215438 ⎘
Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range; Constructional details of gas laser discharge tubes Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
LASER CHAMBER AND ELECTRONIC DEVICE MANUFACTURING METHOD
#2LASER CHAMBER, DISCHARGE-EXCITATION-TYPE GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#3CHAMBER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#4LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
#5LASER CHAMBER, DISCHARGE-EXCITATION-TYPE GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#6Systems, Methods, And Devices For Gas Pressure Profile Control
#7REDUCING ENERGY CONSUMPTION OF A GAS DISCHARGE CHAMBER BLOWER
#8LASER CHAMBER, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#9GAS LASER APPARATUS, LASER GAS TEMPERATURE CONTROL METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#10LASER CHAMBER DEVICE, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#11CHAMBER APPARATUS FOR LASER, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#12DISCHARGE CHAMBER FOR GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
#13CHAMBER APPARATUS FOR LASER, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#14CONDUIT SYSTEM, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF
#15LASER CHAMBER, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#16GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
#17CHAMBER OF GAS LASER APPARATUS, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#18GAS PURGE SYSTEMS FOR A LASER SOURCE
#19LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
#20SHUTTER APPARATUS HAVING PORTS TO CONTROL ENERGY BEAM AND GAS TRANSFER BETWEEN ZONES
#21GAS CONTROL APPARATUS FOR GAS DISCHARGE STAGE
#22Dustproof structure for laser output window of laser, and laser
#23GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
#24GAS LASER AMPLIFIER, GAS LASER APPARATUS, EUV LIGHT GENERATION APPARATUS, AND EUV EXPOSURE APPARATUS
#25CO2 BEAM SOURCE COMPRISING A CATALYST
#26REDUCING ENERGY CONSUMPTION OF A GAS DISCHARGE CHAMBER BLOWER
#27BEARING APPARATUS AND LASER APPARATUS COMPRISING BEARING APPARATUS
#28CHAMBER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#29Laser system, learning device, and inference device
#30CONDUIT SYSTEM, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF
#31Reducing fretting corrosion in a gas discharge chamber support device
#32UNDERCUT ELECTRODES FOR A GAS DISCHARGE LASER CHAMBER
#33DIRECTED GAS PURGE TO REDUCE DUSTING OF EXCIMER DISCHARGE CHAMBER WINDOWS
#34LASER SYSTEM WITH OPTICAL SYSTEM FOR THE SPECTRAL BROADENING OF PULSED LASER RADIATION AND METHOD FOR THE SPECTRAL BROADENING OF PULSED LASER RADIATION
#35Gas purge systems for a laser source
#36OPTICAL SYSTEM FOR INCREASING THE CONTRAST OF PULSED LASER RADIATION, LASER SYSTEM AND METHOD FOR INCREASING THE CONTRAST OF PULSED LASER RADIATION
#37CONTROLLING A SPECTRAL PROPERTY OF AN OUTPUT LIGHT BEAM PRODUCED BY AN OPTICAL SOURCE
#38LINE NARROWING GAS LASER DEVICE, CONTROL METHOD THEREOF, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#39Laser device and electronic device manufacturing method
#40GAS CONTROL METHOD AND RELATED USES
#41CONTROL SYSTEM FOR A PLURALITY OF DEEP ULTRAVIOLET OPTICAL OSCILLATORS
#42LASER DEVICE AND LEAK CHECK METHOD FOR LASER DEVICE
#43Excimer laser system with long service intervals
#44Laser chamber and electronic device manufacturing method
#45GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#46GAS LASER APPARATUS, LASER BEAM EMITTING METHOD OF GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#47Gas monitoring system
#48GAS LASER DEVICE
#49ENHANCED WAVEGUIDE SURFACE IN GAS LASERS
#50Vapor as a protectant and lifetime extender in optical systems
#51Spectral feature selection and pulse timing control of a pulsed light beam
#52Laser gas regenerating apparatus and electronic device manufacturing method
#53Controlling pressure in a cavity of a light source
#54Gas management system
#55Gas management system
#56Fluorine detection in a gas discharge light source
#57Online calibration for repetition rate dependent performance variables
#58Excimer laser apparatus and electronic-device manufacturing method
#59Excimer laser apparatus and method for manufacturing electronic device
#60Gas laser apparatus
