ClassID:

215435

H01S3/034 - CPC Classification

Classification description:

Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range; Constructional details of gas laser discharge tubes Optical devices within, or forming part of, the tube, e.g. windows, mirrors

Sub-classes:
Recent Application in this class:
#1
20260106425
2026-04-16

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#2
20260100553
2026-04-09

LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

#3
20260066606
2026-03-05

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#4
20250364777
2025-11-27

DISCHARGE EXCITATION LASER APPARATUS, DISCHARGE EXCITATION LASER APPARATUS CONTROL METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#5
20250364768
2025-11-27

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#6
20250357716
2025-11-20

GAS LASER APPARATUS, LASER GAS TEMPERATURE CONTROL METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#7
20250357715
2025-11-20

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#8
20250309602
2025-10-02

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#9
20250300418
2025-09-25

DISCHARGE CHAMBER FOR GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

#10
20250300416
2025-09-25

Device For Fixing An Optical Element

#11
20250286337
2025-09-11

CONDUIT SYSTEM, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF

#12
20250246864
2025-07-31

LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

#13
20250210926
2025-06-26

METHOD FOR MANUFACTURING OPTICAL MODULE, METHOD FOR MANUFACTURING GAS LASER DEVICE, AND MANUFACTURING JIG FOR OPTICAL MODULE

#14
20250174957
2025-05-29

GASEOUS LASER SYSTEMS WITH EDGE-DEFINING ELEMENT AND RELATED TECHNIQUES

#15
20250155819
2025-05-15

PROFILE DISPLAY DEVICE, LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#16
20250105576
2025-03-27

OPTICAL PULSE STRETCHER, LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#17
20250096515
2025-03-20

CHAMBER FOR GAS LASER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#18
20240405497
2024-12-05

CHAMBER OF GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

#19
20240305057
2024-09-12

SOLID-STATE LASERS AND ASSEMBLY METHOD THEREFOR

#20
20240146011
2024-05-02

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#21
20240136787
2024-04-25

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

#22
20240097394
2024-03-21

Light emitting sealed body and light source device

#23
20230378712
2023-11-23

GAS LASER AND WASTE HEAT RECOVERY SYSTEM

#24
20230318251
2023-10-05

Gaseous laser systems with edge-defining element and related techniques

#25
20230223734
2023-07-13

SYSTEMS AND METHODS FOR CONTROLLING A CENTER WAVELENGTH

#26
20230196538
2023-06-22

Laser system, learning device, and inference device

#27
20230187896
2023-06-15

Line narrowing module, gas laser apparatus, and method for manufacturing electronic devices

#28
20230187892
2023-06-15

Line narrowing gas laser device and electronic device manufacturing method

#29
20230163551
2023-05-25

CONDUIT SYSTEM, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF

#30
20230108886
2023-04-06

Gas laser apparatus and electronic device manufacturing method

#31
20230009554
2023-01-12

METROLOGY FOR IMPROVING DUV LASER ALIGNMENT

#32
20220278495
2022-09-01

Solid-state lasers and assembly method therefor

#33
20220200226
2022-06-23

Light emitting unit and light source device

#34
20220200225
2022-06-23

Light emitting sealed body and light source device

#35
20220094129
2022-03-24

Gas laser device

#36
20220045471
2022-02-10

Laser device

#37
20210336407
2021-10-28

Line narrowing module, gas laser apparatus, and electronic device manufacturing method

#38
20210336404
2021-10-28

Laser chamber apparatus, gas laser apparatus, and method for manufacturing electronic device

#39
20210336403
2021-10-28

GAS LASER APPARATUS, LASER BEAM EMITTING METHOD OF GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#40
20210336402
2021-10-28

Laser system

#41
20210194202
2021-06-24

METROLOGY FOR A BODY OF A GAS DISCHARGE STAGE

#42
20210057864
2021-02-25

ENHANCED WAVEGUIDE SURFACE IN GAS LASERS

#43
20210036477
2021-02-04

Light source apparatus

#44
20210006031
2021-01-07

Folded slab laser

#45
20210006028
2021-01-07

Laser oscillator unit and laser machining device

#46
20200403369
2020-12-24

Laser chamber, method for manufacturing seal member, and method for manufacturing electronic device

