ClassID:

205261

H01J37/301 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Electron-beam or ion-beam tubes for localised treatment of objects Arrangements enabling beams to pass between regions of different pressure

Recent Application in this class:
#1
20220037114
2022-02-03

Particle yield via beam-line pressure control

#2
20190202000
2019-07-04

Electron beam 3D printing machine

#3
20190193192
2019-06-27

Enhanced electron beam generation

#4
20180190471
2018-07-05

Plasma driven particle propagation apparatus and pumping method

#5
20140361166
2014-12-11

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

#6
20140061497
2014-03-06

Charged particle lithography system with intermediate chamber

#7
20120293780
2012-11-22

Charged particle lithography system with intermediate chamber

#8
20120241608
2012-09-27

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

#9
20110293847
2011-12-01

Particle-Beam Induced Processing Using Liquid Reactants

#10
20110155897
2011-06-30

Gas-cluster-jet generator and gas-cluster ion-beam apparatus utilizing an improved gas-cluster-jet generator

#11
20110031394
2011-02-10

High pressure charged particle beam system

#12
20100140470
2010-06-10

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

#13
20100119698
2010-05-13

Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof

#14
20080099674
2008-05-01

Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof

#15
20070176102
2007-08-02

Particle optical apparatus with a predetermined final vacuum pressure

#16
20070145303
2007-06-28

Protecting Aperture for Charged Particle Emitter

#17
20060231590
2006-10-19

Glow discharge drilling apparatus and glow discharge drilling method