#61Capacitor cooling structure and laser apparatus
#62Laser-heated cavity system
#63Gas laser apparatus and magnetic bearing control method
#64Optical resonators that utilize plasma confinement of a laser gain media
#65Laser gas regeneration system and laser system
#66Gas optimization in a gas discharge light source
#67Laser apparatus
#68Iodine laser based defense system
#69LASER UNIT AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM
#70GAS LASER APPARATUS
#71Gas laser apparatus
#72Gas laser apparatus
#73GAS LASER APPARATUS
#74Laser apparatus including gas supply device and exhausting device
#75Multilayer electrode assembly
#76GAS LASER APPARATUS
#77Laser apparatus and extreme ultraviolet light generation system
#78EXCIMER LASER OSCILLATION DEVICE HAVING GAS RECYCLE FUNCTION
#79Laser machining device
#80Optical device and excimer laser annealing equipment
#81Excimer laser generator and excimer laser annealing equipment
#82Excimer laser apparatus
#83Plasma confinement of a laser gain media for gain-amplified lasers
#84Laser gas purifying system and laser system
#85Narrow band excimer laser apparatus
#86Lithographic apparatus
#87Laser unit management system
#88LASER GAS PURIFYING SYSTEM
#89Laser chamber with metal damper member
#90System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system
#91Excimer laser apparatus and excimer laser system
#92Laser unit and non-transitory computer-readable storage medium
#93Online calibration for repetition rate dependent performance variables
#94Excimer laser chamber device
#95HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS
#96Discharge excitation gas laser apparatus
#97Gas laser apparatus
#98System and method for automatic gas optimization in a two-chamber gas discharge laser system
#99Gas optimization in a gas discharge light source
#100Laser oscillation device having laser medium circulating tube
#101Gas mixture control in a gas discharge light source
#102Gas laser
#103Gas mixture control in a gas discharge light source
#104Gas Flow Laser
#105LASING GAS RECYCLING
#106Gas laser oscillator having auxiliary electrodes
#107Laser oscillator comprising heat exchanger having function of collecting foreign matters
#108System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system
#109Vacuum container of laser oscillator
#110Gas laser device and condenser
#111Laser chamber
#112Pulsed iodine laser apparatus
#113Gas laser device and control method therefor
#114Gas laser oscillation device
#115CO2-N2-HE GAS DYNAMIC LASER
#116Excimer laser apparatus and excimer laser system
#117Laser chamber
#118Temperature controllable gas laser oscillator
#119Excimer laser apparatus and excimer laser system
#120Gas laser apparatus
#121Laser unit and non-transitory computer-readable storage medium
#122Gas laser oscillation apparatus of orthogonal excitation type
#123Laser oscillator provided with blower
#124Gas laser apparatus for determining composition ratio of laser gas
#125Compensation for a disturbance in an optical source
#126GAS LASER APPARATUS CAPABLE OF INSPECTING AIR-TIGHTNESS OF LASER GAS SUPPLY PIPE
#127Laser system able to estimate hermetic seal of laser gas container
#128GAS LASER OSCILLATION APPARATUS, GAS LASER OSCILLATION METHOD AND GAS LASER PROCESSING MACHINE
#129Gas laser device having function for discriminating type of alarm
#130Laser oscillator for improving beam quality
#131Laser oscillator provided with laser medium flow path
#132Gas laser oscillator capable of controlling gas pressure and gas consumption amount
#133Gas laser oscillator capable of estimating sealability of gas container
#134Gas laser device
#135Laser oscillator provided with blower
#136Gas circulation type laser oscillator
#137Flow guide device for dual-electrode discharge cavity, dual electrode discharge cavity utilize the same and excimer laser
#138Laser machining apparatus changing operation based on length of power-down time
#139Carbon dioxide gas laser oscillator which can estimate composition ratio of laser gas
#140Laser chamber and discharge excitation gas laser apparatus
#141Gas laser oscillator controlling adjusted level of laser power supply
#142Gas circulation loop for a laser discharge tube
#143Gas laser apparatus carrying out improved startup process
#144Catalytic conversion of an optical amplifier gas medium