#47
20200303889
2020-09-24

Excimer laser with uniform beam

#48
20200251359
2020-08-06

Laser radiation system

#49
20200203910
2020-06-25

Laser device

#50
20200136336
2020-04-30

Capacitor cooling structure and laser apparatus

#51
20200106236
2020-04-02

Laser-heated cavity system

#52
20200067257
2020-02-27

Laser apparatus and method for manufacturing optical element

#53
20200028313
2020-01-23

Arrangement of expanding optical flows for efficient laser extraction

#54
20190379173
2019-12-12

Protection mechanism for light source

#55
20190363508
2019-11-28

Laser system and extreme ultraviolet light generation system

#56
20190356104
2019-11-21

GAS LASER DEVICE

#57
20190326722
2019-10-24

Laser apparatus and extreme ultraviolet light generation system

#58
20190312403
2019-10-10

Folded slab laser

#59
20190157831
2019-05-23

Polarisation and mode selection technique for a laser

#60
20190020168
2019-01-17

Multilayer electrode assembly

#61
20180351322
2018-12-06

Laser apparatus and extreme ultraviolet light generation system

#62
20180323568
2018-11-08

Line narrowed laser apparatus

#63
20180277374
2018-09-27

Optical device and excimer laser annealing equipment

#64
20180269643
2018-09-20

Excimer laser generator and excimer laser annealing equipment

#65
20180254600
2018-09-06

Narrowband laser apparatus and spectral linewidth measuring apparatus

#66
20180226764
2018-08-09

Laser device and internal combustion engine

#67
20180217298
2018-08-02

OPTICAL MEMBER, CHAMBER, AND LIGHT SOURCE DEVICE

#68
20180212397
2018-07-26

EXCIMER LASER SYSTEMS WITH A RING CAVITY STRUCTURE

#69
20180138651
2018-05-17

High-efficiency high-power ring laser amplifier

#70
20180034229
2018-02-01

Laser oscillator

#71
20180034228
2018-02-01

Laser apparatus and extreme ultraviolet light generation apparatus

#72
20170338620
2017-11-23

LASER DEVICE

#73
20170317464
2017-11-02

Laser apparatus and extreme ultraviolet light generation system

#74
20170296272
2017-10-19

Window for surgical laser

#75
20170222389
2017-08-03

Gas laser

#76
20170059815
2017-03-02

Laser device

#77
20160322776
2016-11-03

CO2-N2-HE GAS DYNAMIC LASER

#78
20160316551
2016-10-27

Laser device and extreme ultraviolet light generation system

#79
20160233640
2016-08-11

Flat-folded ceramic slab lasers

#80
20160156150
2016-06-02

Laser apparatus and extreme ultraviolet light generation system

#81
20160134075
2016-05-12

Gas laser device

#82
20160094004
2016-03-31

Laser oscillator for improving beam quality

#83
20150333469
2015-11-19

Gas circulation type laser oscillator

#84
20150303640
2015-10-22

Laser damage resistant optical components for alkali vapor laser cells

#85
20150263476
2015-09-17

Laser oscillator provided with discharge tube and laser processing machine

#86
20150255947
2015-09-10

DIFFRACTION GRATING, LASER APPARATUS, AND MANUFACTURING METHOD FOR DIFFRACTION GRATING

#87
20150255946
2015-09-10

Diffraction grating, laser apparatus, and manufacturing method for diffraction grating

#88
20150244140
2015-08-27

Air-cooled gas lasers with heat transfer resonator optics and associated systems and methods

#89
20150244139
2015-08-27

Air-cooled gas lasers and associated systems and methods

#90
20150244138
2015-08-27

Gas laser oscillator controlling adjusted level of laser power supply

#91
20150244137
2015-08-27

Air-cooled gas lasers with heat transfer assembly and associated systems and methods

#92
20150194781
2015-07-09

Laser apparatus

#93
20150188277
2015-07-02

Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier

#94
20150188274
2015-07-02

Method of controlling laser apparatus and laser apparatus

#95
20150180192
2015-06-25

Laser apparatus and method of controlling laser apparatus

#96
20150171591
2015-06-18

Oxygen laser oscillator

#97
20150098072
2015-04-09

Beam guidance system for the focusing guidance of radiation from a high-power laser light source toward a target and LPP X-ray source comprising a laser light source and such a beam guidance system

#98
20140341248
2014-11-20

Amplifier, laser apparatus, and extreme ultraviolet light generation system

#99
20130322483
2013-12-05

Gas discharge chamber

#100
20130272327
2013-10-17

Device for amplifying a laser beam

#101
20130235893
2013-09-12

TRANSMISSIVE OPTICAL DEVICE, LASER CHAMBER, AMPLIFIER STAGE LASER DEVICE, OSCILLATION STAGE LASER DEVICE AND LASER APPARATUS

#102
20130223468
2013-08-29

EXCIMER LASER DEVICE

#103
20130114637
2013-05-09

METHOD AND DEVICE FOR OBTAINING AN OPTICAL DISCHARGE IN A GAS

#104
20120128022
2012-05-24

Ceramic gas laser having an integrated beam shaping waveguide

#105
20110164647
2011-07-07

EXCIMER LASER DEVICE

#106
20110158281
2011-06-30

Gas discharge chamber

#107
20110013661
2011-01-20

Laser crystal device

#108
20100215066
2010-08-26

System, method, and apparatus to provide laser beams of two or more wavelengths

#109
20100098124
2010-04-22

Method and apparatus for laser control in a two chamber gas discharge laser

#110
20100098123
2010-04-22

Method and apparatus for laser control in a two chamber gas discharge laser

#111
20100098122
2010-04-22

Method and apparatus for laser control in a two chamber gas discharge laser

#112
20100078577
2010-04-01

Apparatus and method of adjusting a laser light source for an EUV source device

#113
20090261276
2009-10-22

Method and apparatus for excimer curing

#114
20080144671
2008-06-19

Laser system

#115
20080037609
2008-02-14

Excimer laser device

#116
20080013589
2008-01-17

Window assembly for a gas discharge laser chamber

#117
20070297467
2007-12-27

Bandwidth control device

#118
20070280308
2007-12-06

High power excimer laser with a pulse stretcher

#119
20070263692
2007-11-15

Gas slab laser

#120
20070253452
2007-11-01

Tunable laser apparatus and methods

#121
20070230520
2007-10-04

System, method, and apparatus to provide laser beams of two or more wavelengths

#122
20070113777
2007-05-24

CaF2 single crystals with increased laser resistance, method for their preparation and use thereof

#123
20070003208
2007-01-04

Extended lifetime excimer laser optics

#124
20070002919
2007-01-04

Gas discharge laser line narrowing module

#125
20070002908
2007-01-04

DEVICE FOR AUTOMATICALLY SELECTING A BEAM MODE IN LASER PROCESSING MACHINE

#126
20050152425
2005-07-14

Multi-path laser system

#127
17336230
2022-10-18

Thin film brewster coupling device

#128
14699763
2016-05-24

Laser processing method and laser processing system

#129
13733966
2014-05-13

Self starting mode-locked laser oscillator