H01K13/02 - CPC Classification Index

ClassID:

206973 ⎘

H01K13/02 - CPC Classification

Classification description:

Heating arrangements

Sub-classes:

H01K13/04 » using electric discharge 1
H01K13/06 » using induction heating; using high frequency field 1

Recent Application in this class:

20220005677

Control method for multi-zone active-matrix temperature control in plasma processing apparatus

20210075116

Multi-band slot antenna