#145Gas laser system re-activatable without any damage within short time during recovery of power supply
#146Laser apparatus
#147Method and system for performing automatic gas refills for a gas laser
#148Method of controlling laser apparatus and laser apparatus
#149Sub 200nm laser pumped homonuclear excimer lasers
#150Gas laser resonator
#151Discharge-pumped gas laser device
#152Cooling laser gas
#153Excimer laser apparatus and excimer laser system
#154Gas lasers including heat exchangers
#155COlaser device and COlaser processing device
#156Gas laser oscillator having function of judging start of discharge
#157Marking device for marking an object with marking light
#158Lasing device
#159Catalytic generation of metastable singlet oxygen
#160Gas laser device
#161Discharge-pumped gas laser device
#162Gas laser oscillator apparatus and laser gas replacement method
#163Blower apparatus and gas laser oscillation apparatus
#164Waveguide COlaser with multiply folded resonator
#165Gas laser oscillator with discharge start judgment function
#166Single cavity dual-electrode discharge cavity and excimer laser
#167Metal vapor circulating system
#168GAS LASER DEVICE
#169Laser beam amplifier and laser apparatus using the same
#170Gas laser device
#171Control device and control method for laser processing machine
#172Gas laser oscillator and gas exchange method for gas laser oscillator
#173Continuous mass flow gas replenishment for gas lasing devices
#174System and method for extending gas life in a two chamber gas discharge laser system
#175Excimer laser apparatus and excimer laser system
#176System and method for high accuracy gas inject in a two chamber gas discharge laser system
#177Gas laser apparatus equipped with power calculation unit
#178GAS PURIFIER FOR AN EXCIMER LASER
#179Gas laser having radial and axial gas bearings
#180Command apparatus in a gas laser oscillator, capable of command at high speed and with high precision
#181System and method for automatic gas optimization in a two-chamber gas discharge laser system
#182System and method for high accuracy gas refill in a two chamber gas discharge laser system
#183Gas laser oscillation device and gas laser processing machine
#184Waveguide COlaser with mutiply folded resonator
#185System and method for controlling gas concentration in a two-chamber gas discharge laser system
#186Laser device for exposure apparatus
#187APPARATUS AND METHOD FOR PURGING AND RECHARGING EXCIMER LASER GASES
#1886 KHz and above gas discharge laser system
#189Catalyst module for high repetition rate COlasers
#190Gas laser
#191Gas laser oscillator apparatus and gas laser machining apparatus
#192Multiple discharge COlaser with improved repetition rate
#193Laser oscillator and laser machining apparatus
#194Gas laser oscillation device and gas laser processing machine
#195GAS LASER DEVICE
#196Gas laser oscillator having function for judging discharge initiation
#197Laser device that stably controls very low laser power
#198Line narrowing module
#199Palladium-containing nanoscale catalysts
#200OPERATING METHOD OF EXCIMER LASER SYSTEM
#201Recovery of energy from a laser machining system
#202Lasers
#203METHOD AND APPARATUS FOR EFFICIENTLY OPERATING A GAS DISCHARGE EXCIMER LASER
#204APPARATUS AND METHOD FOR PURGING AND RECHARGING EXCIMER LASER GASES
#205Laser beam amplifier and laser apparatus using the same
#206Gas discharge laser chamber
#207Metal fluoride trap
#208Gas-discharge laser
#209Line narrowing module
#210Impurity removing apparatus and method of operating the same
#211Laser Discharge Tube Assembly for a Gas Laser and Production Method for the Same
#212High pulse repetition rate gas discharge laser
#213Gas laser oscillator
#214Supersonic diffuser
#215Cross-flow fan impeller for a transversley excited, pulsed, gas discharge laser
#216STARTUP METHOD FOR GAS LASER UNIT AND GAS LASER UNIT HAVING STARTUP FUNCTION
#217Unstable optical resonator and laser device
#218Atomic lasers with exciplex assisted absorption
#219Optically pumped alkali laser and amplifier using helium-3 buffer gas
#220METHOD AND APPARATUS FOR EFFICIENTLY OPERATING A GAS DISCHARGE EXCIMER LASER
#221Laser gas injection system
#222Excimer laser device operable at high repetition rate and having high band-narrowing efficiency
