ELECTRON MICROSCOPE AND SCANNING ELECTRON MICROSCOPE FOR CARRYING OUT THE METHOD

#274
20240290571
2024-08-29

CHARGED PARTICLE OPTICS, CHARGED PARTICLE BEAM APPARATUS, AND METHOD FOR SCANNING A CHARGED PARTICLE BEAM

#275
20240282547
2024-08-22

MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTI-ELECTRON BEAM IMAGE ACQUISITION METHOD

#276
20240281958
2024-08-22

MACHINE LEARNING BASED YIELD PREDICTION

#277
20240280522
2024-08-22

DEEP LEARNING TECHNIQUES FOR FAST ANOMALY DETECTION IN EXPERIMENTAL DATA

#278
20240274399
2024-08-15

Device For Interfacing A Sample Transfer Device To An Analytic Or Sample Preparation Device And A Container For Transporting A Sample Under Environmentally Controlled Conditions

#279
20240274396
2024-08-15

METHOD OF FORMING A MULTIPOLE DEVICE, METHOD OF INFLUENCING AN ELECTRON BEAM, AND MULTIPOLE DEVICE

#280
20240274395
2024-08-15

CHARGED PARTICLE BEAM DEVICE AND METHOD FOR DEMAGNETIZING MAGNETIC LENS

#281
20240274394
2024-08-15

INSULATING STRUCTURE, ELECTROSTATIC LENS, AND CHARGED PARTICLE BEAM DEVICE

#282
20240272099
2024-08-15

HIGH RESOLUTION, LOW ENERGY ELECTRON MICROSCOPE FOR PROVIDING TOPOGRAPHY INFORMATION AND METHOD OF MASK INSPECTION

#283
20240272097
2024-08-15

TEM Orientation Mapping via Dark-Field Vector Images

#284
20240266142
2024-08-08

Systems and methods for performing sample lift-out for highly reactive materials

#285
20240258068
2024-08-01

METHOD FOR DETERMINING A POSITION OF AN OBJECT IN A BEAM APPARATUS, COMPUTER PROGRAM PRODUCT AND BEAM APPARATUS FOR CARRYING OUT THE METHOD

#286
20240258067
2024-08-01

Transmission charged particle microscope with an electron energy loss spectroscopy detector

#287
20240258066
2024-08-01

Method of Dispositioning and Control of a Semiconductor Manufacturing Process

#288
20240258065
2024-08-01

METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND COMPUTER PROGRAM PRODUCT

#289
20240258063
2024-08-01

Stage Device, Charged Particle Beam Device, and Vacuum Device

#290
20240255448
2024-08-01

DETECTING DEFECTS IN ARRAY REGIONS ON SPECIMENS

#291
20240249912
2024-07-25

CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD

#292
20240249911
2024-07-25

SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE

#293
20240249910
2024-07-25

SUPPORT STRUCTURE OF INVERTED LAMELLA FOR TALL ROI

#294
20240249909
2024-07-25

FILLING EMPTY STRUCTURES BY DEPOSITION UNDER SEM - BALANCING PARAMETERS BY GAS FLOW CONTROL

#295
20240242927
2024-07-18

SAMPLE HOLDER AND IMPEDANCE MICROSCOPE

#296
20240242925
2024-07-18

CHARGED PARTICLE BEAM DEVICE, AND SAMPLE OBSERVATION METHOD EMPLOYING SAME

#297
20240242924
2024-07-18

FOCUSED ION BEAM SYSTEM

#298
20240242923
2024-07-18

Electron Microscope

#299
20240242917
2024-07-18

High-Voltage Insulating Structure, Charged Particle Gun, and Charged Particle Beam Device

#300
20240234620
2024-07-11

SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME