215435 ⎘
Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range; Constructional details of gas laser discharge tubes Optical devices within, or forming part of, the tube, e.g. windows, mirrors
Sub-classes:GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
#2LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
#3GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
#4DISCHARGE EXCITATION LASER APPARATUS, DISCHARGE EXCITATION LASER APPARATUS CONTROL METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#5GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
#6GAS LASER APPARATUS, LASER GAS TEMPERATURE CONTROL METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#7GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
#8GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
#9DISCHARGE CHAMBER FOR GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
#10Device For Fixing An Optical Element
#11CONDUIT SYSTEM, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF
#12LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
#13METHOD FOR MANUFACTURING OPTICAL MODULE, METHOD FOR MANUFACTURING GAS LASER DEVICE, AND MANUFACTURING JIG FOR OPTICAL MODULE
#14GASEOUS LASER SYSTEMS WITH EDGE-DEFINING ELEMENT AND RELATED TECHNIQUES
#15PROFILE DISPLAY DEVICE, LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#16OPTICAL PULSE STRETCHER, LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#17CHAMBER FOR GAS LASER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#18CHAMBER OF GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
#19SOLID-STATE LASERS AND ASSEMBLY METHOD THEREFOR
#20GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
#21GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
#22Light emitting sealed body and light source device
#23GAS LASER AND WASTE HEAT RECOVERY SYSTEM
#24Gaseous laser systems with edge-defining element and related techniques
#25SYSTEMS AND METHODS FOR CONTROLLING A CENTER WAVELENGTH
#26Laser system, learning device, and inference device
#27Line narrowing module, gas laser apparatus, and method for manufacturing electronic devices
#28Line narrowing gas laser device and electronic device manufacturing method
#29CONDUIT SYSTEM, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF
#30Gas laser apparatus and electronic device manufacturing method
#31METROLOGY FOR IMPROVING DUV LASER ALIGNMENT
#32Solid-state lasers and assembly method therefor
#33Light emitting unit and light source device
#34Light emitting sealed body and light source device
#35Gas laser device
#36Laser device
#37Line narrowing module, gas laser apparatus, and electronic device manufacturing method
#38Laser chamber apparatus, gas laser apparatus, and method for manufacturing electronic device
#39GAS LASER APPARATUS, LASER BEAM EMITTING METHOD OF GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#40Laser system
#41METROLOGY FOR A BODY OF A GAS DISCHARGE STAGE
#42ENHANCED WAVEGUIDE SURFACE IN GAS LASERS
#43Light source apparatus
#44Folded slab laser
#45Laser oscillator unit and laser machining device
#46Laser chamber, method for manufacturing seal member, and method for manufacturing electronic device
#47Excimer laser with uniform beam
#48Laser radiation system
#49Laser device
#50Capacitor cooling structure and laser apparatus
#51Laser-heated cavity system
#52Laser apparatus and method for manufacturing optical element
#53Arrangement of expanding optical flows for efficient laser extraction
#54Protection mechanism for light source
#55Laser system and extreme ultraviolet light generation system
#56GAS LASER DEVICE
#57Laser apparatus and extreme ultraviolet light generation system
#58Folded slab laser
#59Polarisation and mode selection technique for a laser
#60Multilayer electrode assembly
#61Laser apparatus and extreme ultraviolet light generation system
#62Line narrowed laser apparatus
#63Optical device and excimer laser annealing equipment
#64Excimer laser generator and excimer laser annealing equipment
#65Narrowband laser apparatus and spectral linewidth measuring apparatus
#66Laser device and internal combustion engine
#67OPTICAL MEMBER, CHAMBER, AND LIGHT SOURCE DEVICE
#68EXCIMER LASER SYSTEMS WITH A RING CAVITY STRUCTURE
#69High-efficiency high-power ring laser amplifier
#70Laser oscillator
#71Laser apparatus and extreme ultraviolet light generation apparatus
#72LASER DEVICE
#73Laser apparatus and extreme ultraviolet light generation system
#74Window for surgical laser
#75Gas laser
#76Laser device
#77CO2-N2-HE GAS DYNAMIC LASER
#78Laser device and extreme ultraviolet light generation system
#79Flat-folded ceramic slab lasers
#80Laser apparatus and extreme ultraviolet light generation system
#81Gas laser device
#82Laser oscillator for improving beam quality
#83Gas circulation type laser oscillator
#84Laser damage resistant optical components for alkali vapor laser cells
#85Laser oscillator provided with discharge tube and laser processing machine
#86DIFFRACTION GRATING, LASER APPARATUS, AND MANUFACTURING METHOD FOR DIFFRACTION GRATING
#87Diffraction grating, laser apparatus, and manufacturing method for diffraction grating
#88Air-cooled gas lasers with heat transfer resonator optics and associated systems and methods
#89Air-cooled gas lasers and associated systems and methods
#90Gas laser oscillator controlling adjusted level of laser power supply
#91Air-cooled gas lasers with heat transfer assembly and associated systems and methods
#92Laser apparatus
#93Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier
#94Method of controlling laser apparatus and laser apparatus
#95Laser apparatus and method of controlling laser apparatus
#96Oxygen laser oscillator
#97Beam guidance system for the focusing guidance of radiation from a high-power laser light source toward a target and LPP X-ray source comprising a laser light source and such a beam guidance system
#98Amplifier, laser apparatus, and extreme ultraviolet light generation system
#99Gas discharge chamber
#100Device for amplifying a laser beam
#101TRANSMISSIVE OPTICAL DEVICE, LASER CHAMBER, AMPLIFIER STAGE LASER DEVICE, OSCILLATION STAGE LASER DEVICE AND LASER APPARATUS
#102EXCIMER LASER DEVICE
#103METHOD AND DEVICE FOR OBTAINING AN OPTICAL DISCHARGE IN A GAS
#104Ceramic gas laser having an integrated beam shaping waveguide
#105EXCIMER LASER DEVICE
#106Gas discharge chamber
#107Laser crystal device
#108System, method, and apparatus to provide laser beams of two or more wavelengths
#109Method and apparatus for laser control in a two chamber gas discharge laser
#110Method and apparatus for laser control in a two chamber gas discharge laser
#111Method and apparatus for laser control in a two chamber gas discharge laser
#112Apparatus and method of adjusting a laser light source for an EUV source device
#113Method and apparatus for excimer curing
#114Laser system
#115Excimer laser device
#116Window assembly for a gas discharge laser chamber
#117Bandwidth control device
#118High power excimer laser with a pulse stretcher
#119Gas slab laser
#120Tunable laser apparatus and methods
#121System, method, and apparatus to provide laser beams of two or more wavelengths
#122CaF2 single crystals with increased laser resistance, method for their preparation and use thereof
#123Extended lifetime excimer laser optics
#124Gas discharge laser line narrowing module
#125DEVICE FOR AUTOMATICALLY SELECTING A BEAM MODE IN LASER PROCESSING MACHINE
#126Multi-path laser system
#127Thin film brewster coupling device
#128Laser processing method and laser processing system
#129Self starting mode-locked laser oscillator