205332 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Gas-filled discharge tubes; Constructional details of the reactor; Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings Means for reducing recombination coefficient
PLASMA PROCESSING APPARATUS WITH TUNABLE ELECTRICAL CHARACTERISTIC
#2COATINGS ON INNER SURFACES OF PARTICLE CONTAINMENT CHAMBERS
#3MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE COATING WITH INTERMITTENT RESTORATION PLASMA
#4UNIFORMITY CONTROL FOR PLASMA PROCESSING USING WALL RECOMBINATION
#5Plasma Processing Apparatus with Tunable Electrical Characteristic
#6Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma
#7MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE COATING WITH INTERMITTENT RESTORATION PLASMA
#8Apparatus and method for the reduction of impurities in films
#9Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma
#10VACUUM PROCESSING APPARATUS