#223Method and system for producing singlet delta oxygen (SDO) and laser system incorporating an SDO generator
#224Line narrowing module
#225Method for discriminating anomaly in gas composition and discharge excitation type gas laser oscillator
#226Gas laser apparatus and method
#227Gas lasers including nanoscale catalysts and methods for producing such lasers
#228Laser device for exposure device
#229Gas laser apparatus, and method and device for monitoring blower
#230Gas laser oscillator
#231Method for operating a vacuum plasma process system
#232Compact sealed-off excimer laser
#233Gas laser oscillating unit
#234Anodes for fluorine gas discharge lasers
#235Gas laser oscillator and gas laser beam machine
#236Chamber for a high energy excimer laser source
#237Gas purification in an excimer laser using a stirling cycle cooler
#238Matched impedance controlled avalanche driver
#239Optical oxygen laser and method
#240Laser system
#241Waveguide laser having reduced cross-sectional size and/or reduced optical axis distortion
#242Gas laser oscillator and method of measuring laser gas replacement amount
#243Excimer laser and line narrowing module
#244Gas discharge laser light source beam delivery unit
#245External optics and chamber support system
#246Thermal-expansion tolerant, preionizer electrode for a gas discharge laser
#247Gas laser oscillator
#248Blower for laser oscillator and laser oscillator
#249High frequency discharge excited gas laser oscillator
#250Apparatus and method for purging and recharging excimer laser gases
#251LASER PROCESSING DEVICE
#252Gas discharge laser line narrowing module
#253Acoustic shock-wave damping in pulsed gas-laser discharge
#254High pulse repetition rate gas discharge laser
#255Laser oscillator
#256Cathodes for fluorine gas discharge lasers
#257Gas laser apparatus
#258Palladium-containing nanoscale catalysts
#259Timing control for two-chamber gas discharge laser system
#260Excimer laser device, laser gas exchange method and partial gas exchange quantity calculation method
#261Hybrid electrode support bar
#262Blower used for laser oscillator
#263Gas/liquid separation utilizing bunched mesh materials
#264Gas discharge laser output light beam parameter control
#2656 Khz and above gas discharge laser system
#266Very narrow band, two chamber, high rep-rate gas discharge laser system
#267Gas laser oscillator
#268Line narrowing module
#269Gas laser device and exposure apparatus using the same
#270Method and apparatus for carrying out a laser operation and use of a quick-change filter in such a laser operation
#271Discharge excitation type pulse laser apparatus
#272Laser apparatus
#273Laser gas replenishment method
#274Restricted getter
#275Laser oscillating apparatus and laser working machine
#276Very narrow band, two chamber, high rep-rate gas discharge laser system
#277Gas discharge laser chamber improvements
#278Laser unit
#279Unstable optical resonator and laser device
#280Method and apparatus for controlling the output of a gas discharge laser system
#281Rare gas-halogen excimer lasers with baffles
#282Gas discharge MOPA laser spectral analysis module
#283Laser output light pulse stretcher
#284Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control
#285Laser system sealing
#286Matched impedance controlled avalanche driver
#287Laser spectral engineering for lithographic process
#288Axial flow type gas laser oscillator
#289Gas discharge MOPA laser spectral analysis module
#290Laser spectral engineering for lithographic process
#291Optical elements with protective undercoating
#292Passive gas flow management and filtration device for use in an excimer or transverse discharge laser
#293Timing control for two-chamber gas discharge laser system
#294Discharge laser with porous insulating layer covering anode discharge surface
#295Low-pressure axial direction excitation type Flaser oscillator
#296Tunable laser system and amplifier using a noble gas-filled hollow-core fiber waveguide
#297Gas optimization in a gas discharge light source
#298System and method for automatic gas optimization in a two-chamber gas discharge laser system
#299Techniques and apparatus for managing lasing gas concentrations
#300Optical surface preservation techniques and apparatus